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US5593511A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of nitridization of titanium thin films

Assignee: Tokyo Electron Ltd
•
Filing: 1995-12-06
•
Granted: 1997-01-14
•
Expires: 2015-12-06
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Abstract

Abstract Titanium films are nitrided at temperatures less than 650 DEG C., and preferably between 400 DEG C. and 500 DEG C., by treating the titanium film with a plasma formed from a nitriding gas at elevated temperatures. The plasma is created by subjecting the nitriding gas to RF energy, preferably an electrode having a frequency of 13.56 MHz or less. The reaction temperature can be reduced by lowering the plasma frequency to less than 500 KHz. This provides for nitridization at temperatures of 480 DEG C. and lower.

Inventors

  • 👤 Robert F. Foster
  • 👤 Joseph T. Hillman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 16:50
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/0641; C23C14/14; C23C14/22; C23C14/58; C23C14/5826; C23C14/5846; C23C14/586; C23C8/00; C23C8/06; C23C8/36; H; H10; H10P; H10P95/00; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10W20/047; H10W20/048; Y; Y10; Y10S; Y10S257/00; Y10S257/915

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 121 words
A method of applying a titanium nitride layer over a titanium film comprising: exposing said titanium film to a plasma selected from the group consisting of a nitrogen plasma and an ammonia plasma at a temperature less than about 500° C. for 20 to 300 seconds, wherein said plasma is created by subjecting a nitriding gas selected from the group consisting of ammonia and nitrogen to an Rf electrode, thereby forming a titanium nitride layer on said titanium film; and depositing on said titanium nitride layer a titanium nitride film by chemical vapor deposition wherein said titanium nitride film is formed from titanium tetrachloride and a gas selected from the group consisting of nitrogen, ammonia and mixtures of nitrogen and ammonia.
Claim 2
Independent Claim 121 words
A method of applying a titanium nitride layer over a titanium film comprising: exposing said titanium film to a plasma selected from the group consisting of a nitrogen plasma and an ammonia plasma at a temperature less than about 500° C. for 20 to 300 seconds, wherein said plasma is created by subjecting a nitriding gas selected from the group consisting of ammonia and nitrogen to an Rf electrode, thereby forming a titanium nitride layer on said titanium film; and depositing on said titanium nitride layer a titanium nitride film by chemical vapor deposition wherein said titanium nitride film is formed from titanium tetrachloride and a gas selected from the group consisting of nitrogen, ammonia and mixtures of nitrogen and ammonia.
Claim 3
Dependent Claim 12 words
The method claimed in claim 1 wherein said nitriding gas is ammonia.
Claim 4
Dependent Claim 20 words
The method claimed in claim 1 wherein said RF electrode has a frequency of 400 KHz to about 33 MHz.
Claim 5
Dependent Claim 24 words
The method claimed in claim 2 wherein said temperature is less than about 500° C. and said frequency is less than about 500 KHz.
Claim 6
Dependent Claim 31 words
The method claimed in claim 1 wherein said nitriding gas is passed in contact with said RF electrode at a flow rate of from about 10 sccm to about 10,000 sccm.
Claim 7
Dependent Claim 25 words
The method claimed in claim 5 wherein said plasma frequency is less than about 500 KHz and said temperature is less than about 500° C.
Claim 8
Dependent Claim 32 words
The method claimed in claim 1 wherein said plasma is created by passing said gas through a showerhead nozzle above said titanium film and wherein said plasma is generated at said showerhead.
Claim 9
Dependent Claim 28 words
The method claimed in claim 7 wherein said showerhead is an RF electrode and said plasma is generated by said showerhead as nitridization gas passes through said showerhead.
Claim 10
Dependent Claim 43 words
The method claimed in claim 7 wherein said nitridization gas is introduced into a flow chamber and develops a flow profile within said chamber, wherein said RF electrode comprises a showerhead and said plasma is created as said gas passes through said showerhead.
Claim 11
Dependent Claim 24 words
The method claimed in claim 1 wherein said RF electrode is positioned from about 10 cm to about 10 mm from said titanium film.

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2000-01-14 2000-07-15 2001-01-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2004-01-14 2004-07-15 2005-01-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2008-01-14 2008-07-15 2009-01-14 $7700.00 Window Closed / Lapsed

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