Patent US3509629A successfully refreshed from Google Patents.
US3148085A
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Method and apparatus for fabricating semiconductor devices
Assignee: AT&T Inc
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Filing: 1961-04-13
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Granted: 1964-09-08
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Expires: 1981-04-13
Abstract
No abstract record available.
Inventors
- 👤 Wiegmann William
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:44
CPC Classifications
H; H10; H10P; H10P95/00; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; H10W; H10W20/00; H10W20/40; Y; Y10; Y10S; Y10S148/00; Y10S148/028; Y10S148/104; Y10S148/169; Y10S438/00; Y10S438/942; Y10S438/944
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
106 words
IN A METHOD OF PRODUCING A MATERIAL PATTERN ON THE SURFACE OF A SEMICONDUCTOR BODY, STEPS OF POSITIONING A PERFORATED MASK CLOSE TO BUT SPACED FROM SAID SURFACE, ROTATING SAID MASK AND SAID SURFACE TOGETHER ABOUT AN AXIS OF ROTATION SUBSTANTIALLY PERPENDICULAR TO SAID SURFACE, DIRECTING MATERIAL FROM TWO FINITE SOURCES AT SAID SURFACE THROUGH SAID PERFORATIONS, SAID SOURCES BEING AT SUBSTANTIALLY THE SAME DISTANCE FROM SAID SURFACE BUT AT DIFFERING DISTANCES FROM SAID AXIS OF ROTAION, WHEREBY MATERIAL IS DEPOSITED ON SAID SURFACE IN SUBSTANTIALLY IDENTICAL PATTERNS CORRESPONDING TO EACH OF SAID PERFORATIONS, EACH PATTERN COMPRISING SEPARATE AND DISTINCT AREAS FROM EACH OF SAID SOURCES.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1967-09-08 | 1968-03-09 | 1968-09-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1971-09-08 | 1972-03-09 | 1972-09-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1975-09-08 | 1976-03-09 | 1976-09-08 | $7700.00 | Window Closed / Lapsed |