US5753548A
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US
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Method for preventing fluorine outgassing-induced interlevel dielectric delamination on P-channel FETS
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-09-24
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Granted: 1998-05-19
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Expires: 2016-09-24
Abstract
Abstract A method is described for forming P-channel field effect transistors having shallow source/drain junctions and improved reliability for CMOS circuits. The method involves forming both N-channel and P-channel FETs by alternate photoresist masking and ion implantation. The shallow junction self-aligned source/drain areas for P-channel FETs are formed by implanting boron difluoride (BF 2 ) ions. In more conventional processing, the BF 2 ions implanted in the P-channel FET gate electrodes during the source/drain implant results in outgassing of fluorine from the gate electrodes after the interlevel dielectric (ILD) layer is deposited. This can result in void formation, or delamination, at the interface between the gate electrode and the ILD. The current invention provides an improved process which uses a photoresist block-out mask to eliminate the implantation of the BF 2 + ions in the P-channel FET gate electrodes during the formation of the self-aligned P + source/drain regions. This prevents voids from forming at the gate electrode/ILD interface after the ILD layer is deposited and subsequent high-temperature processing steps are performed. The invention also reduces the enhanced boron diffusion in the P-FET gate oxide that can degrade the threshold voltage.
Inventors
- 👤 Shau-Tsung Yu
- 👤 An-Min Chiang
- 👤 Yeh-Jye Wann
- 👤 Pei-Hung Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:19
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/017; H10D84/02; H10D84/03; H10D84/038
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
337 words
A method for fabricating P-channel and N-channel field effect transistors (FETs) with improved P-channel FETs comprising the steps of: providing a semiconductor substrate having device areas surrounded and electrically isolated by field oxide regions, said device areas having N-wells for P-channel FETs and P-wells for N-channel FETs; forming a gate oxide on said N- and P-wells; depositing a polysilicon layer on said substrate and doping said polysilicon over said P-wells with an N-type dopant and doping said polysilicon over said N-wells with a P-type dopant; patterning said polysilicon layer and thereby forming gate electrodes for said N-channel and said P-channel FETs; masking said N-wells with a photoresist mask and implanting lightly doped N - source/drain regions in said P-wells adjacent to said gate electrodes; masking said P-wells with a photoresist mask and implanting lightly doped P - source/drain regions in said N-wells adjacent to said gate electrodes; depositing a conformal first insulating layer over said gate electrodes and elsewhere over said substrate; anisotropically etching back said first insulating layer and thereby forming sidewall spacers on said gate electrodes; masking said N-wells with a photoresist mask and implanting N + source/drain regions in said P-wells adjacent to said sidewall spacers; masking said P-wells with a photoresist mask and concurrently forming said photoresist mask over said gate electrodes on said N-well regions; implanting P + source/drain regions in said N-wells adjacent to said sidewall spacers using boron difluoride (BF 2 ) ions, said photoresist mask over said gate electrodes preventing BF 2 + ion implantation in said gate electrodes; depositing a conformal second insulating layer over said gate electrodes and elsewhere on said substrate; depositing a third insulating layer on said second insulating layer and planarizing said third insulating layer, said prior photoresist mask on said gate electrodes on said N-wells for said P-channel FET gate electrodes preventing void formation between said P-channel gate electrodes and said second insulating layer during subsequent high-temperature processing, and further eliminating enhanced diffusion of boron in said gate oxide on said N-well regions.
Claim 2
Independent Claim
337 words
A method for fabricating P-channel and N-channel field effect transistors (FETs) with improved P-channel FETs comprising the steps of: providing a semiconductor substrate having device areas surrounded and electrically isolated by field oxide regions, said device areas having N-wells for P-channel FETs and P-wells for N-channel FETs; forming a gate oxide on said N- and P-wells; depositing a polysilicon layer on said substrate and doping said polysilicon over said P-wells with an N-type dopant and doping said polysilicon over said N-wells with a P-type dopant; patterning said polysilicon layer and thereby forming gate electrodes for said N-channel and said P-channel FETs; masking said N-wells with a photoresist mask and implanting lightly doped N - source/drain regions in said P-wells adjacent to said gate electrodes; masking said P-wells with a photoresist mask and implanting lightly doped P - source/drain regions in said N-wells adjacent to said gate electrodes; depositing a conformal first insulating layer over said gate electrodes and elsewhere over said substrate; anisotropically etching back said first insulating layer and thereby forming sidewall spacers on said gate electrodes; masking said N-wells with a photoresist mask and implanting N + source/drain regions in said P-wells adjacent to said sidewall spacers; masking said P-wells with a photoresist mask and concurrently forming said photoresist mask over said gate electrodes on said N-well regions; implanting P + source/drain regions in said N-wells adjacent to said sidewall spacers using boron difluoride (BF 2 ) ions, said photoresist mask over said gate electrodes preventing BF 2 + ion implantation in said gate electrodes; depositing a conformal second insulating layer over said gate electrodes and elsewhere on said substrate; depositing a third insulating layer on said second insulating layer and planarizing said third insulating layer, said prior photoresist mask on said gate electrodes on said N-wells for said P-channel FET gate electrodes preventing void formation between said P-channel gate electrodes and said second insulating layer during subsequent high-temperature processing, and further eliminating enhanced diffusion of boron in said gate oxide on said N-well regions.
Claim 3
Dependent Claim
21 words
The method of claim 1, wherein said polysilicon layer is deposited to a thickness of between about 3500 and 4400 Angstroms.
Claim 4
Dependent Claim
19 words
The method of claim 1, wherein said lightly doped P - source/drain regions are implanted with BF 2 ions.
Claim 5
Dependent Claim
37 words
The method of claim 3, wherein said BF 2 ions are implanted at an implant dose of between 1.0 E 13 and 1.2 E 13 ions/cm 2 and an energy of between about 40 and 60 KeV.
Claim 6
Dependent Claim
43 words
The method of claim 1, wherein said P + source/drain contact regions are implanted with said BF 2 at an implant dose of between 2.5 E 15 and 3.5 E 15 ions/cm 2 and an energy of between about 40 and 70 KeV.
Claim 7
Dependent Claim
31 words
The method of claim 1, wherein said photoresist mask over said P-channel FET gate electrodes is sufficiently thick to prevent BF 2 + ion implantation in said P-channel FET gate electrodes.
Claim 8
Dependent Claim
19 words
The method of claim 6, wherein said photoresist mask is at least greater than about 2.5 micrometers in thickness.
Claim 9
Dependent Claim
28 words
The method of claim 1, wherein said second insulating layer is silicon nitride (Si 3 N 4 ) having a thickness of between about 300 and 500 Angstroms.
Claim 10
Dependent Claim
26 words
The method of claim 1, wherein said third insulating layer is a borophosphosilicate glass (BPSG) deposited to a thickness of between about 6000 and 7500 Angstroms.
Claim 11
Dependent Claim
34 words
The method of claim 8, wherein said BPSG is planarized by annealing in nitrogen (N 2 ) at a temperature of between about 900° and 950° C., for between about 30 and 40 minutes.
Claim 12
Independent Claim
368 words
A method for fabricating CMOS circuits from P-channel and N-channel field effect transistors (FETs) with improved P-channel FETs comprising the steps of: providing a semiconductor substrate having device areas surrounded and electrically isolated by field oxide regions, said device areas having N-wells for P-channel FETs and P-wells for N-channel FETs; forming a gate oxide on said N- and P-wells; depositing a polysilicon layer on said substrate and doping said polysilicon over said P-wells with an N-type dopant and doping said polysilicon over said N-wells with a P-type dopant; patterning said polysilicon layer and thereby forming gate electrodes for said N-channel and said P-channel FETs; masking said N-wells with a photoresist mask and implanting lightly doped N - source/drain regions in said P-wells adjacent to said gate electrodes; masking said P-wells with a photoresist mask and implanting lightly doped P - source/drain regions in said N-wells adjacent to said gate electrodes; depositing a conformal first insulating layer over said gate electrodes and elsewhere over said substrate; anisotropically etching back said first insulating layer and thereby forming sidewall spacers on said gate electrodes; masking said N-wells with a photoresist mask and implanting N + source/drain regions in said P-wells adjacent to said sidewall spacers; masking said P-wells with a photoresist mask and concurrently forming said photoresist mask over said gate electrodes on said N-well regions implanting P + source/drain regions in said N-wells adjacent to said sidewall spacers using BF 2 + ions, said photoresist mask over said gate electrodes preventing BF 2 + ion implantation in said gate electrodes; depositing a conformal second insulating layer composed of silicon nitride (Si 3 N 4 ) over said gate electrodes and elsewhere on said substrate; depositing a third insulating layer composed of borophosphosilicate glass (BPSG) on said second insulating layer and leveling by thermal anneal said third insulating layer, said prior photoresist mask on said P-channel FET gate electrodes on said N-wells preventing void formation between said P-channel gate electrodes and said second insulating layer during said thermal anneal and subsequent high-temperature processing, and further eliminating enhanced diffusion of boron in said gate oxide on said N-well regions; electrically interconnecting said N- and P-channel FETs and thereby forming said CMOS circuits.
Claim 13
Independent Claim
368 words
A method for fabricating CMOS circuits from P-channel and N-channel field effect transistors (FETs) with improved P-channel FETs comprising the steps of: providing a semiconductor substrate having device areas surrounded and electrically isolated by field oxide regions, said device areas having N-wells for P-channel FETs and P-wells for N-channel FETs; forming a gate oxide on said N- and P-wells; depositing a polysilicon layer on said substrate and doping said polysilicon over said P-wells with an N-type dopant and doping said polysilicon over said N-wells with a P-type dopant; patterning said polysilicon layer and thereby forming gate electrodes for said N-channel and said P-channel FETs; masking said N-wells with a photoresist mask and implanting lightly doped N - source/drain regions in said P-wells adjacent to said gate electrodes; masking said P-wells with a photoresist mask and implanting lightly doped P - source/drain regions in said N-wells adjacent to said gate electrodes; depositing a conformal first insulating layer over said gate electrodes and elsewhere over said substrate; anisotropically etching back said first insulating layer and thereby forming sidewall spacers on said gate electrodes; masking said N-wells with a photoresist mask and implanting N + source/drain regions in said P-wells adjacent to said sidewall spacers; masking said P-wells with a photoresist mask and concurrently forming said photoresist mask over said gate electrodes on said N-well regions implanting P + source/drain regions in said N-wells adjacent to said sidewall spacers using BF 2 + ions, said photoresist mask over said gate electrodes preventing BF 2 + ion implantation in said gate electrodes; depositing a conformal second insulating layer composed of silicon nitride (Si 3 N 4 ) over said gate electrodes and elsewhere on said substrate; depositing a third insulating layer composed of borophosphosilicate glass (BPSG) on said second insulating layer and leveling by thermal anneal said third insulating layer, said prior photoresist mask on said P-channel FET gate electrodes on said N-wells preventing void formation between said P-channel gate electrodes and said second insulating layer during said thermal anneal and subsequent high-temperature processing, and further eliminating enhanced diffusion of boron in said gate oxide on said N-well regions; electrically interconnecting said N- and P-channel FETs and thereby forming said CMOS circuits.
Claim 14
Dependent Claim
21 words
The method of claim 11, wherein said polysilicon layer is deposited to a thickness of between about 3500 and 4400 Angstroms.
Claim 15
Dependent Claim
19 words
The method of claim 11, wherein said lightly doped P - source/drain regions are implanted with BF 2 ions.
Claim 16
Dependent Claim
37 words
The method of claim 13, wherein said BF 2 ions are implanted at an implant dose of between 1.0 E 13 and 1.2 E 13 ions/cm 2 and an energy of between about 40 and 60 KeV.
Claim 17
Dependent Claim
42 words
The method of claim 11, wherein said P + source/drain regions are implanted with said BF 2 at an implant dose of between 2.5 E 15 and 3.5 E 15 ions/cm 2 and an energy of between about 40 and 70 KeV.
Claim 18
Dependent Claim
31 words
The method of claim 11, wherein said photoresist mask over said P-channel FET gate electrodes is sufficiently thick to prevent BF 2 + ion implantation in said P-channel FET gate electrodes.
Claim 19
Dependent Claim
19 words
The method of claim 16, wherein said photoresist mask is at least greater than about 2.5 micrometers in thickness.
Claim 20
Dependent Claim
20 words
The method of claim 11, wherein said second insulating layer has a thickness of between about 300 and 500 Angstroms.
Claim 21
Dependent Claim
22 words
The method of claim 11, wherein said third insulating layer is deposited to a thickness of between about 6000 and 7500 Angstroms.
Claim 22
Dependent Claim
34 words
The method of claim 11, wherein said BPSG is planarized by annealing in nitrogen (N 2 ) at a temperature of between about 900° and 950° C., for between about 30 and 40 minutes.
References Cited (Backward Citations)
US5405791A
Cited
US5439834A
Cited
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