US4047496A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Epitaxial radiation heated reactor
Assignee: Applied Materials Inc
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Filing: 1975-08-25
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Granted: 1977-09-13
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Expires: 1995-08-25
Abstract
Abstract Apparatus and process for vapor depositing epitaxial films on substrates. A gaseous reactant is introduced into a reaction chamber formed from a material, such as quartz, which is transparent and non-obstructive to radiant heat energy transmitted at a predetermined short wave length. A graphite susceptor, which is opaque to and absorbs the radiant heat energy, is positioned within the reaction chamber and supports the substrates to be coated. The susceptor is heated while the walls of the reaction chamber remain cool to preclude deposition of epitaxial film on the walls. To insure uniform heating of the susceptor, the same may be moved relative to the radiant heat source which, in the preferred embodiment, comprises a bank of tungsten filament quartz-iodine high intensity lamps which transmit radiant heat energy against the susceptor as a non-focused generally uniform energy field.
Inventors
- 👤 Michael A. McNeilly
- 👤 Walter C. Benzing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:19
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/12; C30B25/10; C30B25/105
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
193 words
A cool wall radiation heated reactor for effecting epitaxial and like chemical vapor deposition reactions therein on heated substrates positioned therein and heated thereby, comprising A. a radiant heat source defined by a bank of a plurality of high intensity radiant heat lamps which together produce and transmit radiant heat energy of short wave length as a generally uniform non-focused radiant energy field, B. means defining a reaction chamber, for receiving therein the substrates to be coated, positioned adjacent said heat source, 1. at least that portion of a wall of said reaction chamber which is positioned adjacent said heat source being formed from a material which is transparent to heat energy at the wave length produced by said heat source so that such radiant energy is transmitted through said wall without appreciable absorption thereby, whereby said wall remains cool and substantially free of film deposits during operation of said reactor, C. susceptor means to be heated directly by said field of radiant energy emitted from said heat source, said susceptor means being positioned within said reaction chamber for supporting said substrates directly thereon in direct contact therewith during operation of said reactor,
Claim 2
Dependent Claim
193 words
A cool wall radiation heated reactor for effecting epitaxial and like chemical vapor deposition reactions therein on heated substrates positioned therein and heated thereby, comprising A. a radiant heat source defined by a bank of a plurality of high intensity radiant heat lamps which together produce and transmit radiant heat energy of short wave length as a generally uniform non-focused radiant energy field, B. means defining a reaction chamber, for receiving therein the substrates to be coated, positioned adjacent said heat source, 1. at least that portion of a wall of said reaction chamber which is positioned adjacent said heat source being formed from a material which is transparent to heat energy at the wave length produced by said heat source so that such radiant energy is transmitted through said wall without appreciable absorption thereby, whereby said wall remains cool and substantially free of film deposits during operation of said reactor, C. susceptor means to be heated directly by said field of radiant energy emitted from said heat source, said susceptor means being positioned within said reaction chamber for supporting said substrates directly thereon in direct contact therewith during operation of said reactor,
Claim 3
Dependent Claim
97 words
said susceptor means including a susceptor body formed from a material which is generally opaque to said radiant energy and which absorbs the same and is generally uniformly heated thereby, 2. said susceptor body being positioned directly in line with said energy field emitted by said heat source for direct heating thereby over its full extent, 3. said susceptor body in turn uniformly heating and maintaining the temperature of said substrate substantially constant during operation of said reactor, and D. conduit means for introducing gaseous reactants into said reaction chamber and for withdrawing spent reaction gases therefrom.
Claim 4
Dependent Claim
97 words
said susceptor means including a susceptor body formed from a material which is generally opaque to said radiant energy and which absorbs the same and is generally uniformly heated thereby, 2. said susceptor body being positioned directly in line with said energy field emitted by said heat source for direct heating thereby over its full extent, 3. said susceptor body in turn uniformly heating and maintaining the temperature of said substrate substantially constant during operation of said reactor, and D. conduit means for introducing gaseous reactants into said reaction chamber and for withdrawing spent reaction gases therefrom.
Claim 5
Dependent Claim
34 words
The reactor of claim 1 in which said bank of lamps is positioned below said susceptor body so that said susceptor body is interposed said lamps and the substrates supported by said susceptor body.
Claim 6
Dependent Claim
21 words
The reactor of claim 1 in which said bank of lamps substantially surrounds said susceptor body and the substrates supported thereon.
Claim 7
Dependent Claim
29 words
The reactor of claim 1 which further includes E. means for moving said susceptor body relative to said heat source to insure substantially uniform heating of said susceptor body.
Claim 8
Dependent Claim
22 words
The reactor of claim 4 in which said moving means includes mechanism for rotating said susceptor body relative to said heat source.
Claim 9
Dependent Claim
26 words
The reactor of claim 1 in which said susceptor body comprises 1. a generally cylindrical body having substrate receiving recesses in the outer periphery thereof, and
Claim 10
Dependent Claim
33 words
means for rotating said body, and in which said heat source comprises 1. said bank of high intensity lamps surrounding said body and separated therefrom by said wall portion of said reaction chamber.
Claim 11
Dependent Claim
33 words
means for rotating said body, and in which said heat source comprises 1. said bank of high intensity lamps surrounding said body and separated therefrom by said wall portion of said reaction chamber.
Claim 12
Dependent Claim
36 words
The reactor of claim 1 in which said lamps of said heat source each comprises a high intensity tungsten filament quartz-iodine lamp which generates radiant energy at a wave length of approximately one micron or below.
Claim 13
Dependent Claim
37 words
The reactor of claim 1 in which the material from which said reaction chamber is formed is quartz, and in which said heat source produces radiant energy at a wave length which is not absorbed by quartz.
Claim 14
Dependent Claim
51 words
The reactor of claim 1 which further includes E. means for introducing a cooling medium against said wall of said reaction chamber which is positioned adjacent said heat source to assist in maintaining said wall cool to further obviate formation of film deposits on said wall during operation of said reactor.
Claim 15
Dependent Claim
28 words
The reactor of claim 1 in which all walls of said reaction chamber are formed from said material which is transparent to heat energy at said wave length.
Claim 16
Dependent Claim
31 words
The reactor of claim 1 in which each said lamp of said heat source comprises a high intensity lamp which radiates heat energy at a wave length of approximately one micron.
Claim 17
Dependent Claim
37 words
The reactor of claim 11 in which said reaction chamber comprises a quartz enclosure separating said heat source from said susceptor, the walls of said enclosure being generally unobstructive of heat energy radiated at said wave length.
Claim 18
Dependent Claim
38 words
The reactor of claim 1 in which said susceptor means further includes 3. structure for moving said susceptor body relative to said heat source to insure substantially uniform heating of said susceptor body and the substrates supported thereby.
Claim 19
Dependent Claim
22 words
The reactor of claim 1 which further includes E. means for introducing a cooling medium into contact with said radiant heat source.
Claim 20
Dependent Claim
15 words
The reactor of claim 1 in which each said lamp comprises a tungsten filament-halogen lamp.
Claim 21
Dependent Claim
15 words
The reactor of claim 15 in which each said lamp comprises a tungsten filament-iodine lamp.
Claim 22
Dependent Claim
42 words
The reactor of claim 1 in which said susceptor means is separable from said reaction chamber so that said substrates may be positioned on said susceptor body outside said reaction chamber and thereafter introduced on said susceptor body into said reaction chamber.
Claim 23
Dependent Claim
60 words
The reactor of claim 1 in which said susceptor body is generally cylindrical in configuration and includes means in conjunction therewith defining recesses therein for receiving said substrates therein, and in which said bank of lamps is positioned to surround said susceptor and direct heat energy at said wave length inwardly against said susceptor body and the substrates supported thereby.
Claim 24
Dependent Claim
23 words
The reactor of claim 18 which further includes E. mechanism for rotating said susceptor body which said bank of lamps surrounding the same.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-09-12 | 1981-03-14 | 1981-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-09-12 | 1985-03-14 | 1985-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-09-12 | 1989-03-14 | 1989-09-13 | $7700.00 | Window Closed / Lapsed |