US4869923A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microwave enhanced CVD method for depositing carbon
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1988-02-24
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Granted: 1989-09-26
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Expires: 2008-02-24
Abstract
Abstract A method of making a diamond or diamond-like carbon containing 0.01-1.0 weight percent nitrogen on a substrate where an electromagnetic energy is applied to a productive gas comprising carbon and an additive gas comprising nitrogen and the above carbon product is deposited on a substrate.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:44
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/06; C23C16/278; C23C16/44; C23C16/50; C23C16/511; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/104; Y10S427/106
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
67 words
A method of making a diamond or diamond-like carbon containing 0.01 -1.0 weight percent nitrogen on a substrate comprising: placing said substrate in a reaction chamber; inputting a productive gas comprising carbon together with an additive gas comprising nitrogen into said reaction chamber; applying an electromagnetic energy to activate said productive and additive gases; and depositing said carbon product containing nitrogen on a surface of said substrate.
Claim 2
Independent Claim
67 words
A method of making a diamond or diamond-like carbon containing 0.01 -1.0 weight percent nitrogen on a substrate comprising: placing said substrate in a reaction chamber; inputting a productive gas comprising carbon together with an additive gas comprising nitrogen into said reaction chamber; applying an electromagnetic energy to activate said productive and additive gases; and depositing said carbon product containing nitrogen on a surface of said substrate.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein, in said applying step, microwave energy and a magnetic field activate the said productive and additive gases.
Claim 4
Dependent Claim
14 words
The method of claim 2 wherein the frequency of said microwave is 2.45 GHz.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein said deposition is carried out under the existence of a magnetic field of 1 Kilo Gauss or stronger.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein said productive gas is excited in a mixed cyclotron resonance.
Claim 7
Dependent Claim
20 words
The method of claim 5 wherein the pressure in said reaction chamber is chosen between 0.1 Torr and 300 Torr.
Claim 8
Dependent Claim
11 words
The method of claim 6 wherein said nitrogen compound is ammonia.
Claim 9
Dependent Claim
14 words
The method of claim 6 wherein said productive gas includes at least one hydrocarbon.
Claim 10
Dependent Claim
25 words
The method of claim 6 wherein said productive gas is C 2 H 6 , C 2 H 4 and/or C 2 H 2 .
Claim 11
Dependent Claim
13 words
The method of claim 1 wherein said productive gas is CH 4 .
Claim 12
Dependent Claim
13 words
The method of claim 1 wherein said carbon layer is a crystalline layer.
Claim 13
Dependent Claim
13 words
The method of claim 1 wherein said carbon layer is a micro-crystalline layer.
Claim 14
Dependent Claim
13 words
The method of claim 1 wherein said carbon layer is an amorphous layer.
Claim 15
Dependent Claim
29 words
The method of claim 1 wherein said carbon layer is deposited repeatedly following or followed by the deposition or BN film in order to constitute a super lattice structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-25 | 1993-03-27 | 1993-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-25 | 1997-03-27 | 1997-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-25 | 2001-03-27 | 2001-09-26 | $7700.00 | Window Closed / Lapsed |