US4445965A
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Method for making thin film cadmium telluride and related semiconductors for solar cells
Assignee: Carnegie Mellon University
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Filing: 1982-06-14
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Granted: 1984-05-01
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Expires: 2002-06-14
Abstract
Abstract A thin cadmium-telluride semiconductor film for use in solar cells is grown epitaxially on a second semiconductor film, typically tellurium, which may be epitaxial on a substrate semiconductor, typically single-crystal cadmium-telluride. The second semiconductor has a lower resistance to layered cleaving than the desired semiconductor. Application of a strain to the sandwich causes the desired thin CdTe layer to peel off by fracture along the plane of the second semiconductor.
Inventors
- 👤 Arthur G. Milnes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 00:40
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/46; C30B29/48; C30B33/00; H; H10; H10F; H10F77/00; H10F77/10; H10F77/12; H10F77/123; H10P; H10P14/00; H10P14/20; H10P14/27; H10P14/29; H10P14/2901; H10P14/2913; H10P14/2917; H10P14/32; H10P14/3202; H10P14/3236; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432; H10P50/00; H10P50/20; H10P52/00; H10P95/00; H10P95/70; Y; Y10; Y10S; Y10S117/00; Y10S117/915; Y10S148/00; Y10S148/135; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
129 words
A method of producing a desired first thin semiconductor film for use in solar cells comprising: (a) growing epitaxially a second semiconductor film on a third semiconductor the second semiconductor film having a lower fracture strength than the desired semiconductor film and the second semiconductor having a substantial lattice match with the desired semiconductor; (b) growing epitaxially the desired semiconductor film on the second semiconductor film so that the second semiconductor film orients the desired semiconductor film; (c) affixing a rigid substrate to the under surface of the third semiconductor and a rigid superstrate to the upper surface of the desired semiconductor film; (d) applying stress to the rigid superstrate and rigid substrate so as to fracture the said second semiconductor film; and (e) detaching the desired semiconductor film.
Claim 2
Independent Claim
129 words
A method of producing a desired first thin semiconductor film for use in solar cells comprising: (a) growing epitaxially a second semiconductor film on a third semiconductor the second semiconductor film having a lower fracture strength than the desired semiconductor film and the second semiconductor having a substantial lattice match with the desired semiconductor; (b) growing epitaxially the desired semiconductor film on the second semiconductor film so that the second semiconductor film orients the desired semiconductor film; (c) affixing a rigid substrate to the under surface of the third semiconductor and a rigid superstrate to the upper surface of the desired semiconductor film; (d) applying stress to the rigid superstrate and rigid substrate so as to fracture the said second semiconductor film; and (e) detaching the desired semiconductor film.
Claim 3
Dependent Claim
20 words
The method of claim 1 in which the desired semiconductor film and the third semiconductor have a substantial lattice match.
Claim 4
Independent Claim
18 words
The method of claims 1 or 2 in which the desired semiconductor film is substantially a single crystal.
Claim 5
Independent Claim
17 words
The method of claims 1 or 2 in which the third semiconductor is substantially a single crystal.
Claim 6
Independent Claim
22 words
The method of claims 1 or 2 in which the desired semiconductor film and the third semiconductor are of the same composition.
Claim 7
Independent Claim
27 words
The method of claims 1 or 2 in which the desired semiconductor film is a compound and the second semiconductor film comprises an element of that compound.
Claim 8
Independent Claim
24 words
The method of claims 1 or 2 in which the second semiconductor film has a natural cleavage plane parallel to the desired semiconductor film.
Claim 9
Independent Claim
18 words
The method of claims 1 or 2 in which the desired semiconductor film is a crystal of CdTe.
Claim 10
Dependent Claim
16 words
The method of claim 8 in which the second semiconductor film is a crystal of Te.
Claim 11
Dependent Claim
15 words
The method of claim 8 in which the third semiconductor is a crystal of CdTe.
Claim 12
Independent Claim
75 words
The method of claims 1 or 2 in which the desired semiconductor film is a crystal selected from the group consisting of CdTe x Se 1-x , Zn y Cd 1-y Te, Zn y Cd 1-y Se x Te 1-x , Zn y Cd 1-y Se x S 1-x , CdS x Te 1-x , Zn y Cd 1-y SzSe x Te 1-x-z where x, y and z may have values between 0 and 0.49.
Claim 13
Independent Claim
40 words
The method of claims 1 or 2 or 11 in which the second semiconductor film is selected from the group consisting of Te, PbTe, Te-rich mixtures of PbTe and Te, SnTe, In 2 -Te, Ga 2 Te 3 and GeTe.
Claim 14
Dependent Claim
52 words
The method of claim 12 in which the second semiconductor film after being epitaxially grown is mechanically treated to remove parallel thin stripes of the second semiconductor film so as to expose the third semiconductor therebelow but not to remove the stripes of the second semiconductor film remaining between the removed stripes.
Claim 15
Dependent Claim
20 words
The method of claim 13 in which the second semiconductor film is mechanically treated by scribing with a comb-like device.
Claim 16
Dependent Claim
52 words
The method of claim 12 in which the second semiconductor film after being epitaxially grown is selectively heated to remove parallel thin stripes of the second semiconductor film so as to expose the third semiconductor therebelow but not to remove the stripes of the second semiconductor film remaining between the removed stripes.
Claim 17
Dependent Claim
33 words
The method of claim 13 or 15 in which the stripes of the second semiconductor films removed are of width less than those of the stripes of the second semiconductor film remaining therebetween.
Claim 18
Dependent Claim
84 words
The method of claim 15 in which the second semiconductor film is selectively heated by covering it with a perforated mask or a partially optically transparent mask and impinging thereon a laser beam of a wave length which is absorbed by the second semiconductor film but is not substantially absorbed by the substrate semiconductor, whereby the portion of the second semiconductor film exposed by the perforations of the mask is evaporated but the portion of that film covered by the mask is not evaporated.
Claim 19
Dependent Claim
40 words
The method of claim 12 in which the second semiconductor film is selectively epitaxially grown on the third semiconductor so as to cover a first portion of the third semiconductor and leave uncovered a second portion of the third semiconductor.
Claim 20
Dependent Claim
43 words
The method of claim 18 in which the second semiconductor film is selectively epitaxially grown on the third semiconductor by covering it with a perforated mask and depositing the second semiconductor film material through the perforations of the mask on the third semiconductor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-01 | 1987-10-31 | 1988-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-01 | 1991-10-31 | 1992-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-01 | 1995-10-31 | 1996-05-01 | $7700.00 | Window Closed / Lapsed |