US5256245A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Use of a clean up step to form more vertical profiles of polycrystalline silicon sidewalls during the manufacture of a semiconductor device
Assignee: Micron Technology Inc
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Filing: 1992-08-11
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Granted: 1993-10-26
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Expires: 2012-08-11
Abstract
Abstract Disclosed is a process step performed during a wafer etch which allows for the formation of more vertical sidewalls. During a conventional etch step of a material such as oxide, oxygen is released into the etch chamber, which is known to adversely affect the vertical profile of the sidewalls. The oxygen is known to combine with silicon and HBr, which are present as gasses within the etch chamber during the subsequent poly etch, to deposit on the poly sidewalls. For this reason subsequent etches are conventionally performed in a separate etch chamber. The disclosed step introduces an oxygen-scavenging gas into the etch chamber prior to the subsequent etch of the polycrystalline silicon. The oxygen-scavenging gas combines with the liberated oxygen with the application of plasma energy to produce an inert volatile gas which can be pumped from the etch chamber and therefore not adversely affect subsequent etches. Claimed oxygen-scavenging gasses include C 2 F 6 , CF 4 , CHF 3 , and BCl 3 .
Inventors
- 👤 David J. Keller
- 👤 Guy T. Blalock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 11:01
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
99 words
A process for etching a structure in a chamber, said structure having a layer of polycrystalline silicon and a layer of an oxide, said process comprising the steps of: a) etching said oxide layer with a plasma etch, thereby liberating oxygen into said chamber; b) releasing an oxygen-scavenging gas into said chamber; c) releasing an oxygen-scavenging gas to chemically react said oxygen-scavenging gas with said liberated oxygen; d) etching said polycrystalline silicon with a plasma etch, whereby said chemical reaction substantially removes said liberated oxygen from said chamber and allows for a substantially vertical etch of aid polycrystalline silicon.
Claim 2
Dependent Claim
99 words
A process for etching a structure in a chamber, said structure having a layer of polycrystalline silicon and a layer of an oxide, said process comprising the steps of: a) etching said oxide layer with a plasma etch, thereby liberating oxygen into said chamber; b) releasing an oxygen-scavenging gas into said chamber; c) releasing an oxygen-scavenging gas to chemically react said oxygen-scavenging gas with said liberated oxygen; d) etching said polycrystalline silicon with a plasma etch, whereby said chemical reaction substantially removes said liberated oxygen from said chamber and allows for a substantially vertical etch of aid polycrystalline silicon.
Claim 3
Dependent Claim
13 words
The process of claim 1, wherein said oxygen-scavenging gas is a carbonaceous gas.
Claim 4
Dependent Claim
25 words
The process of claim 2, wherein said oxygen-scavenging gas is present in said chamber at a flow of between about 10 sccm and 75 sccm.
Claim 5
Dependent Claim
30 words
The process of claim 2, wherein said oxygen-scavenging gas comprises a compound selected from the group consisting of C 2 F 6 , CF 4 , and CHF 3 .
Claim 6
Dependent Claim
13 words
The process of claim 1, wherein said oxygen-scavenging gas comprises BCl 3 .
Claim 7
Dependent Claim
15 words
The process of claim 1, wherein said polycrystalline silicon etch comprises the use of chlorine.
Claim 8
Dependent Claim
33 words
The process of claim 1 wherein the plasma power density of the etch in step d) is selected to provide a finished structure having a vertical profile at or near 87°-90° from horizontal.
Claim 9
Dependent Claim
170 words
A process to anisotropically etch a wafer on which a dielectric overlies a layer of silicide and silicon formed over a substrate in an etch chamber, the process comprising the steps of: a) providing a parallel plate plasma etch reactor having a first electrode whereupon said substrate is mounted and a second electrode that is non-erodible by plasma; b) providing a first atmosphere within said reactor, said atmosphere comprising CHF 3 and CF 4 ; c) exposing said dielectric layer to a plasma wherein oxygen is liberated into said chamber; d) providing, within said reactor, an atmosphere comprising He, O 2 and SF 6 ; e) etching said silicide in said reactor by exposing the wafer to a plasma; f) releasiing an oxygen-scavenging gas into said etch chamber; g) exciting said oxygen-scavenging gas to chemically react said oxygen-scavenging gas with said liberated oxygen; h) providing, within said reactor, an atmosphere comprising HBr and Cl 2 ; i) etching said silicon in said reactor by exposing the wafer to a plasma.
Claim 10
Dependent Claim
170 words
A process to anisotropically etch a wafer on which a dielectric overlies a layer of silicide and silicon formed over a substrate in an etch chamber, the process comprising the steps of: a) providing a parallel plate plasma etch reactor having a first electrode whereupon said substrate is mounted and a second electrode that is non-erodible by plasma; b) providing a first atmosphere within said reactor, said atmosphere comprising CHF 3 and CF 4 ; c) exposing said dielectric layer to a plasma wherein oxygen is liberated into said chamber; d) providing, within said reactor, an atmosphere comprising He, O 2 and SF 6 ; e) etching said silicide in said reactor by exposing the wafer to a plasma; f) releasiing an oxygen-scavenging gas into said etch chamber; g) exciting said oxygen-scavenging gas to chemically react said oxygen-scavenging gas with said liberated oxygen; h) providing, within said reactor, an atmosphere comprising HBr and Cl 2 ; i) etching said silicon in said reactor by exposing the wafer to a plasma.
Claim 11
Dependent Claim
13 words
The process of claim 8, wherein said oxygen-scavenging gas is a carbonaceous gas.
Claim 12
Dependent Claim
25 words
The process of claim 9, wherein said oxygen-scavenging gas is present in said chamber at a flow of between about 10 sccm and 75 sccm.
Claim 13
Dependent Claim
31 words
The process of claim 9, wherein said oxygen scavenging gas comprises a compound selected from the group consisting of C 2 F 6 , CF 4 , and CHF 3 .
Claim 14
Dependent Claim
13 words
The process of claim 8, wherein said oxygen-scavenging gas comprises BCl 3 .
Claim 15
Dependent Claim
33 words
The process of claim 8, wherein the plasma power density of the etch in step h) is selected to provide a finished structure having a vertical profile at or near 87°-90° from horizontal.
Claim 16
Independent Claim
146 words
A method to anisotropically etch a wafer on which a dielectric overlies a layer of silicide and silicon deposited over a substrate, comprising the steps of: a) providing a parallel plate plasma etch reactor having a first electrode whereupon the substrate is mounted and a second electrode that is non-erodible by plasma; b) providing a first atmosphere within said reactor, said atmosphere comprising CHF 3 and CF 4 ; c) exposing said dielectric layer to a plasma thereby liberating oxygen; d) etching said silicide and said silicon by etching in a second atmosphere, said second atmosphere comprising He, O 2 , and SF 6 ; e) releasing an oxygen-scavenging gas into said etch chamber; f) exciting said oxygen-scavenging gas to chemically react said oxygen-scavenging gas with said liberated oxygen; g) etching said silicon in an atmosphere of 10 SCCM HBr and 50 SCCM Cl 2 .
Claim 17
Independent Claim
146 words
A method to anisotropically etch a wafer on which a dielectric overlies a layer of silicide and silicon deposited over a substrate, comprising the steps of: a) providing a parallel plate plasma etch reactor having a first electrode whereupon the substrate is mounted and a second electrode that is non-erodible by plasma; b) providing a first atmosphere within said reactor, said atmosphere comprising CHF 3 and CF 4 ; c) exposing said dielectric layer to a plasma thereby liberating oxygen; d) etching said silicide and said silicon by etching in a second atmosphere, said second atmosphere comprising He, O 2 , and SF 6 ; e) releasing an oxygen-scavenging gas into said etch chamber; f) exciting said oxygen-scavenging gas to chemically react said oxygen-scavenging gas with said liberated oxygen; g) etching said silicon in an atmosphere of 10 SCCM HBr and 50 SCCM Cl 2 .
Claim 18
Dependent Claim
13 words
The process of claim 14, wherein said oxygen-scavenging gas is a carbonaceous gas.
Claim 19
Dependent Claim
25 words
The process of claim 15, wherein said oxygen-scavenging gas is present in said chamber at a flow of between about 10 sccm and 75 sccm.
Claim 20
Dependent Claim
30 words
The process of claim 15, wherein said oxygen-scavenging gas comprises a compound selected from the group consisting of C 2 F 6 , CF 4 , and CHF 3 .
Claim 21
Dependent Claim
13 words
The process of claim 14, wherein said oxygen-scavenging gas comprises BCl 3 .
Claim 22
Dependent Claim
33 words
The process of claim 15, wherein the plasma power density of the etch in the second atmosphere is selected to provide a finished structure having a vertical profile at or near 87°-90°from horizontal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-10-25 | 1997-04-26 | 1997-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-25 | 2001-04-26 | 2001-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-25 | 2005-04-26 | 2005-10-26 | $7700.00 | Window Closed / Lapsed |