US4885067A
Expired / Lapsed
US
⏱️ 0.0 years remaining
In-situ generation of volatile compounds for chemical vapor deposition
Assignee: Raytheon Co
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Filing: 1989-05-15
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Granted: 1989-12-05
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Expires: 2009-05-15
Abstract
Abstract Method and apparatus for the in-situ generation of volatile compounds within the process piping of a CVD system. A source of molecules is located upstream from a solid material which is desired to be deposited within a reactor chamber of the system. The molecules are acted upon by a disassociation means, such as a pyrolytic, plasma discharge, or radiation means, to form highly reactive free radicals. These free radicals are fragments of molecules containing unpaired electrons. In accordance with the invention, these highly reactive radicals are generated near the solid source material in a gas stream which transports the radicals to the solid material before the radicals recombine with one another to form unreactive molecules. The free radicals react with the solid source material to form volatile compounds, such as organometallic compounds, which are subsequently conveyed to the reaction chamber of the system for deposition therein.
Inventors
- 👤 Fred P. Doty
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 15:32
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4488
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
94 words
A method of generating a volatile organic compound for use in a CVD system, comprising the steps of: providing a source of organic molecules; introducing the molecules into a predetermined region of a process pipe coupled to the system; disassociating the molecules within the predetermined region to generate free radicals therefrom; passing the radicals over a solid source of material, the material being a material desired to be deposited within the system, the directing the volatile compound into a portion of the system wherein the volatile compound is decomposed and the material is deposited.
Claim 2
Independent Claim
94 words
A method of generating a volatile organic compound for use in a CVD system, comprising the steps of: providing a source of organic molecules; introducing the molecules into a predetermined region of a process pipe coupled to the system; disassociating the molecules within the predetermined region to generate free radicals therefrom; passing the radicals over a solid source of material, the material being a material desired to be deposited within the system, the directing the volatile compound into a portion of the system wherein the volatile compound is decomposed and the material is deposited.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein the step of disassociating is accomplished by heating the predetermined region to a temperature sufficient to disassociate the molecules into free radicals.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein the step of disassociating is accomplished by generating an electrical plasma within the predetermined region.
Claim 5
Dependent Claim
35 words
The method of claim 1 wherein the step of disassociating is accomplished by irradiating the predetermined region with a source of ionizing radiation, the radiation having sufficient energy to disassociate the molecules into free radicals.
Claim 6
Dependent Claim
15 words
The method of claim 4 wherein the radiation is generated by an ultraviolet radiation source.
Claim 7
Dependent Claim
28 words
The method of claim 1 wherein the step of introducing further comprises a step of providing a carrier gas flow for carrying the molecules into the predetermined region.
Claim 8
Dependent Claim
25 words
The method of claim 1 wherein the step of passing is accomplished at a time before the free radicals have substantially recombined into unreactive molecules.
Claim 9
Independent Claim
103 words
A method of generating a plurality of volatile organic compounds within CVD system, comprising the steps of: generating a primary supply of organic free radicals within a portion of a process pipe of the system dividing the supply into a plurality of secondary supplies of organic free radicals; passing each one of the secondary supplies over a respective material which is desired to be deposited within the system, each of the secondary supplies reacting with the associated material to generate a volatile organic compound; and selectively directing each of the volatile organic compounds so generated into the system for deposition of the material.
Claim 10
Independent Claim
103 words
A method of generating a plurality of volatile organic compounds within CVD system, comprising the steps of: generating a primary supply of organic free radicals within a portion of a process pipe of the system dividing the supply into a plurality of secondary supplies of organic free radicals; passing each one of the secondary supplies over a respective material which is desired to be deposited within the system, each of the secondary supplies reacting with the associated material to generate a volatile organic compound; and selectively directing each of the volatile organic compounds so generated into the system for deposition of the material.
Claim 11
Dependent Claim
24 words
The method of claim 8 wherein the step of dividing is accomplished by providing the process pipe with a plurality of branches projecting therefrom.
Claim 12
Dependent Claim
33 words
The method of claim 9 wherein the step of passing further comprises a step of providing within each one of the branches one of the materials desired to be deposited within the system.
Claim 13
Dependent Claim
35 words
The method of claim 10 wherein the step of selectively directing is accomplished by providing each of the branches with a valve means operable for passing a desired amount of a volatile organic compound therethrough.
Claim 14
Dependent Claim
108 words
Apparatus for generating volatile organic compounds for use in a reactor chamber of an MOCVD system comprising: processing piping in communication with said reactor chamber; means for providing a source of organic molecules to a portion of the process piping; means for disassociating said organic molecules into organic free radicals, said disassociating means being operable for disassociating said molecules within said portion of said process piping; and means for contacting said radicals with at least one source of solid material such that said radicals react with and bond to said material whereby one or more volatile compounds containing atoms from said material are generated within said process piping.
Claim 15
Dependent Claim
108 words
Apparatus for generating volatile organic compounds for use in a reactor chamber of an MOCVD system comprising: processing piping in communication with said reactor chamber; means for providing a source of organic molecules to a portion of the process piping; means for disassociating said organic molecules into organic free radicals, said disassociating means being operable for disassociating said molecules within said portion of said process piping; and means for contacting said radicals with at least one source of solid material such that said radicals react with and bond to said material whereby one or more volatile compounds containing atoms from said material are generated within said process piping.
Claim 16
Dependent Claim
22 words
The apparatus of claim 12 wherein said disassociating means is a heating element thermally coupled to said portion of said process piping.
Claim 17
Dependent Claim
47 words
The apparatus of claim 12 wherein said disassociating means is a first and a second electrode disposed within said process piping, said electrodes being electrically coupled to a voltage source operable for generating a plasma region between said electrodes and within said portion of said process piping.
Claim 18
Dependent Claim
24 words
The apparatus of claim 12 wherein said disassociating means is a source of ionizing radiation radiatively coupled to said portion of said process piping.
Claim 19
Dependent Claim
59 words
The apparatus of claim 12 wherein said portion of said process piping has a plurality of branches projecting therefrom, each of said branches having an interior region communicating with a solid source of atoms and conveying a portion of said free radicals therethrough such that a plurality of volatile compounds are substantially simultaneously generated within each of said branches.
Claim 20
Dependent Claim
33 words
The apparatus of claim 16 further comprising a plurality of valve means, each one of which is coupled to a respective one of said branches for selectively passing an associated volatile compound therethrough.
Claim 21
Dependent Claim
14 words
The apparatus of claim 12 wherein said source of solid material is an alloy.
Claim 22
Dependent Claim
135 words
Apparatus for generating volatile organic compounds for use in a reactor chamber of an MOCVD system comprising: process piping in communication with said reactor chamber; means for providing a stream of organic molecules to said process piping flowing toward said reactor chamber; means for disassociating said molecules flowing within said process piping into free radicals, said means operable on said molecules within a portion of said process piping; and at least one source of solid material located within said process piping and downstream of said portion of said process piping where said means for disassociating is operable, said source of solid material for contacting said radicals such that said radicals react with and bond to said material, whereby one or more volatile organic compounds containing atoms from said material are generated within said process piping.
Claim 23
Dependent Claim
135 words
Apparatus for generating volatile organic compounds for use in a reactor chamber of an MOCVD system comprising: process piping in communication with said reactor chamber; means for providing a stream of organic molecules to said process piping flowing toward said reactor chamber; means for disassociating said molecules flowing within said process piping into free radicals, said means operable on said molecules within a portion of said process piping; and at least one source of solid material located within said process piping and downstream of said portion of said process piping where said means for disassociating is operable, said source of solid material for contacting said radicals such that said radicals react with and bond to said material, whereby one or more volatile organic compounds containing atoms from said material are generated within said process piping.
Claim 24
Dependent Claim
39 words
An apparatus as in claim 19 wherein said process piping divides into a plurality of branches after said portion of said process piping on which said means for disassociation is operable, each branch containing a source of solid material.
References Cited (Backward Citations)
US4365587A
Cited
US4368689A
Cited
US4623426A
Cited
EP0140625A1
Cited
WO1985003460A1
Cited
US4714627A
Cited
US4726320A
Cited
EP0229707A2
Cited
US4732793A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-04 | 1993-06-05 | 1993-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-04 | 1997-06-05 | 1997-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-04 | 2001-06-05 | 2001-12-05 | $7700.00 | Window Closed / Lapsed |