US4818563A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming deposited film
Assignee: Canon Inc
•
Filing: 1986-02-20
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Granted: 1989-04-04
•
Expires: 2006-02-20
Abstract
Abstract A process for forming a deposited film comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing germanium and a halogen and an active species (B) formed from a chemical substance for film formation which is reactive with said active species (A) separately from each other, then providing them with heat energy and thereby allowing both the species to react with each other thereby to form a deposited film on the substrate.
Inventors
- 👤 Shunichi Ishihara
- 👤 Shigeru Ohno
- 👤 Masahiro Kanai
- 👤 Shunri Oda
- 👤 Isamu Shimizu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:39
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/08
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
102 words
A process for forming a deposited film comprising separately introducing an active species (A) and an active species (B) into a film forming space housing a substrate therein, said active species (A) being formed by decomposing a compound containing germanium and a halogen; and said active species (B) being formed from a chemical substance for film formation which is reactive with said active species (A); and applying heat energy to said active species (A) and active species (B) and allowing both active species (A) and active species (B) to react with each other thereby to form a deposited film on the substrate.
Claim 2
Dependent Claim
102 words
A process for forming a deposited film comprising separately introducing an active species (A) and an active species (B) into a film forming space housing a substrate therein, said active species (A) being formed by decomposing a compound containing germanium and a halogen; and said active species (B) being formed from a chemical substance for film formation which is reactive with said active species (A); and applying heat energy to said active species (A) and active species (B) and allowing both active species (A) and active species (B) to react with each other thereby to form a deposited film on the substrate.
Claim 3
Dependent Claim
21 words
A process according to claim 1, wherein said active species (B) is formed from hydrogen, a halogen compound or mixtures thereof.
Claim 4
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a silicon containing compound.
Claim 5
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a carbon containing compound.
Claim 6
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a germanium containing compound.
Claim 7
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from an oxygen containing compound.
Claim 8
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 9
Dependent Claim
26 words
A process according to claim 1, wherein said active species (A) is formed by decomposing a partially or wholly halogen substituted chain or cyclic hydrogenated germanium.
Claim 10
Dependent Claim
21 words
A process according to claim 8, wherein said active species (B) is formed from hydrogen, a halogen compound or mixtures thereof.
Claim 11
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a silicon containing compound.
Claim 12
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a carbon containing compound.
Claim 13
Dependent Claim
18 words
A process according to claim 8, wherein said active apecies (B) is formed from a germanium containing compound.
Claim 14
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from an oxygen containing compound.
Claim 15
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 16
Dependent Claim
57 words
A process according to claim 1 further comprising introducing an active species (SX), an active species (CX) or a mixture thereof into said film forming space; said active species (SX) being formed by decomposing a compound containing silicon and a halogen; and said active species (CX) being formed by decomposing a compound containing carbon and a halogen.
Claim 17
Dependent Claim
21 words
A process according to claim 15, wherein said active species (B) is formed from hydrogen, a halogen compound or mixtures thereof.
Claim 18
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a silicon containing compound.
Claim 19
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a carbon containing compound.
Claim 20
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a germanium containing compound.
Claim 21
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from an oxygen containing compound.
Claim 22
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 23
Dependent Claim
31 words
A process according to claim 1, wherein the proportion in amount of said active species (A) to said active species (B) introduced into the film forming space is 10:1 to 1:10.
Claim 24
Dependent Claim
19 words
A process according to claim 1, wherein the life of said active species (A) is 0.1 second or longer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-03 | 1992-10-03 | 1993-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-03 | 1996-10-03 | 1997-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-03 | 2000-10-03 | 2001-04-04 | $7700.00 | Window Closed / Lapsed |