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US5975912A Expired / Lapsed US ⏱️ 0.0 years remaining

Low temperature plasma-enhanced formation of integrated circuits

Assignee: Tokyo Electron Ltd
•
Filing: 1994-06-03
•
Granted: 1999-11-02
•
Expires: 2014-06-03
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Abstract

Abstract Using plasma enhanced chemical vapor deposition, various layers can be deposited on semiconductor substrates at low temperatures in the same reactor. When a titanium nitride film is required, a titanium film can be initially deposited using a plasma enhanced chemical vapor deposition wherein the plasma is created within 25 mm of the substrate surface, supplying a uniform plasma across the surface. The deposited film can be subjected to an ammonia anneal, again using a plasma of ammonia created within 25 mm of the substrate surface, followed by the plasma enhanced chemical vapor deposition of titanium nitride by creating a plasma of titanium tetrachloride and ammonia within 25 mm of the substrate surface. This permits deposition film and annealing at relatively low temperatures-less than 800 DEG C. When titanium is so deposited over a silicon surface, titanium silicide will form at the juncture which then can be nitrided and coated with titanium or titanium nitride using the plasma enhanced chemical vapor deposition of the present invention. Thus, the present method permits the formation of multiple layers of titanium, titanium nitride, titanium silicide over the surface of the substrate in the same reactor.

Inventors

  • 👤 Joseph T. Hillman
  • 👤 Robert F. Foster

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 03:43
CPC Classifications
C; C23; C23C; C23C8/00; C23C8/02; C23C16/00; C23C16/02; C23C16/22; C23C16/30; C23C16/34; C23C8/06; C23C8/36

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 91 words
A method of depositing a titanium nitride film onto a substrate comprising: in a reaction chamber forming a titanium layer on said surface of a substrate by creating a plasma of a gas mixture, said gas mixture comprising titanium tetrahalide and hydrogen wherein said plasma is created within about 25 mm of said surface; in said reaction chamber nitriding said titanium layer by forming a plasma from a gas selected from the group consisting of ammonia and nitrogen within 25 mm of said titanium layer, thereby forming said titanium nitride film.
Claim 2
Independent Claim 91 words
A method of depositing a titanium nitride film onto a substrate comprising: in a reaction chamber forming a titanium layer on said surface of a substrate by creating a plasma of a gas mixture, said gas mixture comprising titanium tetrahalide and hydrogen wherein said plasma is created within about 25 mm of said surface; in said reaction chamber nitriding said titanium layer by forming a plasma from a gas selected from the group consisting of ammonia and nitrogen within 25 mm of said titanium layer, thereby forming said titanium nitride film.
Claim 3
Dependent Claim 12 words
The method claimed in claim 1 wherein said substrate surface is aluminum.
Claim 4
Dependent Claim 12 words
The method claimed in claim 1 wherein said substrate surface is titanium.
Claim 5
Dependent Claim 66 words
The method claimed in claim 1 further comprising in said reactor depositing a layer of titanium nitride on said titanium nitride film by creating a plasma from a second gas mixture, said second gas mixture comprising titanium tetrahalide and a gas selected from the group consisting of nitrogen and ammonia wherein said plasma is created within 25 mm of said first layer of titanium nitride film.
Claim 6
Dependent Claim 12 words
The method claimed in claim 4 wherein said substrate surface is aluminum.
Claim 7
Dependent Claim 12 words
The method claimed in claim 4 wherein said substrate surface is titanium.
Claim 8
Independent Claim 132 words
A method of forming a titanium/titanium nitride stacked film on a substrate comprising conducting the following reaction steps in a single reaction chamber without removing said substrate from said chamber until all of the reaction steps have been completed, said reaction steps comprising: evacuating said chamber to a desired pressure; subjecting said substrate to a plasma formed from titanium tetrahalide and hydrogen to form a titanium layer on said substrate; subjecting said titanium layer to an ammonium plasma to form a thin film of titanium nitride on said titanium film; depositing a layer of titanium nitride onto said thin film of titanium nitride by subjecting said thin film to a plasma formed from a gas mixture comprising titanium tetrahalide and a nitrogen-containing gas selected from the group consisting of nitrogen and ammonia.
Claim 9
Independent Claim 132 words
A method of forming a titanium/titanium nitride stacked film on a substrate comprising conducting the following reaction steps in a single reaction chamber without removing said substrate from said chamber until all of the reaction steps have been completed, said reaction steps comprising: evacuating said chamber to a desired pressure; subjecting said substrate to a plasma formed from titanium tetrahalide and hydrogen to form a titanium layer on said substrate; subjecting said titanium layer to an ammonium plasma to form a thin film of titanium nitride on said titanium film; depositing a layer of titanium nitride onto said thin film of titanium nitride by subjecting said thin film to a plasma formed from a gas mixture comprising titanium tetrahalide and a nitrogen-containing gas selected from the group consisting of nitrogen and ammonia.
Claim 10
Dependent Claim 47 words
The method claimed in claim 1 wherein said first gas mixture comprises less than about 10% titanium tetrahalide wherein about 100-500 angstroms of titanium nitride is deposited; and wherein the gas mixture is changed to establish a titanium tetrahalide concentration greater than 10% up to about 20%.
Claim 11
Dependent Claim 25 words
The method claimed in claim 7 further including the reaction step of subjecting said titanium nitride film to an ammonia anneal in said reaction chamber.
Claim 12
Dependent Claim 30 words
The method claimed in claim 7 wherein said substrate is heated to a temperature of 400 to 500° C. and maintained at said temperature throughout all of said reaction steps.
Claim 13
Independent Claim 136 words
A method of forming a titanium nitride film on a silicon surface comprising forming a first plasma of a first gas mixture comprising titanium tetrahalide and hydrogen wherein said first plasma is created within 25 mm of a silicon surface, thereby depositing a titanium film onto said silicon surface; nitriding said deposited film by creating a second plasma of a second gas wherein said second gas is selected from the group consisting of ammonia and nitrogen and wherein said second plasma of said second gas is created within 25 mm of said deposited film; and depositing a layer of titanium nitride film on said nitrided deposited film by creating a third plasma of a third gas mixture, said third gas mixture comprising titanium tetrahalide and a gas selected from the group consisting of ammonia and nitrogen.
Claim 14
Independent Claim 136 words
A method of forming a titanium nitride film on a silicon surface comprising forming a first plasma of a first gas mixture comprising titanium tetrahalide and hydrogen wherein said first plasma is created within 25 mm of a silicon surface, thereby depositing a titanium film onto said silicon surface; nitriding said deposited film by creating a second plasma of a second gas wherein said second gas is selected from the group consisting of ammonia and nitrogen and wherein said second plasma of said second gas is created within 25 mm of said deposited film; and depositing a layer of titanium nitride film on said nitrided deposited film by creating a third plasma of a third gas mixture, said third gas mixture comprising titanium tetrahalide and a gas selected from the group consisting of ammonia and nitrogen.
Claim 15
Dependent Claim 13 words
The method claimed in claim 11 wherein said titanium tetrahalide is titanium tetrachloride.
Claim 16
Dependent Claim 12 words
The method claimed in claim 11 wherein said second gas is ammonia.
Claim 17
Dependent Claim 23 words
The method claimed in claim 11 wherein each of said first, second and third plasmas are created within 20 mm of said surface.
Claim 18
Dependent Claim 32 words
The method claimed in claim 11 wherein said first, second and third plasma are created by creating a radio frequency potential at a metal showerhead located within 25 mm of said surface.

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-11-01 2003-05-03 2003-11-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-11-01 2007-05-03 2007-11-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-11-01 2011-05-03 2011-11-02 $7700.00 Window Closed / Lapsed

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