US4352834A
Expired / Lapsed
US
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Method for fabricating a semiconductor device
Assignee: Japan Broadcasting Corp
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Filing: 1980-12-04
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Granted: 1982-10-05
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Expires: 2000-12-04
Abstract
Abstract In a vacuum container an active (or atomic state) gas consisting of either one of active hydrogen, active oxygen and active nitrogen with a partial pressure of 1×10 -3 Torr or less is produced. In an atmosphere of the active (or atomic state) gas, a film, which consists of a compound presenting semiconductor characteristics (CdS, CdSe, ZnSe, ZnS, ZnTe, CdTe) or a solid solution thereof and presents a desired polarity property such as p, n, p + or n + , is vapor-deposited on a substrate at a desired position with a desired thickness, so as to fabricate an evaporation device which is preferable, for example, as a photoconductive target for a television camera tube.
Inventors
- 👤 Kazuhisa Taketoshi
- 👤 Chihaya Ogusu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:26
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; H; H10; H10F; H10F71/00; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2922; H10P14/32; H10P14/3202; H10P14/3224; H10P14/3228; H10P14/3231; H10P14/3232
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
76 words
A method for depositing a film onto a substrate utilizing evaporation comprising the steps of forming an atmosphere containing an atomic state gas selected from a group consisting of hydrogen, oxygen and nitrogen with a partial pressure of 1×10 -3 Torr or less, in a vacuum container, and depositing a film consisting of a compound presenting semiconductor characteristics or a solid solution thereof on a substrate in said atmosphere to form a film on said substrate.
Claim 2
Independent Claim
76 words
A method for depositing a film onto a substrate utilizing evaporation comprising the steps of forming an atmosphere containing an atomic state gas selected from a group consisting of hydrogen, oxygen and nitrogen with a partial pressure of 1×10 -3 Torr or less, in a vacuum container, and depositing a film consisting of a compound presenting semiconductor characteristics or a solid solution thereof on a substrate in said atmosphere to form a film on said substrate.
Claim 3
Dependent Claim
129 words
The method of claim 1, wherein said method includes the steps of introducing a gas selected from a group consisting of hydrogen gas, oxygen gas and nitrogen gas into said vacuum container with a pressure of 1 Torr or less, conducting a current in a range from 0.01 mA to 1 mA in said vacuum container by a high speed electron beam accelerated by an accelerating voltage in a range from 500 V to 3,000 V, so that the introduced gas is converted to said atomic state gas, adjusting the pressure of said introduced gas containing said atomic state gas at 1×10 -3 Torr or less, and depositing said film consisting of said compound presenting the semiconductor characteristics or said solid solution thereof on said substrate in said atmosphere.
Claim 4
Dependent Claim
38 words
The method of claim 1, wherein said compound presenting the semiconductor characteristics or said solid solution thereof has a hetero junction formed by materials having components including elements belonging to groups IIb and VIb in the periodic table.
Claim 5
Dependent Claim
38 words
The method of claim 3, wherein said hetero junction between groups IIb and VIb is formed by a semiconductor compound selected from a group consisting of CdS, CdSe, ZnSe, ZnS, ZnTe and CdTe or a solid solution thereof.
Claim 6
Dependent Claim
55 words
The method as claimed in claim 1, wherein said deposited film is formed by CdTe or ZnTe or a solid solution thereof and said atomic state gas is hydrogen, so as to form a film presenting p-type semiconductor characteristics in which a Fermi level exists in the vicinity of a center of a forbidden band.
Claim 7
Dependent Claim
52 words
The method of claim 1, wherein said deposited film is formed by CdTe or ZnTe or a solid solution thereof and said atomic state gas is oxygen, so as to form a film presenting p + type semiconductor characteristics in which a Fermi level exists in the vicinity of a full band.
Claim 8
Dependent Claim
64 words
The method of claim 1, wherein said deposited film is formed by a semiconductor compound selected from a group consisting of CdS, CdSe, ZnS and ZnSe or a solid solution thereof and said atomic state gas is oxygen, so as to form a film presenting n-type semiconductor characteristics in which a Fermi level exists in the vicinity of a center of a forbidden band.
Claim 9
Dependent Claim
63 words
The method of claim 1, wherein said deposited film is formed by a semiconductor compound selected from a group consisting of CdS, CdSe, ZnS and ZnSe or a solid solution thereof and said atomic state gas is hydrogen, so as to form a film presenting n + type semiconductor characteristics in which a Fermi level exists in the vicinity of a conduction band.
Claim 10
Dependent Claim
38 words
The method of claim 1, wherein said film presenting semiconductor characteristics is deposited on said substrate in an order of either from a p-type layer to an n-type layer or from an n-type layer to a p-type layer.
Claim 11
Dependent Claim
26 words
The method of claim 1, wherein said film presenting semiconductor characteristics is deposited on said substrate in an order of either p-n-p layers or n-p-n layers.
Claim 12
Dependent Claim
72 words
The method of claim 1 wherein the step of forming an atmosphere of an atomic state gas comprises the steps of: introducing a gas selected from a group consisting of hydrogen, oxygen or nitrogen into said vacuum container; conducting a current in a said vacuum container utilizing a high speed electron beam so that the introduced gas is at last partially converted to atoms so as to form an atomic state gas.
Claim 13
Dependent Claim
40 words
The method of claim 11 wherein said film deposited in said depositing step comprises a series of film layers arranged in a sequence beginning from the closest layer to the substrate having the order of p + -p-i-n-n + .
Claim 14
Dependent Claim
40 words
The method of claim 11 wherein said film deposited in said depositing step comprises a series of film layers arranged in a sequence beginning from the closest layer to the substrate having the order of n + -n-i-p-p + .
Claim 15
Dependent Claim
36 words
The method of claim 12 or 13 wherein said p + -type and p-type film layers are developed from the evaporation and crystallization of a p-type material selected from the group consisting of CdTe and ZnTe.
Claim 16
Dependent Claim
37 words
The method of claim 12 or 13 wherein said n + -type and n-type film layers are developed from the evaporation and crystallization of a n-type material selected from the group consisting of CdSe, CdS, ZnS, ZnSe.
Claim 17
Dependent Claim
20 words
The method of claim 12 or 13 wherein said film is adapted to form a photoconductive target on said substrate.
References Cited (Backward Citations)
US4178877A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-04 | 1986-04-05 | 1986-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-04 | 1990-04-05 | 1990-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-04 | 1994-04-05 | 1994-10-05 | $7700.00 | Window Closed / Lapsed |