Offset top ejection vapor deposition apparatus

Claim 1

Apparatus for vapor deposition of a layer of material on a plurality of substrates comprising: a sealed chamber; a rotatable support in said sealed chamber; a susceptor having a central opening and connected to said rotatable support for carrying the plurality of substrates; a frusto-conical ejection nozzle; feed means extending through said opening and connected to said frusto-conical ejection nozzle and to said sealed chamber for supporting and feeding a plurality of gaseous vapors into said frusto-conical ejection nozzle, said frusto-conical ejection nozzle being offset with respect to the center of said susceptor and being directed at said susceptor; and said feed means including an outer conduit connected to the smaller end of the frusto-conical ejection nozzle and an inner conduit concentrically arranged with respect to said outer conduit and extending further into said frusto-conical ejection nozzle than said outer conduit by a predetermined distance selected to prevent formation of particles wherein vapor of a first type ejected from said inner conduit is reflected from the occluded portion of said face plate and is mixed with vapor of a second type ejected from said outer conduit; and a face plate connected to said frusto-conical ejection nozzle at the larger end thereof, said face plate having a plurality of apertures therein, a central portion of said face plate being occluded.