US4060660A
Expired / Lapsed
US
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Deposition of transparent amorphous carbon films
Assignee: RCA Corp
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Filing: 1976-01-15
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Granted: 1977-11-29
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Expires: 1996-01-15
Abstract
Abstract Applying a D. C. glow discharge to a heated glassy substrate in an evacuated chamber to which a volatile hydrocarbon has been added, produces a glassy substrate coated with a hard, transparent, resistive, amorphous carbon coating.
Inventors
- 👤 David Emil Carlson
- 👤 Chester Edwin Tracy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:22
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/44; C23C16/50; C23C16/503; H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; C03C2217/00; C03C2217/20; C03C2217/28; C03C2217/282; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/152; Y; Y10; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
112 words
A method of depositing a transparent, resistive, amorphous carbon film on a glassy substrate which comprises: a. heating said glassy substrate to a temperature in the range of from about 300° to 550° C. but below the softening temperature of the substrate in an evacuated chamber, b. introducing a volatile hydrocarbon into said evacuated chamber, c. applying a D.C. glow discharge between two electrodes situated in said chamber, the cathode of which is said glassy substrate, at a current density of from about 0.05 to about 1.0 mA/cm 2 for a period of about 15 seconds to about 3 minutes, so that said glassy substrate becomes coated with an amorphous carbon film.
Claim 2
Independent Claim
112 words
A method of depositing a transparent, resistive, amorphous carbon film on a glassy substrate which comprises: a. heating said glassy substrate to a temperature in the range of from about 300° to 550° C. but below the softening temperature of the substrate in an evacuated chamber, b. introducing a volatile hydrocarbon into said evacuated chamber, c. applying a D.C. glow discharge between two electrodes situated in said chamber, the cathode of which is said glassy substrate, at a current density of from about 0.05 to about 1.0 mA/cm 2 for a period of about 15 seconds to about 3 minutes, so that said glassy substrate becomes coated with an amorphous carbon film.
Claim 3
Dependent Claim
25 words
The method of claim 1, wherein the current density is about 0.2 mA/cm 2 for about 30 seconds in a pressure of about 0.75 torr.
Claim 4
Dependent Claim
12 words
The method of claim 2 wherein the discharge voltage is about 400V.
Claim 5
Dependent Claim
13 words
The method of claim 1 wherein the glassy substrate is a soda-lime-silicate glass.
Claim 6
Dependent Claim
12 words
The method of claim 1 wherein the glassy substrate is a ceramic.
Claim 7
Dependent Claim
11 words
An amorphous carbon film produced by the method of claim 1.
Claim 8
Dependent Claim
22 words
A transparent amorphous carbon film having a room temperature surface resistance of from about 10 12 ohm/sq. to about 10 7 ohm/sq.
Claim 9
Dependent Claim
22 words
A transparent amorphous carbon film having a room temperature surface resistance of from about 10 12 ohm/sq. to about 10 7 ohm/sq.
Claim 10
Dependent Claim
25 words
A transparent amorphous carbon film of claim 7 having a room temperature surface resistance of from about 10 9 ohm/sq. to about 10 7 ohm/sq.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-11-28 | 1981-05-30 | 1981-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-11-28 | 1985-05-30 | 1985-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-11-28 | 1989-05-30 | 1989-11-29 | $7700.00 | Window Closed / Lapsed |