Patent US6219973B1 successfully refreshed from Google Patents.
Patent US6322714B1 successfully refreshed from Google Patents.
US6322714B1
Expired / Lapsed
US
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Process for etching silicon-containing material on substrates
Assignee: Applied Materials Inc
•
Filing: 1998-07-16
•
Granted: 2001-11-27
•
Expires: 2018-07-16
Abstract
Abstract A method of etching a silicon-containing layer 170 on a substrate 45 comprises the steps of placing the substrate 45 on a support 75 in a process chamber 50 . The substrate 45 is exposed to an energized process gas comprising a bromine-containing gas, a chlorine-containing gas, an inorganic fluorinated gas, and an oxygen gas. The volumetric flow ratio of the gas constituents is selected so that the energized process gas etches regions 180 a,b having different concentrations of dopant in the polysilicon layer 170 at substantially the same etching rate. Optionally, the gas composition is also tailored to simultaneously clean off etch residue from the internal surfaces of a process chamber 50 during etching of the substrate 45.
Inventors
- 👤 Padmapani Nallan
- 👤 Jeffrey Chinn
- 👤 Stephen Yuen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:46
CPC Classifications
C; C30; C30B; C30B33/00; C30B33/08; C30B33/12; H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 74
Claim 1
Independent Claim
79 words
A method of etching a substrate, the method comprising the steps oft (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material comprising regions having different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas comprising a bromine-containing gas, a chlorine-containing gas, a fluorine-containing gas, and an oxygen-containing gas, wherein the energized process gas etches the regions of different dopants or different dopant concentrations at substantially the same rate.
Claim 2
Independent Claim
79 words
A method of etching a substrate, the method comprising the steps oft (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material comprising regions having different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas comprising a bromine-containing gas, a chlorine-containing gas, a fluorine-containing gas, and an oxygen-containing gas, wherein the energized process gas etches the regions of different dopants or different dopant concentrations at substantially the same rate.
Claim 3
Dependent Claim
46 words
A method according to claim 1 wherein the volumetric flow ratio of the bromine-containing gas, chlorine-containing gas, fluorine-containing gas, and oxygen-containing gas is selected so that the energized process gas etches the regions having different dopants or different dopant concentrations at substantially the same etching rate.
Claim 4
Dependent Claim
49 words
A method according to claim 1 wherein the volumetric flow ratio of the bromine-containing gas, chlorine-containing gas, fluorine-containing gas, and oxygen-containing gas is selected so that the energized process gas cleans off etch residue deposits formed on internal surfaces of the process chamber during etching of the silicon-containing material.
Claim 5
Dependent Claim
42 words
A method according to claim 3 wherein the volumetric flow ratio of the combined volumietric flow rates of the bromine-containing gas, chlorine-containing gas, and oxygen-containing gas, to the volumetric flow rate of the fluorine-containing gas is from about 4:1 to about 20:1.
Claim 6
Dependent Claim
23 words
A method according to claim 1 wherein the bromine-containing gas comprises one or more of HBr, Br 2 , or CH 3 Br.
Claim 7
Dependent Claim
19 words
A method according to claim 1 wherein the chlorine-containing gas comprises one or more of Cl 2 or HCl.
Claim 8
Dependent Claim
21 words
A method according to claim 1 wherein the oxygen-containing gas comprises one or more of O 2 or He—O 2 .
Claim 9
Dependent Claim
34 words
A method according to claim 1 wherein the energized process gas comprises HBr, Cl 2 , He—O 2 , and one or more of NF 3 , CF 4 , and SF 6 .
Claim 10
Dependent Claim
25 words
A method according to claim 1 wherein the energized process gas consists essentially of HBr, Cl 2 , He—O 2 , and CF 4 .
Claim 11
Dependent Claim
12 words
A method according to claim 1 wherein the silicon-containing material comprises polysilicon.
Claim 12
Dependent Claim
15 words
A method according to claim 1 wherein the fluorine-containing gas comprises an inorganic fluorinated gas.
Claim 13
Dependent Claim
26 words
A method according to claim 11 wherein the inorganic fluorinated gas comprises one or more of NF 3 , CF 4 , or SF 6 .
Claim 14
Dependent Claim
30 words
A method according to claim 1 wherein the regions with different dopants or different dopant concentrations comprise a first region comprising n-type dopant and a second region comprising p-type dopant.
Claim 15
Dependent Claim
30 words
A method according to claim 1 wherein the regions with different dopants or different dopant concentrations comprise a first region comprising boron-containing material and a second region comprising phosphorous-containing material.
Claim 16
Dependent Claim
24 words
A method according to claim 1 wherein the regions with different dopants or different dopant concentrations comprise an undoped region and a doped region.
Claim 17
Dependent Claim
25 words
A method according to claim 1 wherein the regions having different dopants or different dopant concentrations comprise regions having different concentrations of the same dopant.
Claim 18
Dependent Claim
41 words
A method according to claim 1 wherein the regions having different dopants or different dopant concentrations comprise a first doped regiopn and a second doped region, wherein the second doped region has a lower dopant concentration than the first doped region.
Claim 19
Dependent Claim
22 words
A method according to claim 1 wherein the regions with different dopants or different dopant concentrations comprise a region of unactivated dopant.
Claim 20
Independent Claim
83 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising material having a doped region; and (b) exposing the substrate and internal surfaces of the process chamber to an energized process gas comprising a bromine-containing gas; a chlorine-containing gas; a fluorine-containing gas; and an oxygen-containing gas in a volumetric flow ratio selected to simultaneously etch the material having a doped region and clean the internal surfaces of the process chamber.
Claim 21
Independent Claim
83 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising material having a doped region; and (b) exposing the substrate and internal surfaces of the process chamber to an energized process gas comprising a bromine-containing gas; a chlorine-containing gas; a fluorine-containing gas; and an oxygen-containing gas in a volumetric flow ratio selected to simultaneously etch the material having a doped region and clean the internal surfaces of the process chamber.
Claim 22
Dependent Claim
47 words
A method according to claim 19 wherein the volumetric flow ratio of the bromine-containing gas, chlorine-containing gas, fluorine-containing gas, and oxygen-containing gas is selected so that the energized process gas etches regions having different dopants or different dopant concentrations in the material at substantially the same rate.
Claim 23
Dependent Claim
48 words
A method according to claim 19 wherein the volumetric flow ratio of the bromine-containing gas, chlorine-containing gas, fluorine-containing gas, and oxygen-containing gas is selected so that the energized process gas cleans off etch residue deposits formed on internal surfaces of the process chamber during etching of the material.
Claim 24
Dependent Claim
42 words
A method according to claim 21 wherein the volumetric flow ratio of the combined volumetric flow rates of the bromine-containing gas, chlorine-containing gas, and oxygen-containing gas, to the volumetric flow rate of the fluorine-containing gas is from about 4:1 to about 20:1.
Claim 25
Dependent Claim
51 words
A method according to claim 19 wherein the volumetric flow ratio of the oxygen-containing gas and fluorine-containing gas is selected so that the energized process gas cleans off substantially all etch residue deposits formed on internal surfaces of the process chamber, and has a selectivity of etching polysilicon to silicon dioxide.
Claim 26
Dependent Claim
36 words
A method according to claim 23 wherein the volumetric flow ratio of the volumetric flow rate of the oxygen-conataining gas to the volumetric flow ratio of the fluorine-containing gas is from abut 1:1 to about 1:10.
Claim 27
Independent Claim
24 words
A method according to claim wherein the energized process gas consists essentially of HBr, Cl 2 , He—O 2 , and CF 4 .
Claim 28
Dependent Claim
23 words
A method according to claim 19 wherein the bromine-containing gas comprises one or more of HBr, Br 2 , and CH 3 Br.
Claim 29
Dependent Claim
19 words
A method according to claim 19 wherein the chlorine-containing gas comprises one or more of Cl 2 and HCl.
Claim 30
Dependent Claim
25 words
A method according to claim 19 wherein the fluorine-containing gas comprises one or more of NF 3 , CF 4 , and SF 6 .
Claim 31
Dependent Claim
21 words
A method according to claim 19 wherein the oxygen-containing gas comprises one or more of O 2 and He—O 2 .
Claim 32
Independent Claim
177 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having a first region with a first dopant or dopant concentration and a second region with a second dopant or dogant concentration; and (b) exposing the silicon-containing material on the substrate to an energized process gas comprising a bromine-containing gas selected from the group consisting of HBr, Br 2 , and CH 3 Br; a chlorine-containing gas selected from the group consisting of Cl 2 and HCl; aninorganic fluorinated gas selected from the group consisting of NF 3 , CF 4 , and SF 6 ; and an oxygen-containing gas selected from the group consisting of O 2 and He—O 2 , wherein the volumetric flow ratio of the combined volumetric flow rates of the bromine-containing gas, chlorine-containing gas, and oxygen-containing gas, to the volumetric flow rate of the inorganic fluorinated gas, is selected to etch the first and second regions at etching rates that differ by less than about 19%.
Claim 33
Independent Claim
177 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having a first region with a first dopant or dopant concentration and a second region with a second dopant or dogant concentration; and (b) exposing the silicon-containing material on the substrate to an energized process gas comprising a bromine-containing gas selected from the group consisting of HBr, Br 2 , and CH 3 Br; a chlorine-containing gas selected from the group consisting of Cl 2 and HCl; aninorganic fluorinated gas selected from the group consisting of NF 3 , CF 4 , and SF 6 ; and an oxygen-containing gas selected from the group consisting of O 2 and He—O 2 , wherein the volumetric flow ratio of the combined volumetric flow rates of the bromine-containing gas, chlorine-containing gas, and oxygen-containing gas, to the volumetric flow rate of the inorganic fluorinated gas, is selected to etch the first and second regions at etching rates that differ by less than about 19%.
Claim 34
Dependent Claim
51 words
A method according to claim 30 wherein the volumetric flow ratio of the bromine-containing gas, chlorine-containing gas, inorganic fluorinated gas, and oxygen-containing gas is selected so that the energized process gas cleans off the etch residue deposits formed on internal surfaces of the process chamber during etching of the silicon-containing material.
Claim 35
Independent Claim
24 words
A method according to claim wherein the energized process gas consists essentially of HBr, Cl 2 , He—O 2 , and CF 4 .
Claim 36
Dependent Claim
12 words
A method according to claim 30 wherein the first region is undoped.
Claim 37
Dependent Claim
22 words
A method according to claim 30 wherein the volumetric flow ratio is also selected to clean internal surfaces of the process chamber.
Claim 38
Independent Claim
133 words
A method of etching a substrate, the method comprising the steps of: (a) placing a substrate having silicon-containing material in a process chamber; (b) in a first etching stage, providing in the process chamber an energized first process gas comprising etching gas for etching the silicon-containing material on the substrate, and cleaning gas for cleaning deposits formed on internal surfaces of the process chamber during etching of the silicon-containing material; (c) in a pump-out stage, stopping the flow of the first process gas and exhausting the energized first process gas from the process chamber; and (d) in a second etching stage, providing in the process chamber an energized second process gas comprising etching gas for etching the silicon-containing material on the substrate, the energized second process gas being substantially absent the cleaning gas.
Claim 39
Independent Claim
133 words
A method of etching a substrate, the method comprising the steps of: (a) placing a substrate having silicon-containing material in a process chamber; (b) in a first etching stage, providing in the process chamber an energized first process gas comprising etching gas for etching the silicon-containing material on the substrate, and cleaning gas for cleaning deposits formed on internal surfaces of the process chamber during etching of the silicon-containing material; (c) in a pump-out stage, stopping the flow of the first process gas and exhausting the energized first process gas from the process chamber; and (d) in a second etching stage, providing in the process chamber an energized second process gas comprising etching gas for etching the silicon-containing material on the substrate, the energized second process gas being substantially absent the cleaning gas.
Claim 40
Dependent Claim
25 words
A method according to claim 35 wherein the cleaning gas comprises one or more of NF 3 , CF 4 , and SF 6 .
Claim 41
Dependent Claim
57 words
A method according to claim 35 wherein the etching gas comprises a bromine-containing gas selected from the group consisting of HBr, Br 2 , and CH 3 Br, a chlorine-containing gas selected from the group consisting of Cl 2 and HCl; and an oxygen-containing gas selected from the group consisting of O 2 and He—O 2 .
Claim 42
Dependent Claim
35 words
A method according to claim 35 wherein the pump-out stage comprises exhausting the energized first process gas from the process chamber until the process chamber is at a pressure of less than about 0.5 mTorr.
Claim 43
Dependent Claim
29 words
A method according to claim 35 wherein the pump-out stage comprises exhausting the energized first process gas from the process chamber for from about 5 to about 15 seconds.
Claim 44
Dependent Claim
14 words
A method according to claim 35 wherein the cleaning gas comprises a fluorine-containing gas.
Claim 45
Independent Claim
80 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having a doped region and an undoped region; and (b) exposing the silicon-containing material on the substrate to an energized process gas comprising bromine, chlorine, fluorine, and oxygen, wherein the volumetric flow rates of the components of the process gas are selected to etch the doped and undoped regions at substantially the same rate.
Claim 46
Independent Claim
80 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having a doped region and an undoped region; and (b) exposing the silicon-containing material on the substrate to an energized process gas comprising bromine, chlorine, fluorine, and oxygen, wherein the volumetric flow rates of the components of the process gas are selected to etch the doped and undoped regions at substantially the same rate.
Claim 47
Dependent Claim
38 words
A method according to claim 41 wherein the volumetric flow rates are selected so that the energized process gas cleans off etch residue deposits formed on internal surfaces of the process chamber during etching of the silicon-containing material.
Claim 48
Dependent Claim
23 words
A method according to claim 41 wherein the process gas comprises one or more of HBr, Br 2 , or CH 3 Br.
Claim 49
Dependent Claim
19 words
A method according to claim 41 wherein the process gas comprises one or more of Cl 2 or HCl.
Claim 50
Dependent Claim
15 words
A method according to claim 41 wherein the process gas comprises an inorganic fluorinated gas.
Claim 51
Dependent Claim
26 words
A method according to claim 45 wherein the inorganic fluorinated gas comprises one or more of NF 3 , CF 4 , or SF 6 .
Claim 52
Dependent Claim
21 words
A method according to claim 41 wherein the process gas comprises one or more of O 2 or He—O 2 .
Claim 53
Independent Claim
94 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having regions of different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas comprising a first halogen-containing gas and a second halogen-containing gas, wherein the volumetric flow ratio of the first halogen-containing gas and the second halogen-containing gas is selected so that the energized process gas etches the regions of different dopants or different dopant concentrations at substantially the same etching rate.
Claim 54
Independent Claim
94 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having regions of different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas comprising a first halogen-containing gas and a second halogen-containing gas, wherein the volumetric flow ratio of the first halogen-containing gas and the second halogen-containing gas is selected so that the energized process gas etches the regions of different dopants or different dopant concentrations at substantially the same etching rate.
Claim 55
Dependent Claim
18 words
A method according to claim 48 wherein the process gas comprises a chlorine-containing gas and a bromine-containing gas.
Claim 56
Dependent Claim
15 words
A method according to claim 48 wherein the process gas comprises an inorganic fluorinated gas.
Claim 57
Dependent Claim
14 words
A method according to claim 48 wherein the process gas comprises a fluorine-containing gas.
Claim 58
Dependent Claim
16 words
A method according to claim 48 wherein the energized process gas further comprises an oxygen-containing gas.
Claim 59
Dependent Claim
24 words
A method according to claim 48 wherein the conditions of the energized process gas are selected to clean internal surfaces of the process chamber.
Claim 60
Independent Claim
79 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having regions of different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas, wherein the energized process gas comprises a chlorine-containing gas and is introduced at a volumetric flow rate selected to etch the regions of different dopants or different dopant concentrations at substantially the same rate.
Claim 61
Independent Claim
79 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material having regions of different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas, wherein the energized process gas comprises a chlorine-containing gas and is introduced at a volumetric flow rate selected to etch the regions of different dopants or different dopant concentrations at substantially the same rate.
Claim 62
Dependent Claim
15 words
A method according to claim 54 wherein the energized process gas comprises a fluorine-containing gas.
Claim 63
Dependent Claim
16 words
A method according to claim 54 wherein the energized process gas comprises an inorganic fluorinated gas.
Claim 64
Dependent Claim
15 words
A method according to claim 54 wherein the energized process gas comprise a bromine-containing gas.
Claim 65
Dependent Claim
15 words
A method according to claim 54 wherein the energized process gas comprises an oxygen-containing gas.
Claim 66
Dependent Claim
23 words
A method according to claim 54 wherein the conditions of the energized process gas are selected to clean surfaces of the process chamber.
Claim 67
Independent Claim
95 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material comprising regions having different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas comprising a bromine-containing gas, a chlorine-containing gas, a fluorine-containing gas, and an oxygen-containing gas, wherein the volumetric flow ratio of the combined volumetric flow rates of the bromine-containing gas, chlorine-containing gas, and oxygen-containing gas, to the volumetric flow rate of the fluorine-containing gas is from about 4:1 to about 20:1.
Claim 68
Independent Claim
95 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material comprising regions having different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas comprising a bromine-containing gas, a chlorine-containing gas, a fluorine-containing gas, and an oxygen-containing gas, wherein the volumetric flow ratio of the combined volumetric flow rates of the bromine-containing gas, chlorine-containing gas, and oxygen-containing gas, to the volumetric flow rate of the fluorine-containing gas is from about 4:1 to about 20:1.
Claim 69
Dependent Claim
34 words
A method according to claim 60 wherein the energized process gas comprises HBr, Cl 2 , He—O 2 , and one or more of NF 3 , CF 4 , and SF 6 .
Claim 70
Dependent Claim
25 words
A method according to claim 60 wherein the energized process gas consists essentially of HBr, Cl 2 , He—O 2 , and CF 4 .
Claim 71
Independent Claim
78 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material comprising regions having different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas consisting essentially of HBr, Cl 2 , He—O 2 , and CF 4 , wherein the energized process gas etches the silicon-containing material comprising the regions having different dopants or different dopant concentrations.
Claim 72
Independent Claim
78 words
A method of etching a substrate, the method comprising the steps of: (a) placing the substrate in a process chamber, the substrate comprising a silicon-containing material comprising regions having different dopants or different dopant concentrations; and (b) exposing the substrate to an energized process gas consisting essentially of HBr, Cl 2 , He—O 2 , and CF 4 , wherein the energized process gas etches the silicon-containing material comprising the regions having different dopants or different dopant concentrations.
Claim 73
Independent Claim
43 words
A method according to claims 63 wherein the volumetric flow ratio of the combined volumetric flow rates of the HBr, Cl 2 , and He—O 2 , to the volumetric flow rate of the CF 4 is from about 4:1 to about 20:1.
Claim 74
Dependent Claim
42 words
A method according to claim 63 wherein the volumetric flow ratio of the combined volumetric flow rates of HBr, Cl 2 , and He-O 2 , to the volumetric flow rate of the CF 4 is from about 4:1 to about 20:1.
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