US4798165A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for chemical vapor deposition using an axially symmetric gas flow
Assignee: ASM America Inc
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Filing: 1988-01-25
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Granted: 1989-01-17
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Expires: 2008-01-25
Abstract
Abstract In a chemical vapor deposition chamber, an improved technique for providing deposition materials to the growth surface is described. The gas carrying deposition materials is constrained to have axial symmetry thereby providing a uniform deposition of materials on the substrate. The gas can be initially directed toward the substrate with a generally uniform perpendicular velocity. The gas can be introduced into the deposition chamber through a multiplicity of apertures and is extracted from the vicinity of the substrate in a manner to preserve the axial symmetry. The apparatus permits convenient control of the deposition process by varying the distance between apparatus introducing the gas carrying the deposition materials and the substrate. The flow of gas minimizes the problems arising from autodoping of the growth layer of material. The flow of gas and generally small size of the deposition chamber minimize particulate contamination of the growing film.
Inventors
- 👤 Wiebe B. deBoer
- 👤 Klavs F. Jensen
- 👤 Wayne L. Johnson
- 👤 Gary W. Read
- 👤 McDonald Robinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 13:22
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45504; C23C16/45508; C23C16/45587; C23C16/45591; C23C16/54; C30; C30B; C30B25/00; C30B25/02; C30B25/14
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
150 words
Apparatus for deposition of material onto a substrate, comprising: a circular substrate; and an apparatus for directing a flow of gas carrying a deposition material perpendicular to the circular substrate, said apparatus comprising a member having a plurality of gas flow apertures passing therethrough for maintaining said flow of gas perpendicular to said substrate and creating a stagnation point flow at a center of said circular substrate, said member being disposed parallel to said circular substrate and adapted so that a distance between said apparatus and said circular substrate may be varied, said plurality of gas flow apertures being disposed in a generally circular configuration having a radius substantially equivalent to a radius of said circular substrate wherein said plurality of gas flow apertures and said circular substrate are coaxially aligned such that said flow of gas generally has an axial symmetry with respect to the center of said substrate.
Claim 2
Dependent Claim
150 words
Apparatus for deposition of material onto a substrate, comprising: a circular substrate; and an apparatus for directing a flow of gas carrying a deposition material perpendicular to the circular substrate, said apparatus comprising a member having a plurality of gas flow apertures passing therethrough for maintaining said flow of gas perpendicular to said substrate and creating a stagnation point flow at a center of said circular substrate, said member being disposed parallel to said circular substrate and adapted so that a distance between said apparatus and said circular substrate may be varied, said plurality of gas flow apertures being disposed in a generally circular configuration having a radius substantially equivalent to a radius of said circular substrate wherein said plurality of gas flow apertures and said circular substrate are coaxially aligned such that said flow of gas generally has an axial symmetry with respect to the center of said substrate.
Claim 3
Dependent Claim
12 words
The deposition apparatus of claim 1 wherein said substrate can be rotated.
Claim 4
Dependent Claim
20 words
The deposition apparatus of claim 1, wherein said flow of gas further comprises chemical vapor deposition materials for epitaxial deposition.
Claim 5
Dependent Claim
21 words
The deposition apparatus of claim 3, wherein said gas flow further comprises chemical vapor deposition materials for epitaxial deposition of silicon.
Claim 6
Dependent Claim
22 words
The apparatus for deposition of claim 1 further including apparatus for introducing a purge gas on a reverse side of said substrate.
Claim 7
Dependent Claim
97 words
Apparatus for chemical vapor deposition of materials on a substrate, comprising: a substantially circular substrate; and gas flow means having a plurality of apertures passing therethrough and disposed parallel to said substantially circular substrate, said plurality of apertures forming a generally circular configuration having a radius substantially equal to a radius of said substantially circular substrate and coaxially aligned therewith for producing a flow of gas having a substantially uniform magnitude of velocity directed perpendicular to and having axial symmetry across said circular substrate, and maintaining a stagnation flow point at a center of said circular substrate.
Claim 8
Dependent Claim
97 words
Apparatus for chemical vapor deposition of materials on a substrate, comprising: a substantially circular substrate; and gas flow means having a plurality of apertures passing therethrough and disposed parallel to said substantially circular substrate, said plurality of apertures forming a generally circular configuration having a radius substantially equal to a radius of said substantially circular substrate and coaxially aligned therewith for producing a flow of gas having a substantially uniform magnitude of velocity directed perpendicular to and having axial symmetry across said circular substrate, and maintaining a stagnation flow point at a center of said circular substrate.
Claim 9
Dependent Claim
34 words
The apparatus for chemical vapor deposition of claim 6 wherein said gas flow means includes means for varying a distance between said substrate and a region where said gas is directed toward said substrate.
Claim 10
Dependent Claim
18 words
The apparatus for chemical vapor deposition of material of claim 6 further including means for rotating said substrate.
Claim 11
Dependent Claim
29 words
The apparatus for chemical vapor deposition of claim 6 wherein said gas flow means includes a plurality of apertures for extracting said gas without significantly altering said axial symmetry.
Claim 12
Dependent Claim
21 words
The apparatus for chemical vapor deposition of claim 6 further comprising a plurality of baffles between substrate and said extracting apertures.
Claim 13
Dependent Claim
18 words
The apparatus for chemical vapor deposition of claim 6 further including means for reducing autodoping of said substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-17 | 1992-07-18 | 1993-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-17 | 1996-07-18 | 1997-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-17 | 2000-07-18 | 2001-01-17 | $7700.00 | Window Closed / Lapsed |