US4786392A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fixture for cleaning a plasma etcher
Assignee: Unisys Corp
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Filing: 1987-04-23
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Granted: 1988-11-22
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Expires: 2007-04-23
Abstract
Abstract A fixture is provided which cleans a plasma etcher of a type that has a holding member with a surface which holds wafers that are to be etched, and an enclosing member which encloses the holding member to form a chamber for the plasma. This fixture operates to produce a large voltage change near the enclosing member and thereby enable the cleaning of the enclosing member by the plasma itself. To achieve such a large voltage change, the fixture is configured to fit inside of the enclosing member, provide a surface which is substantially larger than the surface of the holding member, and make electrical contact with the surface of the holding member. Preferably, the surface provided by the fixture is at least 50% larger than the surface of the holding member.
Inventors
- 👤 James N. Kruchowski
- 👤 Robert K. Sakurai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:40
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32862; Y; Y10; Y10S; Y10S156/00; Y10S156/916; Y10S156/917
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
111 words
A fixture, in combination with a plasma etcher which comprises a holding member with a surface which holds wafers that are to be etched, and an enclosing member which encloses said holding member to form a chamber for said plasma; said fixture operating to produce a large voltage gradient in said plasma near said enclosing member and thereby enable the cleaning of said enclosing member by said plasma; said fixture being configured to fit inside of said enclosing member, provide a metal surface which surrounds said holding member and is substantially larger than said surface of said holding member, and includes a means shorting said metal surface to said holding member.
Claim 2
Dependent Claim
111 words
A fixture, in combination with a plasma etcher which comprises a holding member with a surface which holds wafers that are to be etched, and an enclosing member which encloses said holding member to form a chamber for said plasma; said fixture operating to produce a large voltage gradient in said plasma near said enclosing member and thereby enable the cleaning of said enclosing member by said plasma; said fixture being configured to fit inside of said enclosing member, provide a metal surface which surrounds said holding member and is substantially larger than said surface of said holding member, and includes a means shorting said metal surface to said holding member.
Claim 3
Dependent Claim
26 words
A fixture plasma etcher combination according to claim 1 wherein said metal surface is shaped as a cylinder which fits over and surrounds said holding member.
Claim 4
Dependent Claim
25 words
A fixture plasma etcher combination according to claim 2 wherein said cylinder shaped metal surface has a base which is made of an electrical insulator.
Claim 5
Dependent Claim
28 words
A fixture plasma etcher combination according to claim 3 wherein said metal surface of said fixture is at least 50% larger than said surface of said holding member.
Claim 6
Dependent Claim
45 words
A fixture plasma etcher combination according to claim 3 wherein said means for shorting is a metal conductor having one end that is fixedly attached to said cylinder and has another end with a fastener for engaging said holding member in a readily removable fashion.
Claim 7
Dependent Claim
140 words
A fixture, in combination with a plasma etcher in which the potentials within said etcher are related by the equation (A 1 /A 2 ) 4 ≈(V 2 /V 1 ) where A 1 is a small surface which holds wafers that are to be etched, A 2 is a large surface which encloses said plasma, V 1 is a voltage change which occurs in said plasma near surface A 1 , and V 2 is a voltage change which occurs in said plasma near surface A 2 ; said fixture being configured to fit inside of the enclosure provided by surface A 2 , provide a metal surface which surrounds surface A 1 , and which is substantially larger than surface A 1 , and includes a metal conductor shorting said metal surface to said surface A 1 .
Claim 8
Dependent Claim
140 words
A fixture, in combination with a plasma etcher in which the potentials within said etcher are related by the equation (A 1 /A 2 ) 4 ≈(V 2 /V 1 ) where A 1 is a small surface which holds wafers that are to be etched, A 2 is a large surface which encloses said plasma, V 1 is a voltage change which occurs in said plasma near surface A 1 , and V 2 is a voltage change which occurs in said plasma near surface A 2 ; said fixture being configured to fit inside of the enclosure provided by surface A 2 , provide a metal surface which surrounds surface A 1 , and which is substantially larger than surface A 1 , and includes a metal conductor shorting said metal surface to said surface A 1 .
Claim 9
Dependent Claim
27 words
A fixture plasma etcher combination according to claim 6 wherein said metal surface is shaped as a cylinder which fits over and surrounds surface A 1 .
Claim 10
Dependent Claim
26 words
A fixture plasma etcher combination according to claim 7 wherein said metal surface of said fixture is at least 50% larger than surface A 1 .
Claim 11
Dependent Claim
23 words
A fixture plasma etcher combination according to claim 6 wherein said metal surface has a base which is made of an electrical insulator.
Claim 12
Dependent Claim
43 words
A fixture plasma etcher combination according to claim 6 wherein said electrical conductor is a flexible conductor having one end fixedly attached to said metal surface and having another end with a fastener for engaging surface A 1 in a readily removable fashion.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-22 | 1992-05-23 | 1992-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-22 | 1996-05-23 | 1996-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-22 | 2000-05-23 | 2000-11-22 | $7700.00 | Window Closed / Lapsed |