US6576494B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Recessed encapsulated microelectronic devices and methods for formation
Assignee: Micron Technology Inc
•
Filing: 2000-06-28
•
Granted: 2003-06-10
•
Expires: 2020-06-28
Abstract
Abstract A microelectronic device package and method for manufacture. In one embodiment, the device package can include a support member having a first surface, a second surface facing opposite the first surface and a cavity extending through the support member from the first surface to the second surface. A microelectronic device is disposed in the cavity and is supported in the cavity with a removable retention member. The microelectronic device is electrically coupled to the support member and is partially surrounded with an encapsulating material. The removable retention member is then removed to expose a surface of the microelectronic device. Accordingly, the package can have a low profile because the encapsulating material does not surround one of the microelectronic device surfaces. In one embodiment, a heat conductive material can be engaged with the exposed surface of the microelectronic device to increase the rate at which heat is transferred away from the microelectronic device.
Inventors
- 👤 Warren M. Farnworth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:09
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/01; H10W74/019; H10W74/10; H10W74/111; H10W74/114; H10W74/117; H10W72/00; H10W72/071; H10W72/075; H10W72/07502; H10W72/07504; H10W72/50; H10W72/551; H10W72/90; H10W72/951; H10W74/131; H10W74/142
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
98 words
A method for forming a microelectronic device package, comprising: positioning a microelectronic device at least partially within a cavity of a support member having a first surface and a second surface facing opposite the first surface, the cavity extending through the support member from the first surface to the second surface; supporting the microelectronic device relative to the cavity with a removable retention member; electrically coupling the microelectronic device to the support member; encasing a portion of the microelectronic device with an encapsulating material; and removing the removable retention member after encasing a portion of the microelectronic device.
Claim 2
Independent Claim
98 words
A method for forming a microelectronic device package, comprising: positioning a microelectronic device at least partially within a cavity of a support member having a first surface and a second surface facing opposite the first surface, the cavity extending through the support member from the first surface to the second surface; supporting the microelectronic device relative to the cavity with a removable retention member; electrically coupling the microelectronic device to the support member; encasing a portion of the microelectronic device with an encapsulating material; and removing the removable retention member after encasing a portion of the microelectronic device.
Claim 3
Dependent Claim
106 words
The method of claim 1 wherein the retention member includes an adhesive layer, and wherein the method further comprises: positioning the adhesive layer adjacent to the second surface of the support member with an adhesive portion of the adhesive layer extending over at least a portion of the cavity adjacent to the second surface of the support member; removably attaching the adhesive layer to the microelectronic device while the microelectronic device is positioned in the cavity and before encasing a portion of the microelectronic device; and removing the adhesive layer from the support member after encasing a portion of the microelectronic device with an encapsulating material.
Claim 4
Dependent Claim
41 words
The method of claim 1 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises accessing the second face of the microelectronic device after removing the retention member.
Claim 5
Dependent Claim
41 words
The method of claim 1 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises engaging the second face of the microelectronic device with the removable retention member.
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein supporting the microelectronic device relative to the cavity includes supporting the microelectronic device with an adhesive.
Claim 7
Dependent Claim
15 words
The method of claim 1 wherein positioning a microelectronic device includes positioning a DRAM chip.
Claim 8
Dependent Claim
63 words
The method of claim 1 wherein the support member is a first support member, and wherein the method further comprises electrically coupling the first support member to a second support member by attaching solder balls projecting from the first surface of the first support member to solder ball pads of the second support member, the second support member facing toward the encapsulating material.
Claim 9
Dependent Claim
77 words
The method of claim 1 wherein the retention member removably engages a surface of the microelectronic device and the support member is a first support member, and wherein the method further comprises electrically coupling the first support member to a second support member by attaching solder balls projecting from the second surface of the first support member to solder ball pads of the second support member, the second support member facing the surface of the microelectronic device.
Claim 10
Dependent Claim
34 words
The method of claim 1 wherein electrically coupling the microelectronic device to the support member includes connecting wire bonds between first bond pads on the microelectronic device and second bond pads on the substrate.
Claim 11
Dependent Claim
76 words
The method of claim 1 wherein the microelectronic device has a first face engaged with the encapsulating material and a second face facing opposite the first face, and the encapsulating material has a first heat transfer coefficient, and wherein the method further comprises disposing a heat conductive material in direct contact with the second face of the microelectronic device, the heat conductive material having a second heat transfer coefficient higher than the first heat transfer coefficient.
Claim 12
Dependent Claim
23 words
The method of claim 10 wherein disposing a heat conductive material includes positioning silicon nitride against the second face of the microelectronic device.
Claim 13
Dependent Claim
75 words
The method of claim 1 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises disposing the microelectronic device in the cavity with the second face of the microelectronic device at least approximately flush with the second surface of the support member and the first surface of the microelectronic device approximately flush or recessed from the first surface of the support member.
Claim 14
Dependent Claim
72 words
The method of claim 1 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises disposing the microelectronic device in the opening with the second face of the microelectronic device at least approximately flush with the second surface of the support member and the first face of the microelectronic projecting outwardly from the first surface of the support member.
Claim 15
Dependent Claim
47 words
The method of claim 1 , further comprising disposing the encapsulating material to a selected thickness such that an overall thickness of the package measured from the second surface of the support member to an external surface of the encapsulating material is about 1400 microns or less.
Claim 16
Dependent Claim
46 words
The method of claim 1 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises selecting the microelectronic device to have a thickness between the first and second faces of about 500 microns.
Claim 17
Dependent Claim
35 words
The method of claim 1 , further comprising: supporting the microelectronic device with a thermoplastic material; and heating the thermoplastic material to remove the thermoplastic material from the microelectronic device after encapsulating the microelectronic device.
Claim 18
Dependent Claim
29 words
The method of claim 1 , further comprising: applying an electrostatic charge to the retention member; and supporting the microelectronic device relative to the opening with the electrostatic charge.
Claim 19
Independent Claim
126 words
A method for forming a microelectronic device package, comprising: disposing a microelectronic device in a cavity of a support member, the support member having a first surface and a second surface facing opposite the first surface, and the cavity extending through the support member from the first surface to the second surface; supporting the microelectronic device relative to the cavity; electrically coupling the microelectronic device to the support member; and partially surrounding the microelectronic device with an encapsulating material by disposing the encapsulating material adjacent to the microelectronic device in a first region extending outwardly from the first surface of the support member without coupling the encapsulating material to the support member in a second region extending outwardly from the second surface of the support member.
Claim 20
Independent Claim
126 words
A method for forming a microelectronic device package, comprising: disposing a microelectronic device in a cavity of a support member, the support member having a first surface and a second surface facing opposite the first surface, and the cavity extending through the support member from the first surface to the second surface; supporting the microelectronic device relative to the cavity; electrically coupling the microelectronic device to the support member; and partially surrounding the microelectronic device with an encapsulating material by disposing the encapsulating material adjacent to the microelectronic device in a first region extending outwardly from the first surface of the support member without coupling the encapsulating material to the support member in a second region extending outwardly from the second surface of the support member.
Claim 21
Dependent Claim
95 words
The method of claim 18 , further comprising: positioning an adhesive layer adjacent to the second surface of the support member with an adhesive portion of the adhesive layer extending over at least a portion of the cavity adjacent to the second surface of the support member; removably attaching the adhesive layer to the microelectronic device while the microelectronic device is positioned in the cavity and before at least partially surrounding the microelectronic device; and removing the adhesive layer from the support member after at least partially surrounding the microelectronic device with the encapsulating material.
Claim 22
Dependent Claim
46 words
The method of claim 18 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises exposing the second face of the microelectronic device after partially enclosing the microelectronic device with the encapsulating material.
Claim 23
Dependent Claim
83 words
The method of claim 18 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises: engaging the second face of the microelectronic device with the encapsulating material, the encapsulating material having a first heat transfer coefficient; and disposing a heat conductive material in direct contact with the second face of the microelectronic device, the heat conductive material having a second heat transfer coefficient higher than the first heat transfer coefficient.
Claim 24
Dependent Claim
22 words
The method of claim 21 wherein disposing a heat conductive material includes positioning silicon nitride against the surface of the microelectronic device.
Claim 25
Dependent Claim
76 words
The method of claim 18 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises disposing the microelectronic device in the cavity with the second face of the microelectronic device at least approximately flush with the second surface of the support member and the first surface of the microelectronic device approximately flush with or recessed from the first surface of the support member.
Claim 26
Dependent Claim
72 words
The method of claim 18 wherein the microelectronic device has a first face and a second face facing opposite the first face, and wherein the method further comprises disposing the microelectronic device in the opening with the second face of the microelectric device at least approximately flush with the second surface of the support member and the first face of the microelectronic projecting outwardly from the first surface of the support member.
Claim 27
Independent Claim
162 words
A method for forming a device package, comprising: positioning a microelectronic device at least partially within a cavity of a support member having a first surface and a second surface facing opposite the first surface, the cavity extending through the support member from the first surface to the second surface; positioning a removable retention member, having an adhesive layer, adjacent to the second surface of the support member with an adhesive portion of the adhesive layer extending over at least a portion of the cavity adjacent to the second surface of the support member; removably attaching the adhesive layer to the microelectronic device while the microelectronic device is positioned in the cavity and before encasing a portion of the microelectronic device; electrically coupling the microelectronic device to the support member; encasing a portion of the microelectronic device with an encapsulating material; and removing the adhesive layer from the support member after encasing a portion of the microelectronic device with an encapsulating material.
Claim 28
Independent Claim
162 words
A method for forming a device package, comprising: positioning a microelectronic device at least partially within a cavity of a support member having a first surface and a second surface facing opposite the first surface, the cavity extending through the support member from the first surface to the second surface; positioning a removable retention member, having an adhesive layer, adjacent to the second surface of the support member with an adhesive portion of the adhesive layer extending over at least a portion of the cavity adjacent to the second surface of the support member; removably attaching the adhesive layer to the microelectronic device while the microelectronic device is positioned in the cavity and before encasing a portion of the microelectronic device; electrically coupling the microelectronic device to the support member; encasing a portion of the microelectronic device with an encapsulating material; and removing the adhesive layer from the support member after encasing a portion of the microelectronic device with an encapsulating material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-06-09 | 2006-12-09 | 2007-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-06-09 | 2010-12-09 | 2011-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-06-09 | 2014-12-09 | 2015-06-10 | $7700.00 | Window Closed / Lapsed |