Variable incidence drive for deposition tooling

Claim 1

Apparatus for coating a plurality of substantially planar substrates comprising A. a coating chamber; B. a port in a wall of said chamber; C. a hatch means pivotally mounted on said wall for movement into open and closed position relative to said port with said closed position securing said hatch in sealing relationship with said coating chambeR; oscillatory frame means supported on the inner wall of said hatch means; E. means supporting said frame additionally supporting means to oscillate said frame; F. rotatable means supported within the said frame and mounting a plurality of substrate holders in a substantially common plane on a circle concentric with the axis of said rotatable means; G. means rotating said rotatable means whereby to orbit said holders about said axis, said axis being normal to the axis of said oscillation; H. rotary means carried on said rotatable means and operatively associated with said holders whereby to rotate each said holder about its own axis which is normal to the axis of said oscillation; I. drive means common to each said rotary and rotatable means whereby to simultaneously effect said holder orbital and rotative movements; J. said holder orbital and rotative and said frame oscillatory movements occurring simultaneously; and K. coating means comprising a vapor source for evaporating and directing a stream of coating material onto said substrates.