US5644153A
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Method for etching nitride features in integrated circuit construction
Assignee: Micron Technology Inc
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Filing: 1995-10-31
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Granted: 1997-07-01
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Expires: 2015-10-31
Abstract
Abstract A process for etching nitride layers in three steps is disclosed. The process comprises selecting a process chemistry of CF 4 to CHF 3 to set a predetermined critical dimension bias; conducting a primary etch of the process chemistry which will have a high etch rate; and conducting a secondary etch of ion bombardment having a lower etch rate and high selectivity to pad oxide. In selecting the process chemistry, selecting greater amounts of CHF 3 will result in higher polymer concentration on the etched sidewall. Varying the pressure and power can also be used to vary the polymer concentration. This in turn is used to select the desired critical dimension bias. The secondary etch uses a mixture of NF 3 and HBr and is performed at a high pressure and a low power to promote high nitride to oxide selectivity. The secondary etch removes the majority of polymer from the nitride sidewalls and cleans the polymer from the chamber walls, resulting in an anisotropic etch and a high number of wafers produced before cleaning is necessary.
Inventors
- 👤 David J. Keller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:37
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
96 words
An etch process for improving etch uniformity, comprising the steps of: (a) bombarding a layered substrate with an ionized carbon containing fluorine compound, said substrate having at least one nitride layer disposed thereon, said ionized carbon containing fluorine compound depositing a layer of a polymer on said nitride layer during said bombardment, said nitride layer being patterned; and (b) bombarding said layered substrate with an ionized hydrogen halide and ionized NF 3 , said ionized hydrogen halide and ionized NF 3 removing portions of said nitride layer, thereby creating substantially straight sidewalls in said nitride layer.
Claim 2
Dependent Claim
96 words
An etch process for improving etch uniformity, comprising the steps of: (a) bombarding a layered substrate with an ionized carbon containing fluorine compound, said substrate having at least one nitride layer disposed thereon, said ionized carbon containing fluorine compound depositing a layer of a polymer on said nitride layer during said bombardment, said nitride layer being patterned; and (b) bombarding said layered substrate with an ionized hydrogen halide and ionized NF 3 , said ionized hydrogen halide and ionized NF 3 removing portions of said nitride layer, thereby creating substantially straight sidewalls in said nitride layer.
Claim 3
Dependent Claim
54 words
The process of claim 1, wherein the step of bombarding a layered substrate with an ionized carbon containing fluorine compound etches the nitride layer at a rate faster than an etch rate of the nitride layer in said step of bombarding said layered substrate with an ionized hydrogen halide and ionized NF 3 .
Claim 4
Dependent Claim
19 words
The process according to claim 1, wherein said layered substrate comprises a layer of oxide subadjacent said nitride layer.
Claim 5
Dependent Claim
33 words
The process according to claim 3, wherein said step of bombarding said layered substrate with an ionized hydrogen halide and ionized NF 3 etches nitride to oxide in a ratio of about 8:1.
Claim 6
Dependent Claim
12 words
The process according to claim 1, wherein said hydrogen halide comprises HBr.
Claim 7
Dependent Claim
16 words
The process according to claim 1, wherein said ions are generated in a reactive ion etcher.
Claim 8
Dependent Claim
115 words
The process according to claim 6, wherein the reactive ion etcher is operated at a variable pressure and a variable power to vary the thickness of the deposited polymer on said nitride layer during said step of bombarding a layered substrate with an ionized carbon containing fluorine compound, and wherein the nitride layer has a critical dimension bias that is selectable by varying the thickness of the polymer layer deposited on the nitride layer, whereby by depositing a greater thickness of said polymer layer on said nitride layer results in a higher critical dimension bias, and depositing a lesser thickness of said polymer layer on said nitride layer results in a lower critical dimension bias.
Claim 9
Dependent Claim
69 words
The process according to claim 6, wherein said reactive ion etcher has sidewalls upon which is deposited a layer of said polymer during said step of bombarding a layered substrate with an ionized carbon containing fluorine compound, and wherein said step of bombarding said layered substrate with an ionized hydrogen halide and ionized NF 3 substantially removes the polymer layer deposited on the sidewalls of said reactive ion etcher.
Claim 10
Dependent Claim
54 words
The process according to claim 1, wherein the ionized carbon containing fluorine compound comprises a mixture of predetermined amounts of a first compound containing carbon and fluorine and a second compound containing carbon, hydrogen, and fluorine in concentrations chosen to select a predetermined amount of said polymer to be deposited on said nitride layer.
Claim 11
Dependent Claim
30 words
The process according to claim 9, wherein said first compound containing carbon and fluorine comprises CF 4 and the second compound containing carbon, hydrogen, and fluorine comprises CHF 3 .
Claim 12
Dependent Claim
34 words
The process according to claim 9, wherein said first compound containing carbon and fluorine comprises C 2 F 6 and the second compound containing carbon, hydrogen, and fluorine comprises CH 2 F 2 .
Claim 13
Dependent Claim
11 words
A semiconductor device formed according to the process of claim 1.
Claim 14
Dependent Claim
84 words
An etch process for improving etch uniformity, comprising the steps of: (a) exposing a semiconductor substrate to an ionized carbon containing fluorine compound, said substrate having at least one nitride layer disposed thereon, said carbon containing fluorine compound etching sidewalls in said nitride layer, said sidewalls being substantially normal to said substrate, said carbon containing fluorine compound depositing a layer of a polymer on said sidewalls in said nitride layer during said exposure; and (b) exposing said semiconductor substrate to an ionized hydrogen halide.
Claim 15
Dependent Claim
84 words
An etch process for improving etch uniformity, comprising the steps of: (a) exposing a semiconductor substrate to an ionized carbon containing fluorine compound, said substrate having at least one nitride layer disposed thereon, said carbon containing fluorine compound etching sidewalls in said nitride layer, said sidewalls being substantially normal to said substrate, said carbon containing fluorine compound depositing a layer of a polymer on said sidewalls in said nitride layer during said exposure; and (b) exposing said semiconductor substrate to an ionized hydrogen halide.
Claim 16
Dependent Claim
49 words
The process of claim 13, wherein the step of exposing a semiconductor substrate to an ionized carbon containing fluorine compound etches the nitride layer at a rate faster than an etch rate of the nitride layer in said step of exposing said semiconductor substrate to an ionized hydrogen halide.
Claim 17
Dependent Claim
82 words
The process according to claim 13, wherein said substrate is exposed to the carbon containing fluorine compound comprising a mixture of predetermined mounts of a first compound containing carbon and fluorine and a second compound containing carbon, hydrogen, and fluorine in concentrations chosen to select a predetermined amount of said polymer to be deposited on said nitride layer, wherein said first compound containing carbon and fluorine comprises CF 4 and the second compound containing carbon, hydrogen, and fluorine comprises CHF 3 .
Claim 18
Dependent Claim
22 words
The process according to claim 15, wherein said substrate is exposed to ionized NF 3 in combination with said ionized hydrogen halide.
Claim 19
Dependent Claim
35 words
The process according to claim 16, wherein said nitride layer is disposed on an oxide layer, said nitride layer being patterned with a photoresist layer, said ionized hydrogen halide enhancing selectivity to said oxide layer.
Claim 20
Dependent Claim
29 words
The process according to claim 17, wherein said step of exposing said semiconductor substrate to an ionized hydrogen halide etches nitride to oxide in a ratio of about 8:1.
Claim 21
Dependent Claim
32 words
The process according to claim 17, wherein said ions are generated in at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor.
Claim 22
Dependent Claim
145 words
The process according to claim 19, wherein said at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor is operated at a variable pressure and a variable power to vary the thickness of the deposited polymer layer on said sidewalls of said nitride layer during said step of exposing a semiconductor substrate to an ionized carbon containing fluorine compound, and wherein the nitride layer has a critical dimension bias that is selectable by varying the thickness of the polymer layer deposited on the sidewalls of the nitride layer, whereby by depositing a greater thickness of said polymer layer on said sidewalls of said nitride layer results in a higher critical dimension bias, and depositing a lesser thickness of said polymer layer on said sidewalls of said nitride layer results in a lower critical dimension bias.
Claim 23
Dependent Claim
101 words
The process according to claim 20, wherein each of said at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor has sidewalls upon which is deposited a layer of said polymer during said step of exposing said semiconductor substrate to an ionized carbon containing fluorine compound, and wherein said step of exposing said semiconductor substrate to an ionized hydrogen halide substantially removes the polymer layer deposited on the sidewalls of said at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor.
Claim 24
Dependent Claim
23 words
The process according to claim 20, wherein the said hydrogen halide ions are generated from at least one of HCl, HBr, and HI.
Claim 25
Dependent Claim
11 words
A semiconductor device formed according to the process of claim 13.
Claim 26
Independent Claim
190 words
A method to enhance etching of submicon features, said method comprising the steps of: (a) layering a semiconductor substrate with at least one layer of oxide and at least one layer of nitride patterned with a photoresist layer; (b) exposing said semiconductor substrate to an ionized carbon containing fluorine compound comprising a mixture of predetermined amounts of a first compound containing carbon and fluorine and a second compound containing carbon, hydrogen, and fluorine in concentrations chosen to select a predetermined amount of said polymer to be deposited on said nitride layer, wherein said first compound containing carbon and fluorine comprises CF 4 and the second compound containing carbon, hydrogen, and fluorine comprises CHF 3 , said substrate having at least one nitride layer disposed thereon, said carbon containing fluorine compound etching sidewalls in said nitride layer, said sidewalls being substantially normal to said substrate, said ionized carbon containing fluorine compound depositing a layer of a polymer on said sidewalls in said nitride layer during said exposure; and (c) exposing said semiconductor substrate to an ionized NF 3 in combination with an ionized HBr to enhance selectivity to said oxide layer.
Claim 27
Independent Claim
190 words
A method to enhance etching of submicon features, said method comprising the steps of: (a) layering a semiconductor substrate with at least one layer of oxide and at least one layer of nitride patterned with a photoresist layer; (b) exposing said semiconductor substrate to an ionized carbon containing fluorine compound comprising a mixture of predetermined amounts of a first compound containing carbon and fluorine and a second compound containing carbon, hydrogen, and fluorine in concentrations chosen to select a predetermined amount of said polymer to be deposited on said nitride layer, wherein said first compound containing carbon and fluorine comprises CF 4 and the second compound containing carbon, hydrogen, and fluorine comprises CHF 3 , said substrate having at least one nitride layer disposed thereon, said carbon containing fluorine compound etching sidewalls in said nitride layer, said sidewalls being substantially normal to said substrate, said ionized carbon containing fluorine compound depositing a layer of a polymer on said sidewalls in said nitride layer during said exposure; and (c) exposing said semiconductor substrate to an ionized NF 3 in combination with an ionized HBr to enhance selectivity to said oxide layer.
Claim 28
Dependent Claim
35 words
The process according to claim 24, wherein said step of exposing said semiconductor substrate to an ionized NF 3 in combination with an ionized HBr etches nitride to oxide in a ratio of about 8:1.
Claim 29
Dependent Claim
32 words
The process according to claim 24, wherein said ions are generated in at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor.
Claim 30
Dependent Claim
145 words
The process according to claim 26, wherein said at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor is operated at a variable pressure and a variable power to vary the thickness of the deposited polymer layer on said sidewalls of said nitride layer during said step of exposing a semiconductor substrate to an ionized carbon containing fluorine compound, and wherein the nitride layer has a critical dimension bias that is selectable by varying the thickness of the polymer layer deposited on the sidewalls of the nitride layer, whereby by depositing a greater thickness of said polymer layer on said sidewalls of said nitride layer results in a higher critical dimension bias, and depositing a lesser thickness of said polymer layer on said sidewalls of said nitride layer results in a lower critical dimension bias.
Claim 31
Dependent Claim
107 words
The process according to claim 26, wherein each of said at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor has sidewalls upon which is deposited a layer of said polymer during said step of exposing said semiconductor substrate to an ionized carbon containing fluorine compound, and wherein said step of exposing said semiconductor substrate to an ionized NF 3 in combination with an ionized HBr substantially removes the polymer layer deposited on the sidewalls of said at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor.
Claim 32
Dependent Claim
11 words
A semiconductor device formed according to the process of claim 24.
References Cited (Backward Citations)
US5326431A
Cited
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