US6563156B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Memory elements and methods for making same
Assignee: Round Rock Research LLC
•
Filing: 2001-03-15
•
Granted: 2003-05-13
•
Expires: 2021-03-15
Abstract
Abstract Annular, linear, and point contact structures are described which exhibit a greatly reduced susceptibility to process deviations caused by lithographic and deposition variations than does a conventional circular contact plug. In one embodiment, a standard conductive material such as carbon or titanium nitride is used to form the contact. In an alternative embodiment, a memory material itself is used to form the contact. These contact structures may be made by various processes, including chemical mechanical planarization and facet etching.
Inventors
- 👤 Steven T. Harshfield
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:25
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/62; H10B; H10B63/00; H10B63/80; H10B63/82; H10N; H10N70/00; H10N70/011; H10N70/061; H10N70/068; H10N70/20; H10N70/231; H10N70/801; H10N70/821; H10N70/826; H10N70/8265; H10N70/841; H10N70/8418; H10N70/881; H10N70/882; H10N70/8828; Y; Y10; Y10S; Y10S257/00; Y10S257/91
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
144 words
A memory cell comprising: a substrate; a structure protruding from the substrate, the structure having at least one corner, the structure comprising one of a first conductive material and a first memory material; a layer of insulating material disposed over the structure in a manner that leaves the at least one corner of the structure exposed to form at least one point contact; at least one layer of material disposed over the at least one point contact, the at least one layer of material comprising a second conductive material if the structure comprises the first memory material, and the at least one layer of material comprising a second memory material if the structure comprises the first conductive material; and a conductive layer disposed over the at least one layer of material if the at least one layer of material comprises the second memory material.
Claim 2
Dependent Claim
144 words
A memory cell comprising: a substrate; a structure protruding from the substrate, the structure having at least one corner, the structure comprising one of a first conductive material and a first memory material; a layer of insulating material disposed over the structure in a manner that leaves the at least one corner of the structure exposed to form at least one point contact; at least one layer of material disposed over the at least one point contact, the at least one layer of material comprising a second conductive material if the structure comprises the first memory material, and the at least one layer of material comprising a second memory material if the structure comprises the first conductive material; and a conductive layer disposed over the at least one layer of material if the at least one layer of material comprises the second memory material.
Claim 3
Dependent Claim
14 words
The memory cell of claim 1 , wherein the substrate comprises a semiconductor substrate.
Claim 4
Dependent Claim
18 words
The memory cell of claim 1 , wherein the first and second memory materials comprise a chalcogenide material.
Claim 5
Dependent Claim
20 words
The memory cell of claim 1 , wherein the substrate comprises a conductive region in electrical contact with the structure.
Claim 6
Dependent Claim
13 words
The memory cell of claim 1 , wherein the structure comprises a pillar.
Claim 7
Dependent Claim
17 words
The memory cell of claim 5 , wherein the pillar is substantially square and comprises four corners.
Claim 8
Dependent Claim
18 words
The memory cell of claim 5 , wherein the pillar contact is substantially rectangular and comprises four corners.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-05-12 | 2006-11-11 | 2007-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-05-12 | 2010-11-11 | 2011-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-05-12 | 2014-11-11 | 2015-05-13 | $7700.00 | Window Closed / Lapsed |