Method for forming polycrystalline film by chemical vapor deposition process

Abstract

Abstract PCT No. PCT/JP90/00433 Sec. 371 Date Nov. 28, 1990 Sec. 102(e) Date Nov. 28, 1990 PCT Filed Mar. 30, 1990 PCT Pub. No. WO90/12126 PCT Pub. Date Oct. 18, 1990.A method for forming a polycrystalline film, characterized by using hydrogen gas and a film forming raw material gas, contacting the hydrogen gas with an activating energy in a space different from a film forming space of a film forming chamber in which a substrate for film formation is arranged, to excite the hydrogen gas into an active species (H), introducing said active species (H) into the film forming chamber, simultaneously introducing the film forming raw material gas into the film forming chamber, independently from the active species (H), mixing and contacting the active species (H) with the film forming raw material gas to produce a plasma region in the film forming space maintained at a predetermined pressure, periodically changing the distribution of the concentration of the active species (H) near the surface of the substrate maintained at a predetermined temperature.

Inventors

• 👤 Hiroyuki Tokunaga

Bibliographic Details