Vapor deposition apparatus

Claim 2

Apparatus for coating articles with a coating material, which comprises: a vertically positioned, hollow, rotatable drum having a plurality of article-receiving pockets formed at intervals along its internal surface, within which articles to be coated are placed so that the surfaces to be coated are exposed; means for rotating said drum about its principal axis so that centrifugal force causes said articles to have more intimate contact with the drum; means for impinging said coating material against the exposed surfaces of said articles, while said drum is rotating, to coat the exposed surfaces of the articles; the drum being made of heat-conductive material; means for heating the drum, while rotating, to heat the articles by conduction through said drum; and the impinging means comprising means for introducing a vapor coating material into said drum along its principal axis.

Claim 3

The apparatus of claim 1, wherein: the drum is constructed of a material susceptible of being inductively heated; and an r.f. induction coil is coupled external to, but in cooperating relationship with said drum to inductively heat said drum by r.f. energy provided by said coil.

Claim 4

The apparatus of claim 1, for coating articles having flat surfaces, wherein each pocket is formed with a flat interior wall inclined at an angle to the vertical, against which a flat surface of the article is placed to hold the article at an angle to the vertical.

Claim 5

Apparatus for depositing an epitaxial layer of semiconductive material on a plurality of semiconductor slices, comprising: a. a bell jar; b. a hollow, rotatable drum adapted to be inductively heated, within said bell jar, having its principal axis oriented vertically, said drum being adapted to hold semiconductor slices on its internal surface with the surfaces of the slices to be coated exposed; c. means for introducing a carrier gas containing a heat-decomposable compound of the semiconductor involved along said principal axis and toward said bell jar so as to cause the gas to impinge upon the exposed surfaces of said slices; d. means for rotating said drum about its principal axis so that centrifugal force causes said slices to have more intimate contact with said drum; and e. means, external to said bell jar, for inductively heating said drum to heat the slices by conduction through the drum.

Claim 6

Apparatus for depositing an epitaxial layer of semiconductive material on a plurality of semiconductor slices, comprising: a. a bell jar; b. a hollow, rotatable drum adapted to be inductively heated, within said bell jar, having its principal axis oriented vertically, said drum being adapted to hold semiconductor slices on its internal surface with the surfaces of the slices to be coated exposed; c. means for introducing a carrier gas containing a heat-decomposable compound of the semiconductor involved along said principal axis and toward said bell jar so as to cause the gas to impinge upon the exposed surfaces of said slices; d. means for rotating said drum about its principal axis so that centrifugal force causes said slices to have more intimate contact with said drum; and e. means, external to said bell jar, for inductively heating said drum to heat the slices by conduction through the drum.

Claim 7

The apparatus as claimed in claim 4, wherein said drum contains pockets formed at intervals along its internal surface for holding semiconductor slices, each pocket containing a slice-engaging flat surface at an acute angle with the vertical.

Claim 8

The apparatus as claimed in claim 5, wherein said acute angle is approximately 3*.

Claim 9

In an epitaxial growing apparatus including a bell jar, means within said bell jar susceptible of being inductively heated for holding semiconductor slices, means for introducing a carrier gas including a halide of the semiconductor involved into said bell jar, means for evacuating said bell jar, means external to said bell jar for inductively heating said susceptible means, and a Faraday shield enclosing said inductive heating means, the improvement wherein: said susceptible means is a hollow drum having its principal axis oriented in the vertical direction; said susceptible means is adapted to hold semiconductor slices on its internal surface; said carrier gas is introduced along said principal axis; and means are provided for rotating said drum about its principal axis.

Claim 10

In an epitaxial growing apparatus including a bell jar, means within said bell jar susceptible of being inductively heated for holding semiconductor slices, means for introducing a carrier gas including a halide of the semiconductor involved into said bell jar, means for evacuating said bell jar, means external to said bell jar for inductively heating said susceptible means, and a Faraday shield enclosing said inductive heating means, the improvement wherein: said susceptible means is a hollow drum having its principal axis oriented in the vertical direction; said susceptible means is adapted to hold semiconductor slices on its internal surface; said carrier gas is introduced along said principal axis; and means are provided for rotating said drum about its principal axis.

Claim 11

Apparatus for vapor plating articles comprising the combination of a hermetically sealed chamber, an electrically conductive article support, means for rotatabLy mounting said article support within said enclosure, said support having a generally radially inwardly facing article engaging portion, means for rotating said article support whereby articles positioned against said portion are at least partially held in place by centrifugal force, an electric coil positioned for inducting heating current in said support, and vapor outlet means positioned within said enclosure for directing vapor over the heated articles.

Claim 12

Apparatus for vapor plating articles comprising the combination of a hermetically sealed chamber, an electrically conductive article support, means for rotatabLy mounting said article support within said enclosure, said support having a generally radially inwardly facing article engaging portion, means for rotating said article support whereby articles positioned against said portion are at least partially held in place by centrifugal force, an electric coil positioned for inducting heating current in said support, and vapor outlet means positioned within said enclosure for directing vapor over the heated articles.