US5869401A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma-enhanced flash process
Assignee: Lam Research Corp
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Filing: 1996-12-20
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Granted: 1999-02-09
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Expires: 2016-12-20
Abstract
Abstract A method in a plasma processing chamber, the chamber being employed for processing a substrate, for removing corrosive species from the plasma processing chamber after the substrate is processed. The method includes introducing a flash source gas comprising an oxidizing agent such as oxygen into the plasma processing chamber. The method further includes performing, a flash process, including striking a plasma in the plasma processing chamber with the flash source gas, thereby permitting oxygen species in the plasma to reduce a concentration of the corrosive species in the plasma processing chamber.
Inventors
- 👤 Paul E. Brunemeier
- 👤 Thomas Miu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:14
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/32449; H01J37/32798; H01J37/32853; H01J37/32862
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
180 words
In a plasma processing chamber, said plasma processing chamber being employed for processing a substrate, a method for removing corrosive species from surfaces within said plasma processing chamber after said substrate is processed, comprising: extinguishing a process plasma employed to process said substrate; thereafter, purging said plasma processing chamber with a flash source gas to remove at least some of said corrosive species from within said plasma processing chamber while said substrate is disposed on an electrostatic chuck in said plasma processing chamber, said flash source gas comprising an oxidizing agent, said purging being performed while said substrate is dechucked from said electrostatic chuck and said process plasma is extinguished; and thereafter, performing a flash process including striking a plasma in said plasma processing chamber with said flash source gas, thereby permitting oxygen species in said plasma to reduce a concentration of said corrosive species on said surfaces in said plasma processing chamber, wherein conditions in said plasma processing chamber, including a pressure within said plasma processing chamber, are stabilized by said purging prior to said performing said flash process.
Claim 2
Dependent Claim
180 words
In a plasma processing chamber, said plasma processing chamber being employed for processing a substrate, a method for removing corrosive species from surfaces within said plasma processing chamber after said substrate is processed, comprising: extinguishing a process plasma employed to process said substrate; thereafter, purging said plasma processing chamber with a flash source gas to remove at least some of said corrosive species from within said plasma processing chamber while said substrate is disposed on an electrostatic chuck in said plasma processing chamber, said flash source gas comprising an oxidizing agent, said purging being performed while said substrate is dechucked from said electrostatic chuck and said process plasma is extinguished; and thereafter, performing a flash process including striking a plasma in said plasma processing chamber with said flash source gas, thereby permitting oxygen species in said plasma to reduce a concentration of said corrosive species on said surfaces in said plasma processing chamber, wherein conditions in said plasma processing chamber, including a pressure within said plasma processing chamber, are stabilized by said purging prior to said performing said flash process.
Claim 3
Dependent Claim
33 words
The method of claim 1 wherein said electrostratic chuck is couple to a bias power source, said bias power source being off at least during a portion of said performing said flash process.
Claim 4
Dependent Claim
11 words
The method of claim 1 wherein said oxidizing agent comprises oxygen.
Claim 5
Dependent Claim
25 words
The method of claim 3 wherein said performing said flash process is performed at a chamber pressure of about 0.01 milliTorr to about 1000 milliTorr.
Claim 6
Dependent Claim
25 words
The method of claim 4 wherein said performing said flash process is performed at a chamber pressure of about 1 milliTorr to about 100 milliTorr.
Claim 7
Dependent Claim
21 words
The method of claim 3 wherein said performing said flash process is performed at a chamber pressure of about 15 milliTorr.
Claim 8
Dependent Claim
35 words
The method of claim 3 wherein said plasma is struck with an inductive coil, said inductive coil being supplied with about 50 Watts of power to about 1000 Watts of power during said flash process.
Claim 9
Dependent Claim
29 words
The method of claim 3 wherein said plasma is struck with an inductive coil, said inductive coil being supplied with about 300 Watts of power during said flash process.
Claim 10
Dependent Claim
33 words
The method of claim 6 wherein said performing said flash process is performed at an oxygen flow of about 1 standard cubic centimeter per minute to about 1000 standard cubic centimeter per minute.
Claim 11
Dependent Claim
25 words
The method of claim 6 wherein said performing said flash process is performed at an oxygen flow of about 100 standard cubic centimeter per minute.
Claim 12
Dependent Claim
17 words
The method of claim 6 wherein said corrosive species comprise one of chlorine species and bromine species.
Claim 13
Dependent Claim
54 words
The method of claim 6 wherein said performing said flash process is terminated after a predefined time period, said predefined time period being longer than a time required to reach a transition point in a plot of an optical excitation line of said corrosive species and an optical excitation line of said oxygen species.
Claim 14
Dependent Claim
26 words
The method of claim 3 wherein at least a portion of said corrosive species represents corrosive species adsorbed by interior surfaces of said plasma processing chamber.
Claim 15
Independent Claim
179 words
A method for removing adsorbed corrosive species from a surface of a substrate, said substrate having been processed in accordance with conventional plasma processing steps in a plasma processing chamber, comprising: extinguishing a process plasma employed to process said substrate; thereafter, purging said plasma processing chamber with a flash source gas to remove at least some of said corrosive species from said surface of said substrate while said substrate is disposed on an electrostatic chuck in said plasma processing chamber, said flash source gas comprising an oxidizing agent, said purging being performed while said substrate is dechucked from said electrostatic chuck and said process plasma is extinguished; and thereafter striking a plasma with said flash source gas in said plasma processing chamber, thereby forming oxygen species above said substrate to permit said oxygen species in said plasma to reduce a concentration of said adsorbed corrosive species from said surface of said substrate, wherein conditions in said plasma processing chamber, including a pressure within said plasma processing chamber, are stabilized by said purging prior to said performing said flash process.
Claim 16
Independent Claim
179 words
A method for removing adsorbed corrosive species from a surface of a substrate, said substrate having been processed in accordance with conventional plasma processing steps in a plasma processing chamber, comprising: extinguishing a process plasma employed to process said substrate; thereafter, purging said plasma processing chamber with a flash source gas to remove at least some of said corrosive species from said surface of said substrate while said substrate is disposed on an electrostatic chuck in said plasma processing chamber, said flash source gas comprising an oxidizing agent, said purging being performed while said substrate is dechucked from said electrostatic chuck and said process plasma is extinguished; and thereafter striking a plasma with said flash source gas in said plasma processing chamber, thereby forming oxygen species above said substrate to permit said oxygen species in said plasma to reduce a concentration of said adsorbed corrosive species from said surface of said substrate, wherein conditions in said plasma processing chamber, including a pressure within said plasma processing chamber, are stabilized by said purging prior to said performing said flash process.
Claim 17
Dependent Claim
30 words
The method of claim 14 wherein said striking said plasma is performed in a plasma processing chamber different from said plasma processing chamber employed for said conventional plasma processing steps.
Claim 18
Dependent Claim
29 words
The method of claim 14 wherein said striking said plasma is performed in said plasma processing chamber, said plasma chamber being employed earlier for said conventional plasma processing steps.
Claim 19
Dependent Claim
11 words
The method of claim 14 wherein said oxidizing agent comprises oxygen.
Claim 20
Dependent Claim
18 words
The method of claim 17 wherein said adsorbed corrosive species represent one of chlorine species and bromine species.
Claim 21
Dependent Claim
27 words
The method of claim 18 wherein said striking said plasma is performed while a bias power to a chuck supporting said substrate is at about 0 W.
Claim 22
Independent Claim
172 words
A method for facilitating the removal of polymer deposition above a surface of a substrate, said substrate having been processed in accordance with conventional plasma processing steps in a plasma processing chamber, comprising: extinguishing a process plasma employed to process said substrate; thereafter, purging said plasma processing chamber with a flash source gas to remove at least some of said polymer deposition from said surface of said substrate while said substrate is disposed on an electrostatic chuck in said plasma processing chamber, said flash source gas comprising an oxidizing agent, said purging being performed while said substrate is dechucked from said electrostatic chuck and said process plasma is extinguished; and thereafter striking a plasma with said flash source gas in said plasma processing chamber, thereby forming oxygen species above said substrate to permit said oxygen species in said plasma to interact with said polymer deposition, wherein conditions in said plasma processing chamber, including a pressure within said plasma processing chamber, are stabilized by said purging prior to said performing said flash process.
Claim 23
Independent Claim
172 words
A method for facilitating the removal of polymer deposition above a surface of a substrate, said substrate having been processed in accordance with conventional plasma processing steps in a plasma processing chamber, comprising: extinguishing a process plasma employed to process said substrate; thereafter, purging said plasma processing chamber with a flash source gas to remove at least some of said polymer deposition from said surface of said substrate while said substrate is disposed on an electrostatic chuck in said plasma processing chamber, said flash source gas comprising an oxidizing agent, said purging being performed while said substrate is dechucked from said electrostatic chuck and said process plasma is extinguished; and thereafter striking a plasma with said flash source gas in said plasma processing chamber, thereby forming oxygen species above said substrate to permit said oxygen species in said plasma to interact with said polymer deposition, wherein conditions in said plasma processing chamber, including a pressure within said plasma processing chamber, are stabilized by said purging prior to said performing said flash process.
Claim 24
Dependent Claim
30 words
The method of claim 20 wherein said striking said plasma is performed in a plasma processing chamber different from said plasma processing chamber employed for said conventional plasma processing steps.
Claim 25
Dependent Claim
29 words
The method of claim 20 wherein said striking said plasma is performed in said plasma processing chamber, said plasma chamber being employed earlier for said conventional plasma processing steps.
Claim 26
Dependent Claim
27 words
The method of claim 20 wherein said striking said plasma is performed while a bias power to a chuck supporting said substrate is at about 0 W.
References Cited (Backward Citations)
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