US4728528A
Expired / Lapsed
US
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Process for forming deposited film
Assignee: Canon Inc
•
Filing: 1986-12-18
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Granted: 1988-03-01
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Expires: 2006-12-18
Abstract
Abstract A process for forming a deposited film comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing carbon and a halogen and an active species (B) formed from a chemical substance for film formation which is reactive with said active species (A) separately from each other, irradiating them with light energy and thereby allowing both the species to react with each other thereby to form a deposited film on the substrate.
Inventors
- 👤 Shunichi Ishihara
- 👤 Shigeru Ohno
- 👤 Masahiro Kanai
- 👤 Shunri Oda
- 👤 Isamu Shimizu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:52
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/22; C23C16/483; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2922; H10P14/2923; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
85 words
A process for forming a deposited film, which comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing carbon and a halogen and an active species (B) formed from a chemical substance for film formation which is reactive with said active species (A) separately from each other, then irradiating them with light energy and thereby allowing both the species to react with each other thereby to form a deposited film on the substrate.
Claim 2
Dependent Claim
85 words
A process for forming a deposited film, which comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing carbon and a halogen and an active species (B) formed from a chemical substance for film formation which is reactive with said active species (A) separately from each other, then irradiating them with light energy and thereby allowing both the species to react with each other thereby to form a deposited film on the substrate.
Claim 3
Dependent Claim
19 words
A process according to claim 1, wherein said active species (B) is formed from hydrogen and/or a halogen compound.
Claim 4
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a silicon containing compound.
Claim 5
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a carbon containing compound.
Claim 6
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a germanium containing compound.
Claim 7
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from an oxygen containing compound.
Claim 8
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 9
Dependent Claim
33 words
A process according to claim 1, wherein said active species (A) is formed by decomposition of a chain or cyclic hydrocarbon of which hydrogen atoms are partially or wholly substituted with halogen atoms.
Claim 10
Dependent Claim
19 words
A process according to claim 8, wherein said active species (B) is formed from hydrogen and/or a halogen compound.
Claim 11
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a silicon containing compound.
Claim 12
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a carbon containing compound.
Claim 13
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a germanium containing compound.
Claim 14
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from an oxygen containing compound.
Claim 15
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 16
Dependent Claim
31 words
A process according to claim 1, wherein an active species (SX) formed by decomposition of a compound containing silicon and a halogen is used in addition to said active species (A).
Claim 17
Dependent Claim
19 words
A process according to claim 15, wherein said active species (B) is formed from hydrogen and/or a halogen compound.
Claim 18
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a silicon containing compound.
Claim 19
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a carbon containing compound.
Claim 20
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a germanium containing compound.
Claim 21
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from an oxygen containing compound.
Claim 22
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 23
Dependent Claim
31 words
A process according to claim 1, wherein the proportion in amount of said active species (A) to said active species (B) introduced into the film forming space is 10:1 to 1:10.
Claim 24
Dependent Claim
19 words
A process according to claim 1, wherein the life of said active species (A) is 0.1 second or longer.
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