US5879575A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self-cleaning plasma processing reactor
Assignee: Applied Materials Inc
•
Filing: 1997-11-21
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Granted: 1999-03-09
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Expires: 2017-11-21
Abstract
Abstract A method for simultaneously processing a workpiece using a plasma and cleaning the reactor in which processing takes place is disclosed. The plasma generated in the reactor performs simultaneous workpiece processing and reactor cleaning. Reactor cleaning may be accomplished by directing a portion of the plasma at an inner surface of the reactor such as by a power source auxiliary to that used to produce the processing plasma. An apparatus for carrying out a method for simultaneously processing a workpiece with a plasma and cleaning a reactor of etch residues generated from processing is disclosed.
Inventors
- 👤 Avi Tepman
- 👤 Yan Ye
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32862; H01J37/32009; H01J37/32082; H01J37/321; Y; Y10; Y10S; Y10S156/00; Y10S156/916; Y10S438/00; Y10S438/905; Y10S977/00; Y10S977/70
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
120 words
A method of processing a workpiece in a reactor vessel and simultaneously cleaning an inner surface of the reactor vessel, the inner surface of the reactor vessel having an area, the method comprising the steps of: introducing into the reactor vessel at least one gas capable of sustaining a plasma; producing and maintaining a plasma in the reactor vessel; using the plasma to carry out processing of the workpiece; and directing a portion of the plasma at a section of the inner surface of the reactor vessel, the section having an area that is smaller than the area of the inner surface of the reactor vessel and having a time-varying spatial position on the inner surface of the reactor vessel.
Claim 2
Independent Claim
120 words
A method of processing a workpiece in a reactor vessel and simultaneously cleaning an inner surface of the reactor vessel, the inner surface of the reactor vessel having an area, the method comprising the steps of: introducing into the reactor vessel at least one gas capable of sustaining a plasma; producing and maintaining a plasma in the reactor vessel; using the plasma to carry out processing of the workpiece; and directing a portion of the plasma at a section of the inner surface of the reactor vessel, the section having an area that is smaller than the area of the inner surface of the reactor vessel and having a time-varying spatial position on the inner surface of the reactor vessel.
Claim 3
Dependent Claim
43 words
A method as in claim 1, and wherein the step of directing a portion of the plasma comprises: providing a conductive strip outside of the reactor vessel, the conductive strip having the smaller area; and rotating the conductive strip around the reactor vessel.
Claim 4
Independent Claim
149 words
A method of processing a workpiece in a reactor vessel and simultaneously cleaning an inner surface of the reactor vessel having an area, the method comprising the steps of: introducing into the reactor vessel at least one gas capable of sustaining a plasma; utilizing an RF coil disposed outside of the reactor vessel to supply power simultaneously having both an inductive component and a capacitive component, the inductive component producing and sustaining a plasma in the reactor vessel for processing the workpiece; and cooperatively utilizing the RF coil and a conducting member disposed outside the reactor vessel such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning a section of the inner surface of the reactor vessel such that the cleaning of the section occurs simultaneously with the processing of the workpiece.
Claim 5
Independent Claim
149 words
A method of processing a workpiece in a reactor vessel and simultaneously cleaning an inner surface of the reactor vessel having an area, the method comprising the steps of: introducing into the reactor vessel at least one gas capable of sustaining a plasma; utilizing an RF coil disposed outside of the reactor vessel to supply power simultaneously having both an inductive component and a capacitive component, the inductive component producing and sustaining a plasma in the reactor vessel for processing the workpiece; and cooperatively utilizing the RF coil and a conducting member disposed outside the reactor vessel such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning a section of the inner surface of the reactor vessel such that the cleaning of the section occurs simultaneously with the processing of the workpiece.
Claim 6
Dependent Claim
33 words
A method as in claim 3 and wherein the section of the inner surface of the reactor vessel has an area smaller than the area of the inner surface of the reactor vessel.
Claim 7
Dependent Claim
23 words
A method as in claim 4 and wherein the section has a time-varying spatial position on the inner surface of the reactor vessel.
Claim 8
Independent Claim
88 words
An apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; means for producing and sustaining a plasma in the reactor vessel for processing the workpiece; and means for directing, simultaneously with the processing of the workpiece, a portion of the plasma at the inner surface of the reactor vessel for cleaning the inner surface of the reactor vessel, whereby the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece.
Claim 9
Independent Claim
88 words
An apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; means for producing and sustaining a plasma in the reactor vessel for processing the workpiece; and means for directing, simultaneously with the processing of the workpiece, a portion of the plasma at the inner surface of the reactor vessel for cleaning the inner surface of the reactor vessel, whereby the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece.
Claim 10
Dependent Claim
19 words
The apparatus according to claim 6, wherein the means for producing and sustaining the plasma is an inductive means.
Claim 11
Dependent Claim
17 words
The apparatus according to claim 7, wherein the RF coil is arranged outside of the reactor vessel.
Claim 12
Independent Claim
118 words
An apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece, the inner surface of the reactor vessel having an area; means for producing and sustaining a plasma in the reactor vessel for processing the workpiece; and means for directing a portion of the plasma at the inner surface of the reactor vessel; and wherein the portion of the plasma is directed at a section of the inner surface of the reactor vessel, and wherein the section has an area that is smaller than the area of the inner surface of the reactor vessel and has a timing-varying spatial position on the inner surface of the reactor vessel.
Claim 13
Independent Claim
118 words
An apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece, the inner surface of the reactor vessel having an area; means for producing and sustaining a plasma in the reactor vessel for processing the workpiece; and means for directing a portion of the plasma at the inner surface of the reactor vessel; and wherein the portion of the plasma is directed at a section of the inner surface of the reactor vessel, and wherein the section has an area that is smaller than the area of the inner surface of the reactor vessel and has a timing-varying spatial position on the inner surface of the reactor vessel.
Claim 14
Independent Claim
110 words
An apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece, the inner surface of the reactor vessel having an area; means for producing and sustaining a plasma in the reactor vessel for processing the workpiece; a conducting strip disposed outside of the reactor vessel, having an area that is smaller than the area of the inner surface of the reactor vessel and an axis about which it is pivotally mounted, and being electrically connected to the means for producing and sustaining the plasma; and means connected to the conducting strip for rotating the conducting strip around the reactor vessel.
Claim 15
Independent Claim
110 words
An apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece, the inner surface of the reactor vessel having an area; means for producing and sustaining a plasma in the reactor vessel for processing the workpiece; a conducting strip disposed outside of the reactor vessel, having an area that is smaller than the area of the inner surface of the reactor vessel and an axis about which it is pivotally mounted, and being electrically connected to the means for producing and sustaining the plasma; and means connected to the conducting strip for rotating the conducting strip around the reactor vessel.
Claim 16
Dependent Claim
132 words
The apparatus according to claim 6, wherein the means for directing a portion of the plasma at the inner surface of the reactor vessel comprises: a number of conducting strips arranged outside of the reactor vessel and electrically insulated from each other; and wherein the apparatus further comprises a coupling device for electrically connecting the conducting strips to the means for producing and sustaining the plasma, the electrical coupling device being such that at any one time a subset of some but not all of the conducting strips are connected to the means for producing and sustaining the plasma, the subset having a total area that is smaller than the area of the inner surface of the reactor vessel, and the conducting strips that are members of the subset varies in time.
Claim 17
Independent Claim
96 words
An apparatus for processing a workpiece using a plasma, comprising: a reactor vessel within which the plasma is sustained and processing is carried out; a conducting strip pivotally mounted outside of the reactor vessel; means for rotating the conducting strip about an axis, the means for rotating the conducting strip being connected to the conducting strip; and an RF coil for maintaining the plasma, the coil arranged outside of the reactor vessel and electrically connected to the conducting strip, wherein the conducting strip directs a portion of the plasma toward a section of the reactor vessel.
Claim 18
Independent Claim
96 words
An apparatus for processing a workpiece using a plasma, comprising: a reactor vessel within which the plasma is sustained and processing is carried out; a conducting strip pivotally mounted outside of the reactor vessel; means for rotating the conducting strip about an axis, the means for rotating the conducting strip being connected to the conducting strip; and an RF coil for maintaining the plasma, the coil arranged outside of the reactor vessel and electrically connected to the conducting strip, wherein the conducting strip directs a portion of the plasma toward a section of the reactor vessel.
Claim 19
Dependent Claim
33 words
The apparatus according to claim 12, wherein the conducting strip conforms with an outer surface of the reactor vessel but is free to move independently of the outer surface of the reactor vessel.
Claim 20
Dependent Claim
27 words
The apparatus according to claim 13, wherein the conducting strip has an area that is smaller than the area of the outer surface of the reactor vessel.
Claim 21
Dependent Claim
19 words
The apparatus according to claim 13, wherein the RF coil conforms with the outer surface of the reactor vessel.
Claim 22
Dependent Claim
31 words
The apparatus according to claim 15, wherein the RF coil is arranged so that the conducting strip is positioned between the outer surface of the reactor vessel and the RF coil.
Claim 23
Dependent Claim
38 words
The apparatus according to claim 16, wherein the reactor vessel is dome shaped and has an axis about which it is substantially rotationally invariant; and the axis of the conducting strip is collinear with the reactor vessel axis.
Claim 24
Independent Claim
152 words
An apparatus for processing a workpiece using a plasma, comprising: a reactor vessel within which the plasma is sustained and processing is carried out; an RF coil arranged outside of the reactor vessel, the coil providing power and producing and sustaining the plasma about the workpiece; a number of conducting strips being arranged outside of the reactor vessel and being electrically insulated from each other; and a coupling device for electrically connecting the conducting strips to the RF coil, the electrical coupling device being such that at any one time a subset of some but not all of the conducting strips are connected to RF coil, wherein the subset directs a portion of the plasma at an inner surface of the reactor vessel and has a total area that is smaller than the area of the inner surface, and whereby the conducting strips that are members of the subset varies in time.
Claim 25
Independent Claim
152 words
An apparatus for processing a workpiece using a plasma, comprising: a reactor vessel within which the plasma is sustained and processing is carried out; an RF coil arranged outside of the reactor vessel, the coil providing power and producing and sustaining the plasma about the workpiece; a number of conducting strips being arranged outside of the reactor vessel and being electrically insulated from each other; and a coupling device for electrically connecting the conducting strips to the RF coil, the electrical coupling device being such that at any one time a subset of some but not all of the conducting strips are connected to RF coil, wherein the subset directs a portion of the plasma at an inner surface of the reactor vessel and has a total area that is smaller than the area of the inner surface, and whereby the conducting strips that are members of the subset varies in time.
Claim 26
Dependent Claim
45 words
The apparatus according to claim 18, wherein the reactor vessel has an outer surface, the outer surface having an area; and the subset of connected conducting strips has a total area that is smaller than the area of the outer surface of the reactor vessel.
Claim 27
Dependent Claim
27 words
The apparatus according to claim 18, wherein the reactor vessel has an outer surface; and the conducting strips conform with the outer surface of the reactor vessel.
Claim 28
Dependent Claim
48 words
The apparatus according to claim 20, wherein the RF coil conforms with, but does not contact, the outer surface of the reactor vessel; and the RF coil is arranged so that the conducting strips are positioned between the outer surface of the reactor vessel and the RF coil.
Claim 29
Dependent Claim
141 words
A self-cleaning apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; an RF coil disposed outside of the reactor vessel, the RF coil supplying power simultaneously having both an inductive component and a capacitive component; and a conducting member disposed outside of the reactor vessel; and wherein the inductive component of the power produces and sustains a plasma in the reactor vessel for processing the workpiece; and wherein the RF coil and the conducting member cooperate such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning the inner surface of the reactor vessel such that the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece.
Claim 30
Dependent Claim
141 words
A self-cleaning apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; an RF coil disposed outside of the reactor vessel, the RF coil supplying power simultaneously having both an inductive component and a capacitive component; and a conducting member disposed outside of the reactor vessel; and wherein the inductive component of the power produces and sustains a plasma in the reactor vessel for processing the workpiece; and wherein the RF coil and the conducting member cooperate such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning the inner surface of the reactor vessel such that the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece.
Claim 31
Dependent Claim
174 words
A self-cleaning apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; an RF coil disposed outside of the reactor vessel, the RF coil supplying power simultaneously having both an inductive component and a capacitive component; and a conductive member disposed outside of the reactor vessel; and wherein the inductive component of the power produces and sustains a plasma in the reactor vessel for processing the workpiece; and wherein the RF coil and the conducting member cooperate such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning the inner surface of the reactor vessel such that the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece; and wherein the RF coil has an axis about which it is pivotally supported; and the apparatus further comprise means connected to the RF coil for rotating the RF coil about its axis.
Claim 32
Dependent Claim
174 words
A self-cleaning apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; an RF coil disposed outside of the reactor vessel, the RF coil supplying power simultaneously having both an inductive component and a capacitive component; and a conductive member disposed outside of the reactor vessel; and wherein the inductive component of the power produces and sustains a plasma in the reactor vessel for processing the workpiece; and wherein the RF coil and the conducting member cooperate such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning the inner surface of the reactor vessel such that the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece; and wherein the RF coil has an axis about which it is pivotally supported; and the apparatus further comprise means connected to the RF coil for rotating the RF coil about its axis.
Claim 33
Dependent Claim
37 words
The apparatus according to claim 23, wherein the reactor vessel has an outer surface; and the RF coil conforms with the outer surface of the reactor vessel but is free to move independently of the outer surface.
Claim 34
Dependent Claim
40 words
The apparatus according to claim 24, wherein the reactor vessel is dome shaped, the reactor vessel having an axis about which it is substantially rotationally invariant; and the axis of the RF coil is collinear with the reactor vessel axis.
Claim 35
Dependent Claim
200 words
A self-cleaning apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; an RF coil disposed outside of the reactor vessel, the RF coil supplying power simultaneously having an inductive component and a capacitive component; and a conducting member disposed outside of the reactor vessel; and wherein the inductive component of the power produces and sustains a plasma in the reactor vessel for processing the workpiece; and wherein the RF coil and the conducting member cooperate such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning the inner surface of the reactor vessel such that the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece; and wherein the portion of the plasma directed by the inductive component of the power is directed at a section of the inner surface of the reactor vessel having an area that is smaller than the area of the inner surface of the reactor vessel, the section of the inner surface having a time-varying spatial position on the inner surface.
Claim 36
Dependent Claim
200 words
A self-cleaning apparatus for processing a workpiece, the apparatus comprising: a reactor vessel having an inner surface and that contains the workpiece; an RF coil disposed outside of the reactor vessel, the RF coil supplying power simultaneously having an inductive component and a capacitive component; and a conducting member disposed outside of the reactor vessel; and wherein the inductive component of the power produces and sustains a plasma in the reactor vessel for processing the workpiece; and wherein the RF coil and the conducting member cooperate such that the capacitive component of the power directs at the inner surface of the reactor vessel a portion of the plasma, the portion capable of cleaning the inner surface of the reactor vessel such that the cleaning of the inner surface of the reactor vessel occurs simultaneously with the processing of the workpiece; and wherein the portion of the plasma directed by the inductive component of the power is directed at a section of the inner surface of the reactor vessel having an area that is smaller than the area of the inner surface of the reactor vessel, the section of the inner surface having a time-varying spatial position on the inner surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-08 | 2002-09-07 | 2003-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-08 | 2006-09-07 | 2007-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-08 | 2010-09-07 | 2011-03-09 | $7700.00 | Window Closed / Lapsed |