Thin film photoelectromotive force element having multi-thin films stacked semiconductor layer

Claim 1

An improved pin type film photoelectromotive force element comprising a p-type semiconductor layer, an i-type semiconductor layer and an n-type semiconductor layer which has enhanced short-circuit current, open-circuit voltage, fill factor, S/N ratio and photoelectric conversion efficiency, characterized in that said p-type semiconductor layer contains 1 to 10 atomic % of hydrogen atoms and comprises a plurality of an alternating stack of (i) a p-type amorphous silicon film 100Å or less thick containing 1 to 10 atomic % of hydrogen atoms and a p-type impurity and (ii) a non-doped amorphous silicon film 100 Å or less thick containing 1 to 10 atomic % of hydrogen atoms; said i-type semiconductor layer comprises a non-doped amorphous silicon film containing 1 to 10 atomic % of hydrogen atoms; and said n-type semiconductor layer contains 1 to 10 atomic % of hydrogen atoms and comprises a plurality of an alternating stack of (iii) an n-type amorphous silicon film 100 Å or less thick containing 1 to 10 atomic % of hydrogen atoms, and an n-type impurity and (iv) a non-doped amorphous silicon film 100 Å or less thick containing 1 to 10 atomic % of hydrogen atoms.