US3424628A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods and apparatus for treating semi-conductive materials with gases
Assignee: AT&T Inc
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Filing: 1966-01-24
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Granted: 1969-01-28
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Expires: 1986-01-24
Abstract
No abstract record available.
Inventors
- 👤 Richard H Winings
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:58
CPC Classifications
H; H10; H10P; H10P95/00; C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584; C30; C30B; C30B31/00; C30B31/06; C30B31/10; C30B31/103; C30B31/14; C30B31/16; H10W; H10W74/00; H10W74/40; H10W74/43
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
131 words
APPARATUS FOR TREATING SEMICONDUCTIVE MATERIALS WITH GASES AT ELEVATED TEMPERATURES, WHICH COMPRISES: A GAS TREATMENT CHAMBER; A GENERALLY HORIZONTALLY DISPOSED SUSCEPTOR PLATE MOUNTED FOR ROTATION WITHIN SAID CHAMBER; A WORK HOLDER MOUNTED ECCENTRICALLY ON SAID SUSCEPTOR PLATE FOR ROTATION WITH RESPECT THERETO, SAID WORK HOLDER BEING DESIGNED TO SUPPORT A BODY OF SEMICONDUCTIVE MATERIAL IN HEAT TRANSFER RELATIONSHIP WITH RESPECT TO SAID SUSCEPTOR PLATE; MEANS FOR HEATING SAID SUSCEPTOR PLATE TO HEAT THE BODY; MEANS FOR ROTATING SAID SUSCEPTOR PLATE TO CAUSE THE BODY TO REVOLVE ABOUT THE AXIS OF SAID SUSCEPTOR PLATE; MEANS FOR ROTATING SAID WORK HOLDER TO CAUSE THE BODY TO ROTATE ABOUT ITS OWN AXIS WHILE REVOLVING ABOUT THE AXIS OF SAID SUSCEPTOR PLATE; AND MEANS FOR INTRODUCING TREATMENT GASES INTO SAID CHAMBER TO TREAT THE BODY.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-01-28 | 1972-07-29 | 1973-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-01-28 | 1976-07-29 | 1977-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-01-28 | 1980-07-29 | 1981-01-28 | $7700.00 | Window Closed / Lapsed |