US5998273A
Expired / Lapsed
US
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Fabrication of semiconductor device having shallow junctions
Assignee: International Business Machines Corp
•
Filing: 1999-01-25
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Granted: 1999-12-07
•
Expires: 2019-01-25
Abstract
Abstract A semiconductor device having shallow junctions is provided by providing a semiconductor substrate having source and drain regions and polysilicon gate regions; depositing selective silicon on the source and drain regions and on the polysilicon gate regions; providing dopant into the source and drain regions forming shallow junctions; forming first insulating spacers on sidewalls of the gate regions; forming second insulating sidewall spacers on the first insulating spacers; implanting dopants into the source and drain regions for providing deep junctions and into the polysilicon gate regions; and siliciding the top surfaces of the source and drain regions and polysilicon gate regions.
Inventors
- 👤 William Hsioh-Lien Ma
- 👤 Hsing-Jen C. Wann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:02
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10D30/00; H10D30/01; H10D30/021; H10D30/027; H10D30/0275; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/0131; H10D64/01324; H10P; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/1414; H10P32/17; H10P32/171; H10D30/0212; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/518
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
108 words
A method for fabricating a semiconductor device having shallow junctions comprising: providing a semiconductor substrate having source and drain regions and polysilicon gate regions; selectively depositing silicon on the source and drain regions and on the polysilicon gate regions; providing a dopant into the source and drain regions to form shallow junctions; forming first insulating sidewall spacers on sidewalls of the gate regions; forming second insulating spacers on the first insulating sidewall spacers; implanting dopants through the silicon into the source and drain regions for providing deep junctions, and into the polysilicon gate regions; and siliciding top surfaces of the source and drain regions and polysilicon gate regions.
Claim 2
Independent Claim
108 words
A method for fabricating a semiconductor device having shallow junctions comprising: providing a semiconductor substrate having source and drain regions and polysilicon gate regions; selectively depositing silicon on the source and drain regions and on the polysilicon gate regions; providing a dopant into the source and drain regions to form shallow junctions; forming first insulating sidewall spacers on sidewalls of the gate regions; forming second insulating spacers on the first insulating sidewall spacers; implanting dopants through the silicon into the source and drain regions for providing deep junctions, and into the polysilicon gate regions; and siliciding top surfaces of the source and drain regions and polysilicon gate regions.
Claim 3
Dependent Claim
31 words
The method of claim 1 wherein the deposited silicon is doped and the shallow junctions are formed by driving in dopant from the selective silicon into the source and drain regions.
Claim 4
Dependent Claim
18 words
The method of claim 2 which comprises employing a short rapid thermal anneal for driving in the dopant.
Claim 5
Dependent Claim
29 words
The method of claim 3 wherein the short rapid thermal anneal is carried out at temperatures of about 800 to about 1200 for about 0.05 to about 1 minute.
Claim 6
Dependent Claim
27 words
The method of claim 1 wherein the deposited silicon is undoped and the shallow junctions are formed by implanting dopant ions into the source and drain regions.
Claim 7
Dependent Claim
14 words
The method of claim 1 wherein the shallow junctions are less than 200 Å.
Claim 8
Dependent Claim
16 words
The method of claim 1 wherein the shallow junctions are about 50 to about 150 Å.
Claim 9
Dependent Claim
35 words
The method of claim 1 wherein first insulating sidewall spacers are formed by thermal oxidation of the silicon and a polycrystalline silicon creating taper-shaped isolation where the source and drain regions meet the gate regions.
Claim 10
Dependent Claim
19 words
The method of claim 8 wherein the first insulating sidewall spacers are about 20 to about 100 Å thick.
Claim 11
Dependent Claim
27 words
The method of claim 1 wherein the second insulating sidewall spacers are selected from the group consisting of silicon dioxide, silicon nitride, silicon oxynitride and mixtures thereof.
Claim 12
Dependent Claim
19 words
The method of claim 10 wherein the second insulating sidewall spacers are about 500 to about 2000 Å thick.
Claim 13
Dependent Claim
27 words
The method of claim 1 wherein said siliciding comprising using a silicide forming metal selected from the group consisting of tungsten, titanium, cobalt, nickel and mixtures thereof.
Claim 14
Dependent Claim
17 words
The method of claim 1 which further comprises gate insulation between the substrate and the gate regions.
Claim 15
Dependent Claim
25 words
The method of claim 1 which further comprises providing sidewall insulating layers on sidewalls of the gate regions prior to depositing the selective silicon layer.
Claim 16
Dependent Claim
27 words
The method of claim 14 which further comprises removing the sidewall insulating layer after forming the shallow junctions and prior to forming the first insulating sidewall spacers.
Claim 17
Dependent Claim
18 words
The method of claim 15 wherein the sidewall insulating layer is about 10 to about 300 Å thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-06 | 2003-06-07 | 2003-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-06 | 2007-06-07 | 2007-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-06 | 2011-06-07 | 2011-12-07 | $7700.00 | Window Closed / Lapsed |