Abstract A functional ZnSe1-xTex:H film having a high doping efficiency and with no substantial change in the characteristics upon light irradiation. Said film is characterized in that the Se/Te quantitative ratio is in the range from 3:7 to 1:9 by the atom number ratio, hydrogen atoms are contained in an amount of 1 to 4 atomic % and the ratio of the crystal grain domains per unit volume is in the range from 65 to 85% by volume. There are also provided improved p-type and n-type ZnSe1-xTex:H:M films (M stands for a dopant) of high electroconductivity characterized in the foregoing way. These deposited films may be efficiently deposited even on a non-single crystal substrate made of metal, glass or synthetic resin with a high deposition rate. These films are suited for the preparation of a high functional device such as a photovoltaic element.
A functional deposited film on a substrate, said film comprising zinc atoms, selenium atoms, tellurium atoms and at least hydrogen atoms, characterized in that the quantitative ratio of said selenium atoms to said tellurium atoms is in the range from 1:9 to 3:7 by the atom number ratio: said hydrogen atoms are contained in an amount of 1 to 4 atomic %: and crystal grain domains are contained in a proportion per unit volume of 65 to 85% by volume.
Claim 2
Dependent Claim
80 words
A functional deposited film on a substrate, said film comprising zinc atoms, selenium atoms, tellurium atoms and at least hydrogen atoms, characterized in that the quantitative ratio of said selenium atoms to said tellurium atoms is in the range from 1:9 to 3:7 by the atom number ratio: said hydrogen atoms are contained in an amount of 1 to 4 atomic %: and crystal grain domains are contained in a proportion per unit volume of 65 to 85% by volume.
Claim 3
Dependent Claim
13 words
The functional deposited film according to claim 1 which has p-type semiconductive characteristics.
Claim 4
Dependent Claim
29 words
The functional deposited film according to claim 2 which contains a member selected from the group consisting of Group I elements and Group V elements of the Periodic Table.
Claim 5
Dependent Claim
13 words
The functional deposited film according to claim 3, wherein said member is lithium.