US5116460A
Expired / Lapsed
US
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Method for selectively etching a feature
Assignee: NXP USA Inc
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Filing: 1991-04-12
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Granted: 1992-05-26
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Expires: 2011-04-12
Abstract
Abstract A method is provided for selectively etching materials on a semiconductor wafer (10, 30) that have similar etch rates. The semiconductor wafer (10, 30) is provided with at least a first layer. An etch mask is provided on the first layer. The layer with the etch mask (13) is partially etched to a predetermined point. A polymer film (21, 38) is deposited on the partially etched layer. The polymer film (21, 38) is etched in an anisotropic manner creating open or clear areas (14, 34) in the horizontal polymer film, while leaving polymer coating (22, 37) on vertical walls (12, 36). The open areas (14, 34) are chemically etched, while the remaining polymer coating (22, 37) on the vertical walls (12, 36) protects the vertical walls (12, 36) from being chemically etched. This method also protects the top surface of the semiconductor wafer.
Inventors
- 👤 Yefim Bukhman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:57
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/73; H10P14/00; H10P14/60; H10P14/68; H10P14/683; H10P50/69; H10P50/691; H10P50/693; H10P50/695; H10P50/71
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
127 words
A method for selectively etching a feature in layers having similar anisotropic etch characteristics on a semiconductor wafer comprising: providing a semiconductor wafer with a first and a second layer; providing an etch mask on the second layer, which defines the second layer into open areas and covered areas that are protected by the etch mask; etching the open areas of the second layer partially until a predetermined amount of the open areas is removed; depositing a polymer film over the partially etched open areas and the covered areas; anisotropic etching of the polymer film, leaving walls of the etched open areas protected by the polymer film while the other areas are etched clear of polymer; and chemically etching the open areas that are clear of polymer.
Claim 2
Independent Claim
127 words
A method for selectively etching a feature in layers having similar anisotropic etch characteristics on a semiconductor wafer comprising: providing a semiconductor wafer with a first and a second layer; providing an etch mask on the second layer, which defines the second layer into open areas and covered areas that are protected by the etch mask; etching the open areas of the second layer partially until a predetermined amount of the open areas is removed; depositing a polymer film over the partially etched open areas and the covered areas; anisotropic etching of the polymer film, leaving walls of the etched open areas protected by the polymer film while the other areas are etched clear of polymer; and chemically etching the open areas that are clear of polymer.
Claim 3
Dependent Claim
25 words
The method of claim 1 further comprising using a dry chemical means for chemically etching the open areas that are clear of the polymer film.
Claim 4
Dependent Claim
25 words
The method of claim 1 further comprising using a wet chemical means for chemically etching the open areas that are clear of the polymer film.
Claim 5
Dependent Claim
13 words
The method of claim 1 further comprising depositing the polymer film in situ.
Claim 6
Dependent Claim
34 words
The method of claim 1 wherein etching of the second layer, depositing of the polymer film, anisotropic etching of the polymer film, and chemically etching of the open areas is accomplished in one system.
Claim 7
Independent Claim
138 words
A method for selectively etching a first layer over a semiconductor substrate comprising: providing the semiconductor substrate with a first layer that has at least one etch mask defined on the first layer; etching the first layer in an anisotropic manner until a predetermined depth in the first layer is reached, thereby producing at least one wall; covering the etch mask, the first layer that has been partially etched to the predetermined depth, and the at least one wall with polymer film; anisotropic etching of the polymer film so that areas are formed that are cleared of the polymer film, exposing the partially etched first layer and leaving the polymer film on the at least one sidewall; and etching the first layer that has been partially etched with an isotropic chemistry that is selective to the semiconductor substrate.
Claim 8
Independent Claim
138 words
A method for selectively etching a first layer over a semiconductor substrate comprising: providing the semiconductor substrate with a first layer that has at least one etch mask defined on the first layer; etching the first layer in an anisotropic manner until a predetermined depth in the first layer is reached, thereby producing at least one wall; covering the etch mask, the first layer that has been partially etched to the predetermined depth, and the at least one wall with polymer film; anisotropic etching of the polymer film so that areas are formed that are cleared of the polymer film, exposing the partially etched first layer and leaving the polymer film on the at least one sidewall; and etching the first layer that has been partially etched with an isotropic chemistry that is selective to the semiconductor substrate.
Claim 9
Dependent Claim
21 words
The method of claim 6 further comprising having the semiconductor substrate be silicon and having the first layer be silicon dioxide.
Claim 10
Dependent Claim
13 words
The method of claim 6 further comprising using photoresist for the etch mask.
Claim 11
Dependent Claim
25 words
The method of claim 6 further comprising using either a wet or dry isotropic chemistry for etching the first layer that has been partially etched.
Claim 12
Dependent Claim
34 words
The method of claim 6 wherein etching of the first layer, covering with the polymer film, anisotropic etching of the polymer film, and chemical etching of the clear areas is accomplished in one system.
Claim 13
Dependent Claim
18 words
The method of claim 6 further comprising removal of remaining polymer film by a wet or dry means.
Claim 14
Independent Claim
127 words
A method for making a sidewall spacer on a semiconductor wafer comprising: providing a feature with at least one sidewall on a semiconductor wafer; providing a first conformal layer on the feature and on the sidewall; etching the first conformal layer in an anisotropic manner until a predetermined amount of the first layer is removed; depositing a polymer film on the first etched layer and on the sidewall; etching the polymer film in an anisotropic manner, thereby removing portions of the polymer film, which creates open areas and leaves the polymer film on the sidewall of the etched first layer; and etching open areas of exposed etched first layer by chemical means until the exposed first layer is completely etched away and leaving the polymer coated sidewall.
Claim 15
Independent Claim
127 words
A method for making a sidewall spacer on a semiconductor wafer comprising: providing a feature with at least one sidewall on a semiconductor wafer; providing a first conformal layer on the feature and on the sidewall; etching the first conformal layer in an anisotropic manner until a predetermined amount of the first layer is removed; depositing a polymer film on the first etched layer and on the sidewall; etching the polymer film in an anisotropic manner, thereby removing portions of the polymer film, which creates open areas and leaves the polymer film on the sidewall of the etched first layer; and etching open areas of exposed etched first layer by chemical means until the exposed first layer is completely etched away and leaving the polymer coated sidewall.
Claim 16
Independent Claim
112 words
A method of selectively etching a semiconductor wafer comprising: providing a feature with at least one sidewall on a semiconductor wafer; providing a first conformal layer that covers the feature and the sidewall forming a second sidewall; providing a second conformal layer that is deposited on the first layer; etching the second layer in anisotropic manner until a pre-determined amount of the second layer is removed; depositing a polymer coating on the second etched layer; etching in an anisotropic manner the polymer coating, thereby removing the polymer coating in open areas and leaving the polymer coating on the sidewall; and etching the second layer until completion and leaving the polymer coated sidewalls.
Claim 17
Independent Claim
112 words
A method of selectively etching a semiconductor wafer comprising: providing a feature with at least one sidewall on a semiconductor wafer; providing a first conformal layer that covers the feature and the sidewall forming a second sidewall; providing a second conformal layer that is deposited on the first layer; etching the second layer in anisotropic manner until a pre-determined amount of the second layer is removed; depositing a polymer coating on the second etched layer; etching in an anisotropic manner the polymer coating, thereby removing the polymer coating in open areas and leaving the polymer coating on the sidewall; and etching the second layer until completion and leaving the polymer coated sidewalls.
Claim 18
Dependent Claim
45 words
The method of claim 13 wherein the first and second conformal layers are a conformal oxide layer and a conformal nitride layer respectively and that are adjusted to a thickness between 50 angstroms to 500 angstroms and to between 1,500 angstroms to 3,000 angstroms respectively.
Claim 19
Dependent Claim
22 words
The method of claim 14 further comprising providing a conformal oxide layer that is substantially adjusted to a thickness of 100 angstroms
Claim 20
Dependent Claim
22 words
The method of claim 14 further comprising providing a conformal nitride layer that is substantially adjusted to a thickness of 3,000 angstroms.
Claim 21
Dependent Claim
18 words
The method of claim 13 wherein the polymer coating has a thickness between 500 angstroms to 1,000 angstroms.
Claim 22
Dependent Claim
18 words
The method of claim 17 wherein the polymer coating is substantially adjusted to a thickness of 750 angstroms.
Claim 23
Independent Claim
103 words
A method of selectively etching at least a first layer on a substrate comprising: etching selective areas of the first layer with a high energy plasma etch to form at least one side wall; stopping short of etching through the first layer; covering the first layer and the at least one side wall with a polymer film; anisotropically etching all horizontal surfaces of the polymer film to leave the polymer film of the at least one sidewall; isotropically etching the remainder of the first layer not covered by the polymer film; and removing the polymer film, thereby exposing the at least one sidewall.
Claim 24
Independent Claim
103 words
A method of selectively etching at least a first layer on a substrate comprising: etching selective areas of the first layer with a high energy plasma etch to form at least one side wall; stopping short of etching through the first layer; covering the first layer and the at least one side wall with a polymer film; anisotropically etching all horizontal surfaces of the polymer film to leave the polymer film of the at least one sidewall; isotropically etching the remainder of the first layer not covered by the polymer film; and removing the polymer film, thereby exposing the at least one sidewall.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-05-26 | 1995-11-25 | 1996-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-26 | 1999-11-25 | 2000-05-26 | $3760.00 | Window Closed / Lapsed |
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