US6441468B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1999-04-26
•
Granted: 2002-08-27
•
Expires: 2019-04-26
Abstract
Abstract A resin material having low dielectric constant is used as an inter-layer insulating film and its bottom surface is contacted with a silicon oxide film across the whole surface thereof. Thereby, the surface may be flattened and capacity produced between a thin film transistor and an pixel electrode may be reduced. Further, it allows to avoid a problem that impurity ions and moisture infiltrate into the lower surface of the resin material, thus degrading the reliability of whole semiconductor device.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:16
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; H10D30/0316; H10D30/0321; H10D30/60; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6715; H10D30/6723; H10D30/6725; H10D86/00; H10D86/40; H10D86/451; H10D86/60; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/065; H10W20/071; H10W20/074; H10W20/075; H10W20/077; G02F1/136227
Claims Analysis
Total Claims: 72
Claim 1
Independent Claim
94 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 2
Dependent Claim
94 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 3
Dependent Claim
32 words
An EL type display according to claim 1 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 4
Dependent Claim
32 words
An EL type display according to claim 1 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 5
Dependent Claim
98 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film comprising silicon oxide formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 6
Dependent Claim
98 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film comprising silicon oxide formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 7
Dependent Claim
32 words
An EL type display according to claim 4 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 8
Dependent Claim
32 words
An EL type display according to claim 4 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 9
Dependent Claim
49 words
An EL type display according to claim 4 , further comprising a second insulating film interposed between said first organic resin film and said semiconductor film, wherein said second insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 10
Dependent Claim
98 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film comprising silicon nitride formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 11
Dependent Claim
98 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film comprising silicon nitride formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 12
Dependent Claim
32 words
An EL type display according to claim 8 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 13
Dependent Claim
32 words
An EL type display according to claim 8 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 14
Dependent Claim
49 words
An EL type display according to claim 8 , further comprising a second insulating film interposed between said first organic resin film and said semiconductor film, wherein said second insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 15
Dependent Claim
104 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 16
Dependent Claim
104 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first organic film comprising a resin material formed over at least said semiconductor film and said gate electrode; an insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 17
Dependent Claim
32 words
An EL type display according to claim 12 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 18
Dependent Claim
32 words
An EL type display according to claim 12 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 19
Dependent Claim
29 words
An EL type display according to claim 12 , wherein said insulating film comprises at least one material selected from the group consisting of silicon oxide and silicon nitride.
Claim 20
Dependent Claim
106 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first insulating film formed over at least said semiconductor film and said gate electrode; a first organic film comprising a resin material formed on said first insulating film; a second insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 21
Dependent Claim
106 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first insulating film formed over at least said semiconductor film and said gate electrode; a first organic film comprising a resin material formed on said first insulating film; a second insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 22
Dependent Claim
32 words
An EL type display according to claim 16 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 23
Dependent Claim
32 words
An EL type display according to claim 16 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 24
Dependent Claim
32 words
An EL type display according to claim 16 , wherein said first insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 25
Dependent Claim
115 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first insulating film formed over at least said semiconductor film and said gate electrode; a first organic film comprising a resin material formed on said first insulating film; a second insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 26
Dependent Claim
115 words
An EL type display comprising: a substrate; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor film having a channel forming region and a gate electrode adjacent to said channel forming region with a gate insulating film therebetween; a first insulating film formed over at least said semiconductor film and said gate electrode; a first organic film comprising a resin material formed on said first insulating film; a second insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and a pixel electrode formed over said second organic film.
Claim 27
Dependent Claim
32 words
An EL type display according to claim 20 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 28
Dependent Claim
32 words
An EL type display according to claim 20 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 29
Dependent Claim
32 words
An EL type display according to claim 20 , wherein said first insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 30
Dependent Claim
30 words
An EL type display according to claim 20 , wherein said second insulating film comprises at least one material selected from the group consisting of silicon oxide and silicon nitride.
Claim 31
Dependent Claim
50 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 32
Dependent Claim
50 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 33
Dependent Claim
32 words
An EL type display according to claim 25 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 34
Dependent Claim
32 words
An EL type display according to claim 25 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 35
Dependent Claim
19 words
An EL type display according to claim 25 , wherein said electrode is formed on said second organic film.
Claim 36
Dependent Claim
17 words
An EL type display according to claim 25 , wherein said electrode comprises an indium tin oxide.
Claim 37
Dependent Claim
53 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film comprising silicon oxide formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 38
Dependent Claim
53 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film comprising silicon oxide formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 39
Dependent Claim
32 words
An EL type display according to claim 30 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 40
Dependent Claim
32 words
An EL type display according to claim 30 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 41
Dependent Claim
19 words
An EL type display according to claim 30 , wherein said electrode is formed on said second organic film.
Claim 42
Dependent Claim
17 words
An EL type display according to claim 30 , wherein said electrode comprises an indium tin oxide.
Claim 43
Dependent Claim
48 words
An EL type display according to claim 30 , further comprising a second insulating film interposed between said first organic resin film and said substrate, wherein said second insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 44
Dependent Claim
53 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film comprising silicon nitride formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 45
Dependent Claim
53 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film comprising silicon nitride formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 46
Dependent Claim
32 words
An EL type display according to claim 36 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 47
Dependent Claim
32 words
An EL type display according to claim 36 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 48
Dependent Claim
19 words
An EL type display according to claim 36 , wherein said electrode is formed on said second organic film.
Claim 49
Dependent Claim
17 words
An EL type display according to claim 36 , wherein said electrode comprises an indium tin oxide.
Claim 50
Dependent Claim
48 words
An EL type display according to claim 36 , further comprising a second insulating film interposed between said first organic resin film and said substrate, wherein said second insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 51
Dependent Claim
59 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film, and an electrode formed over said second organic film.
Claim 52
Dependent Claim
59 words
An EL type display comprising: a substrate; a first organic film comprising a resin material formed over said substrate; an insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film, and an electrode formed over said second organic film.
Claim 53
Dependent Claim
32 words
An EL type display according to claim 42 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 54
Dependent Claim
32 words
An EL type display according to claim 42 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 55
Dependent Claim
29 words
An EL type display according to claim 42 , wherein said insulating film comprises at least one material selected from the group consisting of silicon oxide and silicon nitride.
Claim 56
Dependent Claim
19 words
An EL type display according to claim 42 , wherein said electrode is formed on said second organic film.
Claim 57
Dependent Claim
17 words
An EL type display according to claim 42 , wherein said electrode comprises an indium tin oxide.
Claim 58
Dependent Claim
61 words
An EL type display comprising: a substrate; a first insulating film formed over said substrate; a first organic film comprising a resin material formed on said first insulating film; a second insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 59
Dependent Claim
61 words
An EL type display comprising: a substrate; a first insulating film formed over said substrate; a first organic film comprising a resin material formed on said first insulating film; a second insulating film formed on said first organic film; a second organic film comprising a resin material formed on said insulating film; and an electrode formed over said second organic film.
Claim 60
Dependent Claim
32 words
An EL type display according to claim 48 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 61
Dependent Claim
32 words
An EL type display according to claim 48 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 62
Dependent Claim
32 words
An EL type display according to claim 48 , wherein said first insulating film comprises at least one material selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride.
Claim 63
Dependent Claim
19 words
An EL type display according to claim 48 , wherein said electrode is formed on said second organic film.
Claim 64
Dependent Claim
17 words
An EL type display according to claim 48 , wherein said electrode comprises an indium tin oxide.
Claim 65
Dependent Claim
70 words
An EL type display comprising: a substrate; a first insulating film formed over said substrate; a first organic film comprising a resin material formed on said first insulating film; a second insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film, and an electrode formed over said second organic film.
Claim 66
Dependent Claim
70 words
An EL type display comprising: a substrate; a first insulating film formed over said substrate; a first organic film comprising a resin material formed on said first insulating film; a second insulating film having a laminate structure of at least two films formed on said first organic film; a second organic film comprising a resin material formed on said insulating film, and an electrode formed over said second organic film.
Claim 67
Dependent Claim
32 words
An EL type display according to claim 54 , wherein said resin material of said first organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 68
Dependent Claim
32 words
An EL type display according to claim 54 , wherein said resin material of said second organic film comprises at least one material selected from the group consisting of polyimide and acrylic.
Claim 69
Dependent Claim
32 words
An EL type display according to claim 54 , wherein said first insulating film comprises at least one material selected from the group consisting of silicon oxide, slicon nitride, and silicon oxynitride.
Claim 70
Dependent Claim
30 words
An EL type display according to claim 54 , wherein said second insulating film comprises at least one material selected from the group consisting of silicon oxide and silicon nitride.
Claim 71
Dependent Claim
19 words
An EL type display according to claim 54 , wherein said electrode is formed on said second organic film.
Claim 72
Dependent Claim
17 words
An EL type display according to claim 54 , wherein said electrode comprises an indium tin oxide.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2005-08-26 | 2006-02-25 | 2006-08-27 | $2000.00 | Window Closed / Lapsed |
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