Patent US4869923A successfully refreshed from Google Patents.
US4869923A
Expired / Lapsed
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Microwave enhanced CVD method for depositing carbon
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-02-24
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Granted: 1989-09-26
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Expires: 2008-02-24
Abstract
Abstract A method of making a diamond or diamond-like carbon containing 0.01-1.0 weight percent nitrogen on a substrate where an electromagnetic energy is applied to a productive gas comprising carbon and an additive gas comprising nitrogen and the above carbon product is deposited on a substrate.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:02
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C23C16/06; C23C16/278; C23C16/44; C23C16/50; C23C16/511; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/104; Y10S427/106
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
67 words
A method of making a diamond or diamond-like carbon containing 0.01 -1.0 weight percent nitrogen on a substrate comprising: placing said substrate in a reaction chamber; inputting a productive gas comprising carbon together with an additive gas comprising nitrogen into said reaction chamber; applying an electromagnetic energy to activate said productive and additive gases; and depositing said carbon product containing nitrogen on a surface of said substrate.
Claim 2
Independent Claim
67 words
A method of making a diamond or diamond-like carbon containing 0.01 -1.0 weight percent nitrogen on a substrate comprising: placing said substrate in a reaction chamber; inputting a productive gas comprising carbon together with an additive gas comprising nitrogen into said reaction chamber; applying an electromagnetic energy to activate said productive and additive gases; and depositing said carbon product containing nitrogen on a surface of said substrate.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein, in said applying step, microwave energy and a magnetic field activate the said productive and additive gases.
Claim 4
Dependent Claim
14 words
The method of claim 2 wherein the frequency of said microwave is 2.45 GHz.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein said deposition is carried out under the existence of a magnetic field of 1 Kilo Gauss or stronger.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein said productive gas is excited in a mixed cyclotron resonance.
Claim 7
Dependent Claim
20 words
The method of claim 5 wherein the pressure in said reaction chamber is chosen between 0.1 Torr and 300 Torr.
Claim 8
Dependent Claim
11 words
The method of claim 6 wherein said nitrogen compound is ammonia.
Claim 9
Dependent Claim
14 words
The method of claim 6 wherein said productive gas includes at least one hydrocarbon.
Claim 10
Dependent Claim
25 words
The method of claim 6 wherein said productive gas is C 2 H 6 , C 2 H 4 and/or C 2 H 2 .
Claim 11
Dependent Claim
13 words
The method of claim 1 wherein said productive gas is CH 4 .
Claim 12
Dependent Claim
13 words
The method of claim 1 wherein said carbon layer is a crystalline layer.
Claim 13
Dependent Claim
13 words
The method of claim 1 wherein said carbon layer is a micro-crystalline layer.
Claim 14
Dependent Claim
13 words
The method of claim 1 wherein said carbon layer is an amorphous layer.
Claim 15
Dependent Claim
29 words
The method of claim 1 wherein said carbon layer is deposited repeatedly following or followed by the deposition or BN film in order to constitute a super lattice structure.
References Cited (Backward Citations)
US3335345A
Cited
US1566848A
Cited
US2344906A
Cited
US2392682A
Cited
US3084394A
Cited
US4142008A
Cited
US3944686A
Cited
US4194027A
Cited
US4104441A
Cited
US4060660A
Cited
US4401054A
Cited
US4434188A
Cited
US4701317A
Cited
US4634605A
Cited
US4707384A
Cited
US4645713A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-25 | 1993-03-27 | 1993-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-25 | 1997-03-27 | 1997-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-25 | 2001-03-27 | 2001-09-26 | $7700.00 | Window Closed / Lapsed |