US4365587A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming organic polymer thin films utilizing microwave induced plasmas
Assignee: Toshiba Corp
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Filing: 1979-07-25
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Granted: 1982-12-28
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Expires: 1999-07-25
Abstract
Abstract An apparatus for forming a thin organic film on a substrate which includes a reaction chamber for receiving a substrate on which a thin organic film is to be formed; a microwave discharge tube for supplying the reaction chamber with a carrier gas activated by microwave discharge; a microwave-generating mechanism provided with a hollow resonator for a microwave discharge; and a mechanism for supplying a carrier gas to the microwave discharge tube and a mechanism for supplying the reaction chamber with an organic compound monomer to be polymerized. That region of the microwave discharge tube where a plasma is produced by discharge does not extend to the reaction chamber, but is completely separated therefrom.
Inventors
- 👤 Masahiko Hirose
- 👤 Yoshimi Akai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 01:29
CPC Classifications
C; C08; C08F; C08F2/00; C08F2/46; C08F2/52; B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/122; B01J19/126; B01J2219/00; B01J2219/08; B01J2219/0894
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
191 words
An apparatus for forming a thin organic film upon a substrate by means of a plasma comprising: means for generating microwaves; a resonator having a hollow interior portion and connected to said microwave generating means; a tube for discharging said microwaves disposed across and penetrating said resonator for producing a microwave plasma in a plasma forming region of said tube; means connected to a first end portion of said tube for introducing a plasma generating carrier gas into said tube; a reaction chamber connected to and communicating with a second end portion of said tube and disposed apart from said plasma forming region; means for evacuating said reaction chamber connected to said reaction chamber; means for supplying an organic compound monomer into said reaction chamber, said supplying means having an inlet for introducing said monomer into said chamber such that said monomer is polymerized; a substrate disposed within said chamber for supporting said polymerized monomer disposed nearer said second end portion of said tube than said inlet of said supplying means; and wherein said substrate is disposed downstream from said inlet and downstream from said second end portion of said tube.
Claim 2
Independent Claim
191 words
An apparatus for forming a thin organic film upon a substrate by means of a plasma comprising: means for generating microwaves; a resonator having a hollow interior portion and connected to said microwave generating means; a tube for discharging said microwaves disposed across and penetrating said resonator for producing a microwave plasma in a plasma forming region of said tube; means connected to a first end portion of said tube for introducing a plasma generating carrier gas into said tube; a reaction chamber connected to and communicating with a second end portion of said tube and disposed apart from said plasma forming region; means for evacuating said reaction chamber connected to said reaction chamber; means for supplying an organic compound monomer into said reaction chamber, said supplying means having an inlet for introducing said monomer into said chamber such that said monomer is polymerized; a substrate disposed within said chamber for supporting said polymerized monomer disposed nearer said second end portion of said tube than said inlet of said supplying means; and wherein said substrate is disposed downstream from said inlet and downstream from said second end portion of said tube.
Claim 3
Dependent Claim
17 words
A thin organic film-forming apparatus according to claim 1, wherein said microwave-generating means further comprises a magnetron.
Claim 4
Dependent Claim
18 words
A thin organic film-forming apparatus according to claim 1, wherein said carrier gas further comprises a rare gas.
Claim 5
Dependent Claim
41 words
A thin organic film-forming apparatus according to claim 1, further comprising means for conducting said carrier gas activated by said plasma produced in said plasma-forming region of said microwave discharge tube to said reaction chamber to contact said organic compound monomer.
Claim 6
Dependent Claim
17 words
A thin organic film-forming apparatus according to claim 1, wherein said carrier gas further comprises nitrogen gas.
Claim 7
Dependent Claim
17 words
A thin organic film-forming apparatus according to claim 1, wherein said carrier gas further comprises hydrogen gas.
References Cited (Backward Citations)
US3518108A
Cited
US4138306A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-12-27 | 1986-06-28 | 1986-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-12-27 | 1990-06-28 | 1990-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-12-27 | 1994-06-28 | 1994-12-28 | $7700.00 | Window Closed / Lapsed |