US4726320A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser CVD device
Assignee: Fuji Electric Co Ltd
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Filing: 1986-03-27
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Granted: 1988-02-23
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Expires: 2006-03-27
Abstract
Abstract In a laser CVD device, immediately before being emitted from a nozzle, raw gas in a reaction chamber reacts opto-chemically with a focused laser beam so that it is decomposed to form a radical flow. The radical flow flows against a substrate set in the reaction chamber so that active materials produced by the optochemical decomposition accumulate on the substrate to form a thin film thereon.
Inventors
- 👤 Yukimi Ichikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:32
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/483
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
100 words
A laser CVD device comprising: a reaction chamber; a substrate supporting member provided in said reaction chamber; a raw gas introducing pipe extending into said reaction chamber and having a nozzle connected thereto with an orifice at one end for emitting a flow of raw gas towards said substrate supporting member; a laser beam source provided outside said reaction chamber; and an optical system for focusing a laser beam from said laser beam source on said one end of the nozzle for irradiating substantially all of the raw gas emitted into the reaction chamber through said orifice from said nozzle.
Claim 2
Dependent Claim
100 words
A laser CVD device comprising: a reaction chamber; a substrate supporting member provided in said reaction chamber; a raw gas introducing pipe extending into said reaction chamber and having a nozzle connected thereto with an orifice at one end for emitting a flow of raw gas towards said substrate supporting member; a laser beam source provided outside said reaction chamber; and an optical system for focusing a laser beam from said laser beam source on said one end of the nozzle for irradiating substantially all of the raw gas emitted into the reaction chamber through said orifice from said nozzle.
Claim 3
Dependent Claim
37 words
A device according to claim 1, wherein said reaction chamber includes a window for admitting said laser beam into said chamber such that the direction of said beam is substantially perpendicular to said flow of raw gas.
Claim 4
Dependent Claim
13 words
A device according to claim 2, wherein said optical system includes a lens.
Claim 5
Dependent Claim
30 words
A device according to claim 2, wherein said raw gas introducing pipe has a plurality of nozzles connected thereto for emitting streams of raw gas toward said substrate supporting member.
Claim 6
Dependent Claim
20 words
A device according to claim 4, wherein said plurality of nozzles is arranged in a matrix of rows and columns.
Claim 7
Dependent Claim
47 words
A device according to claim 5, wherein said laser beam source includes means for producing a plurality of beams, and wherein said optical system focuses each of said beams on said one end of each of said plurality of nozzles in the same row in said matrix.
Claim 8
Dependent Claim
62 words
A device according to claim 1, wherein said laser beam source produces laser beam pulses to be focused on said flow of raw gas emitted from said nozzle, and wherein said nozzle includes a valve means for opening and closing said orifice of said nozzle to emit a pulse of said gas therefrom in synchronization with said pulses of said laser beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-22 | 1991-08-24 | 1992-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-22 | 1995-08-24 | 1996-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-22 | 1999-08-24 | 2000-02-23 | $7700.00 | Window Closed / Lapsed |