US4886683A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Low temperature metalorganic chemical vapor depostion growth of group II-VI semiconductor materials
Assignee: Raytheon Co
•
Filing: 1986-06-20
•
Granted: 1989-12-12
•
Expires: 2006-06-20
Abstract
Abstract A method for growing a Group II-VI epitaxial layer on a substrate is described. The method includes the steps of directing a plurality of vapor flows toward the substrate including a Group II metalorganic vapor, a Group VI organic vapor, with said Group VI organic having an organic group bonded to the Group VI element selected from the group consisting of a secondary alkyl, a tertiary alkyl, an allyl, a cycloallyl, and a benzyl, and a Group II elemental metal vapor. The directed flows of Group II metalorganic vapor, Group VI organic vapor and Group II metal vapor are chemically reacted to provide the epitaxial layer.
Inventors
- 👤 William E. Hoke
- 👤 Lindley T. Specht
- 👤 Ralph Korenstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:10
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432; C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/46; C30B29/48; H10P14/24; H10P14/29; H10P14/2901
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
91 words
A method for providing a layer comprising a group II-VI material over a substrate comprising the steps of: directing a flow comprising a least one Group II vapor species towards the substrate; directing a flow of a Group VI organic vapor towards the substrate, said organic having at least one organic group having an activation energy for formation of a free radical during decomposition of the organic group from the Group VI element which is lower than the activation energy of tertiary alkyls of the group VI element and thermally decomposing.
Claim 2
Independent Claim
91 words
A method for providing a layer comprising a group II-VI material over a substrate comprising the steps of: directing a flow comprising a least one Group II vapor species towards the substrate; directing a flow of a Group VI organic vapor towards the substrate, said organic having at least one organic group having an activation energy for formation of a free radical during decomposition of the organic group from the Group VI element which is lower than the activation energy of tertiary alkyls of the group VI element and thermally decomposing.
Claim 3
Dependent Claim
46 words
The method as recited in claim 1 wherein the selected organic group has a double bonding characteristic and the lower activation energy for formation of a free radical is provided from delocalization of unpaired electron charge over the selected organic group having the double bonding characteristic.
Claim 4
Dependent Claim
34 words
The method as recited in claim 2 wherein the organic group is selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group bonded to the Group VI element.
Claim 5
Dependent Claim
14 words
The method as recited in claim 3 wherein the Group VI element is tellurium.
Claim 6
Independent Claim
76 words
A method for providing a layer comprising the step of: decomposing a flow of a Group VI organic vapor directed towards a substrate comprised of a material selected from the group consisting of a Group II-VI material, a Group III-V material, and Al 2 O 3 , said organic having at least one group bonded to the Group VI element selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group.
Claim 7
Independent Claim
76 words
A method for providing a layer comprising the step of: decomposing a flow of a Group VI organic vapor directed towards a substrate comprised of a material selected from the group consisting of a Group II-VI material, a Group III-V material, and Al 2 O 3 , said organic having at least one group bonded to the Group VI element selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group.
Claim 8
Independent Claim
84 words
A method for providing a layer comprising Group II-VI material over a substrate comprising the steps of: directing a flow comprising at least one Group II species towards the substrate; directing a flow of a Group VI organic toward the substrate, said organic having at least one organic group selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group bonded to the Group VI element; and chemically reacting and thermally decomposing the directed flows to form the layer.
Claim 9
Independent Claim
84 words
A method for providing a layer comprising Group II-VI material over a substrate comprising the steps of: directing a flow comprising at least one Group II species towards the substrate; directing a flow of a Group VI organic toward the substrate, said organic having at least one organic group selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group bonded to the Group VI element; and chemically reacting and thermally decomposing the directed flows to form the layer.
Claim 10
Independent Claim
98 words
A method for providing a layer comprising Group II - VI material over a substrate comprising the steps of: directing a flow of a Group II metalorganic vapor toward the substrate; directing a flow of a Group VI organic vapor toward the substrate, said Group VI organic having at least one organic group selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group bonded to the Group VI element; and chemically reacting and thermally decomposing the directed flows of Group II metalorganic vapor and Group VI organic vapor to form the layer.
Claim 11
Independent Claim
98 words
A method for providing a layer comprising Group II - VI material over a substrate comprising the steps of: directing a flow of a Group II metalorganic vapor toward the substrate; directing a flow of a Group VI organic vapor toward the substrate, said Group VI organic having at least one organic group selected from the group consisting of an allyl group, a benzyl group and a cycloallyl group bonded to the Group VI element; and chemically reacting and thermally decomposing the directed flows of Group II metalorganic vapor and Group VI organic vapor to form the layer.
Claim 12
Dependent Claim
49 words
The method as recited in claim 7 wherein the Group VI organic is selected from the group consisting of X-benzyltelluride, X-(2-propen-1-yl)telluride, X-(2-cyclopropen-1-yl)telluride, and where X is hydrogen or an organic group which may or may not be the same as the selected organic group bonded to the Te atom.
Claim 13
Dependent Claim
44 words
The method as recited in claim 7 further comprising the step of: directing a flow of a Group II metal toward the substrate and wherein the reacting step includes reaction of the Group II metal with the Group II metalorganic and Group VI organic.
Claim 14
Dependent Claim
57 words
The method as recited in claim 9 wherein the Group II metalorganic vapor comprises dimethylcadmium, the Group VI organic comprises X-benzyltelluride, X-(2-propen-1-yl)telluride, X-(2-cyclopropen-1-yl)telluride, where X is hydrogen or an organic group which may or may not be the same as the selected organic group bonded to the Te atom and the Group II metal vapor comprises mercury.
Claim 15
Dependent Claim
24 words
The method as recited in claim 8 wherein the vapors are reacted at a temperature in the range of 120° C. to 400° C.
Claim 16
Dependent Claim
24 words
The method as recited in claim 8 wherein the vapors are reacted at a temperature in the range of 150° C. to 300° C.
Claim 17
Dependent Claim
24 words
The method as recited in claim 8 wherein the vapors are reacted at a temperature in the range of 160° C. to 220° C.
Claim 18
Independent Claim
113 words
A method for providing a Group II-VI layer over a substrate comprising the steps of: directing a flow of a Group II metalorganic toward the substrate; directing a flow of a Group VI organic toward the substrate, said Group VI organic vapor having the general formula R 1 -X-R 2 , where R 1 and R 2 may or may not be the same and where at least one of groups R 1 and R 2 is a group selected from the group consisting of an allyl, a benzyl and a cycloallyl, and where X is a Group VI element; and reacting and thermally decomposing said flows to provide the Group II-VI layer.
Claim 19
Independent Claim
113 words
A method for providing a Group II-VI layer over a substrate comprising the steps of: directing a flow of a Group II metalorganic toward the substrate; directing a flow of a Group VI organic toward the substrate, said Group VI organic vapor having the general formula R 1 -X-R 2 , where R 1 and R 2 may or may not be the same and where at least one of groups R 1 and R 2 is a group selected from the group consisting of an allyl, a benzyl and a cycloallyl, and where X is a Group VI element; and reacting and thermally decomposing said flows to provide the Group II-VI layer.
Claim 20
Dependent Claim
65 words
The method as recited in claim 14 wherein the Group II metalorganic vapor comprises dimethylcadmium and the Group VI organic is selected from the group consisting of X-benzyltelluride, X-(2-propen-1-yl) telluride, X-(2-cyclopropen-1-yl) telluride, and where X is hydrogen or an organic group bonded to the Te atom which may or may not be the same as the selected organic group bonded to the Group VI element.
Claim 21
Dependent Claim
45 words
The method as recited in claim 15 further comprising the step of: directing a flow of a Group II metal toward the substrate and wherein the reacting step includes reaction of the Group II metal, with the Group II metalorganic and the Group VI organic.
Claim 22
Dependent Claim
54 words
The method as recited in claim 16 wherein the Group II metalorganic vapor comprises dimethylcadmium, the Group II metal is mercury and the Group VI organic vapor comprises an organic selected from the group consisting of X-benzyltelluride, X-(2-propen-1-yl) telluride, X-(2-cyclopropen-1-yl) telluride, where X is hydrogen or an organic group bonded to the Te atom.
Claim 23
Dependent Claim
24 words
The method as recited in claim 15 wherein the vapors are reacted at a temperature in the range of 120° C. to 400° C.
Claim 24
Dependent Claim
24 words
The method as recited in claim 15 wherein the vapors are reacted at a temperature in the range of 150° C. to 300° C.
Claim 25
Dependent Claim
24 words
The method as recited in claim 15 wherein the vapors are reacted at a temperature in the range of 160° C. to 220° C.
Claim 26
Dependent Claim
24 words
The method as recited in claim 17 wherein the vapors are reacted at a temperature in the range of 120° C. to 400° C.
Claim 27
Dependent Claim
24 words
The method as recited in claim 17 wherein the vapors are reacted at a temperature in the range of 150° C. to 300° C.
Claim 28
Dependent Claim
24 words
The method as recited in claim 17 wherein the vapors are reacted at a temperature in the range of 160° C. to 220° C.
Claim 29
Dependent Claim
14 words
The method as recited in claim 6 wherein the Group VI organic is dibenzyltelluride.
Claim 30
Dependent Claim
14 words
The method as recited in claim 6 wherein the Group VI organic is di(2-propen-1-yl)telluride.
Claim 31
Dependent Claim
14 words
The method as recited in claim 6 wherein the Group VI organic is di(2-cyclopropen-1-yl)telluride.
Claim 32
Independent Claim
122 words
A method of forming a Group II-VI crystalline material, comprises the steps of: providing a substrate comprised of a material selected from the group consisting of a Group II-VI material, a Group III-V, or Al 2 O 3 ; directing a flow of a Group II metalorganic vapor towards the substrate; directing a flow of a Group VI organic vapor towards the substrate, said Group VI organic having at least one organic group selected from the group consisting of an allyl group, a benzyl group, and a cycloallyl group bonded directly to the Group VI element; and depositing the Group II-VI material epitaxially over the substrate by pyrolytically chemically reacting the first and second vapor flows to form the Group II-VI material.
Claim 33
Independent Claim
122 words
A method of forming a Group II-VI crystalline material, comprises the steps of: providing a substrate comprised of a material selected from the group consisting of a Group II-VI material, a Group III-V, or Al 2 O 3 ; directing a flow of a Group II metalorganic vapor towards the substrate; directing a flow of a Group VI organic vapor towards the substrate, said Group VI organic having at least one organic group selected from the group consisting of an allyl group, a benzyl group, and a cycloallyl group bonded directly to the Group VI element; and depositing the Group II-VI material epitaxially over the substrate by pyrolytically chemically reacting the first and second vapor flows to form the Group II-VI material.
Claim 34
Dependent Claim
49 words
The method as recited in claim 27 wherein the Group VI organic is selected from the group consisting of X-benzyltelluride, X-(2-propen-1-yl)telluride, X-(2-cyclopropen-1-yl)telluride, and where X is hydrogen or an organic group which may or may not be the same as the selected organic group bonded to the Te atom.
Claim 35
Dependent Claim
22 words
The method as recited in claim 28 wherein the Group VI organic is selected from the group consisting of dibenzyltelluride, di(2-propen-1-yl)telluride, di(2-cyclopropen-1-yl)telluride.
Claim 36
Dependent Claim
14 words
The method as recited in claim 29 wherein the Group VI organic is dibenzyltelluride.
Claim 37
Dependent Claim
14 words
The method as recited in claim 29 wherein the Group VI organic is di(2-propen-1-yl)telluride.
Claim 38
Dependent Claim
14 words
The method as recited in claim 29 wherein the Group VI organic is di(2-cyclopropen-1-yl).
Claim 39
Dependent Claim
43 words
The method as recited in claim 27 further comprising the step of: directing a flow of a Group II metal toward the substrate and wherein the depositing step includes depositing the Group II-VI material including the directed Group II metal over the substrate.
Claim 40
Dependent Claim
70 words
The method as recited in claim 33 wherein the Group II metalorganic vapor comprises dimethylcadmium, the Group II metal comprises an elemental source of mercury, the Group VI organic comprises an organic vapor selected from the group consisting of X-benzyltelluride, X-(2-propen-1-yl] telluride) X-(2-cyclopropen-1-yl)telluride, and where X is hydrogen or an organic group which may or may not be the same as the selected organic group bonded to the Te atom.
Claim 41
Dependent Claim
21 words
The method as recited in claim 34 wherein the Group VI is selected from the group consisting of dibenzyltelluride, di(2-propen-1-yl)telluride, di(2-cyclopropen-1-yl)telluride.
Claim 42
Dependent Claim
14 words
The method as recited in claim 35 wherein the Group VI organic is dibenzyltelluride.
Claim 43
Dependent Claim
14 words
The method as recited in claim 35 wherein the Group VI organic is di(2-propen-1-yl)telluride.
Claim 44
Dependent Claim
14 words
The method as recited in claim 35 wherein the Group VI organic is di(2-cyclopropen-1-yl).
Claim 45
Dependent Claim
28 words
The method as recited in claim 14 wherein at least one of R 1 and R 2 which may or may not be the same is a benzyl.
Claim 46
Dependent Claim
45 words
The method as recited in claim 39 wherein the Group VI organic is X-benzyltelluride, where X is hydrogen or an organic group bonded to the Te atom, which may or may not be the same as the benzyl group bonded to the Group VI element.
Claim 47
Dependent Claim
28 words
The method as recited in claim 14 wherein at least one of R 1 and R 2 which may or may not be the same is an allyl.
Claim 48
Dependent Claim
43 words
The method as recited in claim 41 wherein the Group VI organic is X-(2-propen-1-yl)telluride wherein hydrogen or an organic group bonded to the Te atom, which may or may not be the same as the alkyl group bonded to the Group VI element.
Claim 49
Dependent Claim
28 words
The method as recited in claim 14 wherein at least one of R 1 and R 2 which may or may not be the same is a cycloallyl.
Claim 50
Dependent Claim
45 words
The method as recited in claim 43 wherein the Group VI organic is X-(2-cyclopropen-1-yl)telluride, where X is hydrogen or an organic group bonded to the Te atom, which may or may not be the same as the cycloallyl group bonded to the Group VI element.
References Cited (Backward Citations)
US3305386A
Cited
US3083550A
Cited
US3218203A
Cited
US3619282A
Cited
US4321073A
Cited
US4439267A
Cited
US4509997A
Cited
US4524090A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-11 | 1993-06-12 | 1993-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-11 | 1997-06-12 | 1997-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-11 | 2001-06-12 | 2001-12-12 | $7700.00 | Window Closed / Lapsed |