Patent US6113771A successfully refreshed from Google Patents.
US5567243A
Expired / Lapsed
US
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Apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
Assignee: Tokyo Electron Ltd
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Filing: 1995-06-06
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Granted: 1996-10-22
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Expires: 2015-06-06
Abstract
Abstract A method and apparatus for depositing a film on a substrate by plasma-enhanced chemical vapor deposition at temperatures substantially lower than conventional thermal CVD temperatures comprises placing a substrate within a reaction chamber and exciting a first gas upstream of the substrate to generate activated radicals of the first gas. The substrate is rotated within the deposition chamber to create a pumping action which draws the gas mixture of first gas radicals to the substrate surface. A second gas is supplied proximate the substrate to mix with the activated radicals of the first gas and the mixture produces a surface reaction at the substrate to deposit a film. The pumping action draws the gas mixture down to the substrate surface in a laminar flow to reduce recirculation and radical recombination such that a sufficient amount of radicals are available at the substrate surface to take pan in the surface reaction. Another method utilizes a gas-dispersing showerhead that is biased with RF energy to form an electrode which generates activated radicals and ions in a concentrated plasma close to the substrate surface. The activated plasma gas radicals and ions utilized in the invention contribute energy to the surface reaction such that the film may be deposited at a substantially lower deposition temperature that is necessary for traditional thermal CVD techniques. Furthermore, the activation of these species reduces the temperature needed to complete the surface reaction. The method is particularly useful in depositing titanium-containing films at low temperatures.
Inventors
- 👤 Robert F. Foster
- 👤 Joseph T. Hillman
- 👤 Rene E. LeBlanc
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:34
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45504; C23C16/04; C23C16/045; C23C16/06; C23C16/08; C23C16/14; C23C16/22; C23C16/30; C23C16/34; C23C16/42; C23C16/448; C23C16/452; C23C16/45563; C23C16/45565; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
382 words
An apparatus for depositing a titanium-containing film on a substrate by chemical vapor deposition utilizing an upstream microwave plasma comprising: a reaction chamber for receiving a substrate; a remote first gas supply containing a first gas including at least one of hydrogen and nitrogen; a passage for connecting the remote first gas supply to the reaction chamber, the passage defining an outlet which directs the first gas in said passage proximate to a substrate in the reaction chamber; an energy source coupled to said connecting passage upstream of said passage outlet for creating a plasma-generating region in the passage, the passage plasma-generating region operable to excite the first gas and form activated radicals of the first gas, the activated radicals having a tendency to recombine with each other within the plasma to form stable molecules and thereby having a limited active life; a rotating susceptor within the reaction chamber for supporting a substrate, the susceptor operable to rotate the substrate and reduce recombinations of the activated first gas radicals by drawing the first gas radicals through the passage and out of the passage outlet to produce a laminar flow of the first gas radicals proximate the substrate, the susceptor further operable to rotate the substrate and draw a sufficient number of activated first gas radicals to the substrate surface before they recombine so that they are available to provide energy to a reaction at the surface and reduce the amount of thermal energy necessary for the surface reaction; a heating device coupled to the susceptor for heating a substrate thereon in the range of approximately 200° C. to 800° C.; a second gas supply containing a titanium tetrahalide coupled to the deposition chamber to direct said titanium tetrahalide gas below said outlet and proximate the substrate and above said rotating susceptor, the rotating susceptor further operable to draw said titanium tetrahalide gas to the substrate surface in a laminar flow to mix with said sufficient number of unrecombined first gas activated radicals and then operable to draw the mixture downward over the substrate surface such that the titanium-containing gas chemically reacts with the unrecombined radicals at the substrate surface and the radicals provide energy to the chemical reaction to deposit a titanium-containing film on the substrate surface at the desired temperature range.
Claim 2
Independent Claim
382 words
An apparatus for depositing a titanium-containing film on a substrate by chemical vapor deposition utilizing an upstream microwave plasma comprising: a reaction chamber for receiving a substrate; a remote first gas supply containing a first gas including at least one of hydrogen and nitrogen; a passage for connecting the remote first gas supply to the reaction chamber, the passage defining an outlet which directs the first gas in said passage proximate to a substrate in the reaction chamber; an energy source coupled to said connecting passage upstream of said passage outlet for creating a plasma-generating region in the passage, the passage plasma-generating region operable to excite the first gas and form activated radicals of the first gas, the activated radicals having a tendency to recombine with each other within the plasma to form stable molecules and thereby having a limited active life; a rotating susceptor within the reaction chamber for supporting a substrate, the susceptor operable to rotate the substrate and reduce recombinations of the activated first gas radicals by drawing the first gas radicals through the passage and out of the passage outlet to produce a laminar flow of the first gas radicals proximate the substrate, the susceptor further operable to rotate the substrate and draw a sufficient number of activated first gas radicals to the substrate surface before they recombine so that they are available to provide energy to a reaction at the surface and reduce the amount of thermal energy necessary for the surface reaction; a heating device coupled to the susceptor for heating a substrate thereon in the range of approximately 200° C. to 800° C.; a second gas supply containing a titanium tetrahalide coupled to the deposition chamber to direct said titanium tetrahalide gas below said outlet and proximate the substrate and above said rotating susceptor, the rotating susceptor further operable to draw said titanium tetrahalide gas to the substrate surface in a laminar flow to mix with said sufficient number of unrecombined first gas activated radicals and then operable to draw the mixture downward over the substrate surface such that the titanium-containing gas chemically reacts with the unrecombined radicals at the substrate surface and the radicals provide energy to the chemical reaction to deposit a titanium-containing film on the substrate surface at the desired temperature range.
Claim 3
Dependent Claim
45 words
The apparatus of claim 1 wherein the connecting passage includes a quartz tube for carrying first gas from the supply to the reaction chamber, the energy source generating microwave energy and being coupled to the tube to generate said activated radicals of the first gas.
Claim 4
Dependent Claim
25 words
The apparatus of claim 2 wherein said quartz tube is generally vertical such that the first gas radicals are drawn vertically downward to said substrate.
Claim 5
Dependent Claim
45 words
The apparatus of claim 2 wherein said quartz tube extends generally horizontally along its length and includes a vertical portion defining said outlet, such that the first gas radicals are drawn horizontally along the tube and then downward through said vertical portion to said substrate.
Claim 6
Dependent Claim
12 words
The apparatus of claim 1 wherein said energy source generates RF energy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-10-22 | 2000-04-22 | 2000-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-10-22 | 2004-04-22 | 2004-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-10-22 | 2008-04-22 | 2008-10-22 | $7700.00 | Window Closed / Lapsed |