US6010935A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self aligned contacts
Assignee: Round Rock Research LLC
•
Filing: 1997-08-21
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Granted: 2000-01-04
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Expires: 2017-08-21
Abstract
Abstract A process of forming a self aligned contact on a surface of a wafer having one or more gate structures and a contact region adjacent the gate structures. The gate structures are isolated from the contact region by one or more spacers having predetermined thicknesses. The process comprises the steps of depositing a conformal etch stop layer over the gate structures and contact region, depositing a sacrificial layer over the etch stop layer, selectively removing a portion of the sacrificial layer to expose a portion of the etch stop layer adjacent the contact region and removing the etch stop layer to expose contact region. The etch stop layer protects spacers from damage resulting from selective etch of the sacrificial layer. In one preferred embodiment, the etch stop layer has a substantially uniform thickness and may be removed by a timed etch.
Inventors
- 👤 Trung T. Doan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 04:35
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; H10W20/0696; Y; Y10; Y10S; Y10S257/00; Y10S257/90
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
147 words
A process for fabricating a self-aligned contact to a semiconductor substrate comprising the steps of: providing at least one gate structure on a surface of said substrate and a contact region within said substrate adjacent said at least one gate structure, said gate structure including at least one spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer over said at least one gate structure and said contact region; depositing a sacrificial layer over said etch stop layer; selectively removing a portion of said sacrificial layer without a mask to expose a portion of said etch stop layer over said contact region, said etch stop layer protecting said at least one spacer and said contact region; and non-selectively removing said exposed portion of said etch stop layer from over said at least one spacer.
Claim 2
Dependent Claim
147 words
A process for fabricating a self-aligned contact to a semiconductor substrate comprising the steps of: providing at least one gate structure on a surface of said substrate and a contact region within said substrate adjacent said at least one gate structure, said gate structure including at least one spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer over said at least one gate structure and said contact region; depositing a sacrificial layer over said etch stop layer; selectively removing a portion of said sacrificial layer without a mask to expose a portion of said etch stop layer over said contact region, said etch stop layer protecting said at least one spacer and said contact region; and non-selectively removing said exposed portion of said etch stop layer from over said at least one spacer.
Claim 3
Dependent Claim
34 words
The process of claim 1, wherein said etch stop layer comprises a material having a first characteristic etch rate and said sacrificial layer comprises a material having a second, substantially different characteristic etch rate.
Claim 4
Dependent Claim
143 words
A process for fabricating a self-aligned contact to a semiconductor substrate comprising: providing at least one gate structure on a surface of said substrate and a contact region within said substrate adjacent said at least one gate structure, said gate structure including at least one spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer comprising an oxide having a first characteristic etch rate over said at least one gate structure and said contact region; depositing a sacrificial layer comprising an undoped polysilicon having a second characteristic etch rate over said etch stop layer; and selectively removing a portion of said sacrificial layer to expose a portion of said etch stop layer over said contact region, said etch stop layer protecting said at least one spacer and said contact region.
Claim 5
Dependent Claim
143 words
A process for fabricating a self-aligned contact to a semiconductor substrate comprising: providing at least one gate structure on a surface of said substrate and a contact region within said substrate adjacent said at least one gate structure, said gate structure including at least one spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer comprising an oxide having a first characteristic etch rate over said at least one gate structure and said contact region; depositing a sacrificial layer comprising an undoped polysilicon having a second characteristic etch rate over said etch stop layer; and selectively removing a portion of said sacrificial layer to expose a portion of said etch stop layer over said contact region, said etch stop layer protecting said at least one spacer and said contact region.
Claim 6
Dependent Claim
23 words
The process of claim 3, wherein said second characteristic etch rate is at least 20 times higher than said first characteristic etch rate.
Claim 7
Dependent Claim
25 words
The process of claim 1, wherein said etch stop layer comprises a substantially uniform layer and removing said etch stop layer comprises a timed etch.
Claim 8
Dependent Claim
183 words
A process for fabricating a self-aligned contact to a semiconductor substrate comprising: providing at least one gate structure on a surface of said substrate and a contact region within said substrate adjacent said at least one gate structure, said gate structure including at least one spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer over said at least one gate structure and said contact region; depositing a sacrificial layer over said etch stop layer; and selectively removing a portion of said sacrificial layer to expose a portion of said etch stop layer over said contact region, said etch stop layer protecting said at least one spacer and said contact region, wherein selectively removing said portion of said sacrificial layer comprises: forming a sacrificial plug over said contact region and exposing outside regions of said etch stop layer; depositing an insulating layer over said sacrificial plug and said outside regions of said etch stop layer; exposing said sacrificial plug; and removing said sacrificial plug from over said etch stop layer.
Claim 9
Dependent Claim
183 words
A process for fabricating a self-aligned contact to a semiconductor substrate comprising: providing at least one gate structure on a surface of said substrate and a contact region within said substrate adjacent said at least one gate structure, said gate structure including at least one spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer over said at least one gate structure and said contact region; depositing a sacrificial layer over said etch stop layer; and selectively removing a portion of said sacrificial layer to expose a portion of said etch stop layer over said contact region, said etch stop layer protecting said at least one spacer and said contact region, wherein selectively removing said portion of said sacrificial layer comprises: forming a sacrificial plug over said contact region and exposing outside regions of said etch stop layer; depositing an insulating layer over said sacrificial plug and said outside regions of said etch stop layer; exposing said sacrificial plug; and removing said sacrificial plug from over said etch stop layer.
Claim 10
Dependent Claim
14 words
The process of claim 6, wherein depositing said insulating layer comprises depositing an oxide.
Claim 11
Dependent Claim
20 words
The process of claim 6, wherein said step of exposing said portion of said sacrificial layer comprises a mechanical planarization.
Claim 12
Dependent Claim
14 words
The process of claim 8, wherein said mechanical planarization comprising chemical mechanical planarization (CMP).
Claim 13
Dependent Claim
157 words
A process for fabricating a self-aligned contact in an integrated circuit, comprising: providing at least one gate structure on a surface of a substrate to define a contact region adjacent said at least one gate structure, said gate structure including at least one insulating spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer over said at least one gate structure and said surface of said wafer in said contact region; depositing a sacrificial layer over said etch stop layer; selectively removing portions of said sacrificial layer to expose outside portions of said etch stop layer and form a plug of said sacrificial layer over said contact region; and selectively removing said plug to expose a portion of said etch stop layer disposed adjacent said contact region, wherein said etch stop layer protects said at least one spacer and said contact region from damage.
Claim 14
Dependent Claim
157 words
A process for fabricating a self-aligned contact in an integrated circuit, comprising: providing at least one gate structure on a surface of a substrate to define a contact region adjacent said at least one gate structure, said gate structure including at least one insulating spacer having a thickness selected to substantially isolate said at least one gate structure from said contact region; depositing an etch stop layer over said at least one gate structure and said surface of said wafer in said contact region; depositing a sacrificial layer over said etch stop layer; selectively removing portions of said sacrificial layer to expose outside portions of said etch stop layer and form a plug of said sacrificial layer over said contact region; and selectively removing said plug to expose a portion of said etch stop layer disposed adjacent said contact region, wherein said etch stop layer protects said at least one spacer and said contact region from damage.
Claim 15
Dependent Claim
34 words
The process of claim 10, wherein said etch stop layer comprises a material having a first characteristic etch rate and said sacrificial layer comprises a material having a second, substantially different characteristic etch rate.
Claim 16
Dependent Claim
23 words
The process of claim 11, wherein said second characteristic etch rate is at least 10 times higher than said first characteristic etch rate.
Claim 17
Dependent Claim
12 words
The process of claim 11, wherein said sacrificial layer comprises undoped polysilicon.
Claim 18
Dependent Claim
26 words
The process of claim 11, wherein said etch stop layer comprises a material selected from the group consisting of silicon oxide, silicon nitride and silicon oxinitride.
Claim 19
Dependent Claim
27 words
The process of claim 10, further comprising depositing an insulating layer over said plug and said exposed regions of said etch stop layer, and exposing said plug.
Claim 20
Dependent Claim
12 words
The process of claim 15, wherein said insulating layer comprises silicon oxide.
Claim 21
Dependent Claim
162 words
A process for fabricating a self-aligned contact in a semiconductor substrate, comprising: providing at least one gate structure on a substrate and defining a contact region adjacent said gate structure, said gate structure including a plurality of insulating spacers; depositing an etch stop layer having a substantially uniform thickness over said plurality of spacers and said surface of said wafer in said contact region; depositing a sacrificial layer over said etch stop layer; selectively removing portions of said sacrificial layer to expose outside portions of said etch stop layer and form a plug of said sacrificial layer over said contact region; depositing an insulating layer over said plug and said outside regions of said etch stop layer; exposing said plug; selectively removing said plug to expose an inside portion of said etch stop layer over said contact region, wherein said etch stop layer protects said plurality of spacers and said contact region; and removing said inside portion of said etch stop layer.
Claim 22
Dependent Claim
162 words
A process for fabricating a self-aligned contact in a semiconductor substrate, comprising: providing at least one gate structure on a substrate and defining a contact region adjacent said gate structure, said gate structure including a plurality of insulating spacers; depositing an etch stop layer having a substantially uniform thickness over said plurality of spacers and said surface of said wafer in said contact region; depositing a sacrificial layer over said etch stop layer; selectively removing portions of said sacrificial layer to expose outside portions of said etch stop layer and form a plug of said sacrificial layer over said contact region; depositing an insulating layer over said plug and said outside regions of said etch stop layer; exposing said plug; selectively removing said plug to expose an inside portion of said etch stop layer over said contact region, wherein said etch stop layer protects said plurality of spacers and said contact region; and removing said inside portion of said etch stop layer.
Claim 23
Dependent Claim
19 words
The process of claim 17, wherein removing said inside portion of said etch stop layer comprises a time etch.
Claim 24
Dependent Claim
26 words
The process of claim 17, wherein said etch stop layer has a thickness over the spacers at least about 70% of a thickness over the substrate.
Claim 25
Dependent Claim
27 words
The process of claim 17, wherein said etch stop layer has a thickness over the spacers between about 90% and 110% of a thickness over the substrate.
Claim 26
Dependent Claim
60 words
A process for forming a self-aligned contact, comprising: forming an etch stop layer having a substantially uniform thickness over a substrate and over gate spacers; forming a sacrificial plug over the etch stop layer and surrounded by an insulating layer; selectively removing the sacrificial plug from the insulating layer and the etch stop layer; and removing the etch stop layer.
Claim 27
Dependent Claim
60 words
A process for forming a self-aligned contact, comprising: forming an etch stop layer having a substantially uniform thickness over a substrate and over gate spacers; forming a sacrificial plug over the etch stop layer and surrounded by an insulating layer; selectively removing the sacrificial plug from the insulating layer and the etch stop layer; and removing the etch stop layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-03 | 2003-07-05 | 2004-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-03 | 2007-07-05 | 2008-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-03 | 2011-07-05 | 2012-01-04 | $7700.00 | Window Closed / Lapsed |