Field-effect transistor having multi-part channel

Claim 2

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion and fully surrounding the main drain portion along its outside surface within the material of the semiconductive body, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extensional reaching a maximum net dopant concentration at a depth of at least 0.05 μm into the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, and extending partially over both the drain extension and the main drain portion.

Claim 3

A structure as in claim 1 wherein the threshold body zone fully surrounds the source zone along its outside surface within the material of the semiconductive body.

Claim 4

A structure as in claim 1 wherein each of the threshold body zone and the drain extension has a maximum net dopant concentration of 5×10 16 -5×10 17 atoms/cm 3 .

Claim 5

A structure as in claim 3 wherein each of the source zone and the main drain portion has a maximum net dopant concentration of 5×10 19 -2×10 20 atoms/cm 3 .

Claim 6

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extension having a maximum net dopant concentration of 5×10 16 -5×10 17 atoms/cm 3 and reaching that maximum net dopant concentration of a depth of at least 0.05 μm into the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, extending partially over both the drain extension and the main drain portion, and also extending partially over both the source zone and the threshold body zone.

Claim 7

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extension having a maximum net dopant concentration of 5×10 16 -5×10 17 atoms/cm 3 and reaching that maximum net dopant concentration of a depth of at least 0.05 μm into the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, extending partially over both the drain extension and the main drain portion, and also extending partially over both the source zone and the threshold body zone.

Claim 8

A structure as in claim 5 wherein the drain extension substantially surrounds the main drain portion along its outside surface within the material of the semiconductive body.

Claim 9

A structure as in claim 5 wherein the threshold body zone substantially surrounds the source zone along its outside surface within the material of the semiconductive body.

Claim 10

A structure as in claim 5 wherein each of the source zone and the main drain portion has a maximum net dopant concentration of 5×10 19 -2×10 20 atoms/cm 3 .

Claim 11

A structure as in claim 5 wherein the gate electrode has opposing source and drain side edges located respectively above the source and drain zones, the drain extension having a net dopant concentration which progressively decreases in moving laterally along the upper surface of the semiconductive body from a location below the drain side edge in a direction towards the source side edge.

Claim 12

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extension reaching a maximum net dopant concentration at a depth of at least 0.05 μm into the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, and extending over both the source zone and the threshold body zone.

Claim 13

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extension reaching a maximum net dopant concentration at a depth of at least 0.05 μm into the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, and extending over both the source zone and the threshold body zone.

Claim 14

A structure as in claim 10 wherein the drain extension substantially surrounds the main drain portion along its outside surface within the material of the semiconductive body.

Claim 15

A structure as in claim 10 wherein the threshold body zone substantially surrounds the source zone along its outside surface within the material of the semiconductive body.

Claim 16

A structure as in claim 10 wherein the gate electrode also extends over both the main drain portion and the drain extension.

Claim 17

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, the threshold body zone substantially surrounding the source zone along its outside surface within the material of the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, extending partially over both the drain extension and the main drain portion, and also extending partially over both the source zone and the threshold body zone, the threshold body zone reaching a maximum lateral distance under the gate electrode at a location below the upper surface of the semiconductive body.

Claim 18

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, the threshold body zone substantially surrounding the source zone along its outside surface within the material of the semiconductive body; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, extending partially over both the drain extension and the main drain portion, and also extending partially over both the source zone and the threshold body zone, the threshold body zone reaching a maximum lateral distance under the gate electrode at a location below the upper surface of the semiconductive body.

Claim 19

A structure as in claim 14 wherein the drain extension substantially surrounds the main drain portion along its outside surface within the material of the semiconductive body.

Claim 20

A structure as in claim 14 wherein each of the threshold body zone and the drain extension has a maximum net dopant concentration of 5×10 16 -5×10 17 atoms/cm 3 .

Claim 21

A structure as in claim 16 wherein each of the source zone and the main drain portion has a maximum net dopant concentration of 5×10 19 -2×10 20 atoms/cm 3 .

Claim 22

A complementary transistor structure comprising: a first device region of a first conductivity type situated in a semiconductive body; first source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a first channel zone of the first device region, the first drain zone comprising a first main drain portion and a more lightly doped first drain extension located between the first channel zone and the first main drain portion, the first channel zone comprising a first output channel portion and a more heavily doped first input channel portion that respectively meet the first drain extension and the first source zone; a first gate electrode situated above the first channel zone and vertically separated from it by gate dielectric material: a second device region of the second conductivity type situated in the semiconductive body; second source and drain zones of the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a second channel zone of the second device region, the second drain zone comprising a second main drain portion and a more lightly doped second drain extension located between the second channel zone and the second main drain portion, the second channel zone comprising a second output channel portion and a more heavily doped second input channel portion that respectively meet the second drain extension and the second source zone, the first input channel portion being part of a first source-adjoining threshold body zone of the first conductivity type extending approximately as deep into the semiconductive body as the second drain extension, the second input channel portion being part of a second source-adjoining threshold body zone of the second conductivity type extending approximately as deep into the semiconductive body as the first drain extension, the first and second threshold body zones respectively substantially surrounding the first and second source zones along their outside surfaces within the material of the semiconductive body; and a second gate electrode situated above the second channel zone and vertically separated from it by gate dielectric material.

Claim 23

A complementary transistor structure comprising: a first device region of a first conductivity type situated in a semiconductive body; first source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a first channel zone of the first device region, the first drain zone comprising a first main drain portion and a more lightly doped first drain extension located between the first channel zone and the first main drain portion, the first channel zone comprising a first output channel portion and a more heavily doped first input channel portion that respectively meet the first drain extension and the first source zone; a first gate electrode situated above the first channel zone and vertically separated from it by gate dielectric material: a second device region of the second conductivity type situated in the semiconductive body; second source and drain zones of the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a second channel zone of the second device region, the second drain zone comprising a second main drain portion and a more lightly doped second drain extension located between the second channel zone and the second main drain portion, the second channel zone comprising a second output channel portion and a more heavily doped second input channel portion that respectively meet the second drain extension and the second source zone, the first input channel portion being part of a first source-adjoining threshold body zone of the first conductivity type extending approximately as deep into the semiconductive body as the second drain extension, the second input channel portion being part of a second source-adjoining threshold body zone of the second conductivity type extending approximately as deep into the semiconductive body as the first drain extension, the first and second threshold body zones respectively substantially surrounding the first and second source zones along their outside surfaces within the material of the semiconductive body; and a second gate electrode situated above the second channel zone and vertically separated from it by gate dielectric material.

Claim 24

A structure as in claim 18 wherein the first and second drain extensions substantially extend at least as deep into the semiconductive body respectively as the first and second main drain portions.

Claim 25

A structure as in claim 18 wherein: the first gate electrode comprises non-monocrystalline semiconductive material of the second conductivity type; and the second gate electrode comprises non-monocrystalline semiconductive material of the first conductivity type.

Claim 26

A structure as in claim 18 wherein the first and second drain extensions respectively substantially surround the first and second main drain portions along their outside surfaces within the material of the semiconductive body.

Claim 27

A structure as in claim 18 wherein each of the threshold body zones and the drain extensions reaches a maximum net dopant concentration at a depth of no more than 0.05 μm into the semiconductive body.

Claim 28

A structure as in claim 18 wherein each of the threshold body zones and the drain extensions reaches a maximum net dopant concentration at a depth of at least 0.05 μm into the semiconductive body.

Claim 29

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extension having a maximum net dopant concentration of 5×10 16 -5×10 17 atoms/cm 3 ; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, extending partially over both the drain extension and the main drain portion, and also extending partially over both the source zone and the threshold body zone, the gate electrode having opposing source and drain side edges located respectively above the source and drain zones, the drain extension having a net dopant concentration which progressively decreases in moving laterally along the upper surface of the semiconductive body from a location below the drain side edge in a direction towards the source side edge.

Claim 30

A structure comprising: a device region of a first conductivity type situated in a semiconductive body; source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a channel zone of the device region, the drain zone comprising a main drain portion and a more lightly doped drain extension located between the channel zone and the main drain portion, the drain extension substantially extending at least as deep into the semiconductive body as the main drain portion, the channel zone comprising an output channel portion and a more heavily doped input channel portion that respectively meet the drain extension and the source zone, the input channel portion being part of a source-adjoining threshold body zone of the first conductivity type substantially extending at least as deep into the semiconductive body as the source zone, each of the threshold body zone and the drain extension having a maximum net dopant concentration of 5×10 16 -5×10 17 atoms/cm 3 ; and a gate electrode situated above the channel zone, vertically separated from the channel zone by gate dielectric material, extending partially over both the drain extension and the main drain portion, and also extending partially over both the source zone and the threshold body zone, the gate electrode having opposing source and drain side edges located respectively above the source and drain zones, the drain extension having a net dopant concentration which progressively decreases in moving laterally along the upper surface of the semiconductive body from a location below the drain side edge in a direction towards the source side edge.

Claim 31

A structure as in claim 24 wherein the drain extension substantially surrounds the main drain portion along its outside surface within the material of the semiconductive body.

Claim 32

A structure as in claim 24 wherein the threshold body zone substantially surrounds the source zone along its outside surface within the material of the semiconductive body.

Claim 33

A structure as in claim 24 wherein each of the source zone and the main drain portion has a maximum net dopant concentration of 5×10 19 -2×10 20 atoms/cm 3 .

Claim 34

A complementary transistor structure comprising: a first device region of a first conductivity type situated in a semiconductive body; first source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a first channel zone of the first device region, the first drain zone comprising a first main drain portion and a more lightly doped first drain extension located between the first channel zone and the first main drain portion, the first channel zone comprising a first output channel portion and a more heavily doped first input channel portion that respectively meet the first drain extension and the first source zone; a first gate electrode situated above the first channel zone and vertically separated from it by gate dielectric material; a second device region of the second conductivity type situated in the semiconductive body; second source and drain zones of the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a second channel zone of the second device region, the second drain zone comprising a second main drain portion and a more lightly doped second drain extension located between the second channel zone and the second main drain portion, the second channel zone comprising a second output channel portion and a more heavily doped second input channel portion that respectively meet the second drain extension and the second source zone, the first input channel portion being part of a first source-adjoining threshold body zone of the first conductivity type extending approximately as deep into the semiconductive body as the second drain extension, the second input channel portion being part of a second source-adjoining, threshold body zone of the second conductivity type extending approximately as deep into the semiconductive body as the first drain extension, each of the threshold body zones and the drain extensions reaching a maximum net dopant concentration at a depth of at least 0.05 μm into the semiconductive body; and a second gate electrode situated above the second channel zone and vertically separated from it by bate dielectric material.

Claim 35

A complementary transistor structure comprising: a first device region of a first conductivity type situated in a semiconductive body; first source and drain zones of a second conductivity type opposite to the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a first channel zone of the first device region, the first drain zone comprising a first main drain portion and a more lightly doped first drain extension located between the first channel zone and the first main drain portion, the first channel zone comprising a first output channel portion and a more heavily doped first input channel portion that respectively meet the first drain extension and the first source zone; a first gate electrode situated above the first channel zone and vertically separated from it by gate dielectric material; a second device region of the second conductivity type situated in the semiconductive body; second source and drain zones of the first conductivity type situated in the semiconductive body along its upper surface and laterally separated by a second channel zone of the second device region, the second drain zone comprising a second main drain portion and a more lightly doped second drain extension located between the second channel zone and the second main drain portion, the second channel zone comprising a second output channel portion and a more heavily doped second input channel portion that respectively meet the second drain extension and the second source zone, the first input channel portion being part of a first source-adjoining threshold body zone of the first conductivity type extending approximately as deep into the semiconductive body as the second drain extension, the second input channel portion being part of a second source-adjoining, threshold body zone of the second conductivity type extending approximately as deep into the semiconductive body as the first drain extension, each of the threshold body zones and the drain extensions reaching a maximum net dopant concentration at a depth of at least 0.05 μm into the semiconductive body; and a second gate electrode situated above the second channel zone and vertically separated from it by bate dielectric material.

Claim 36

A structure as in claim 28 wherein the first and second drain extensions substantially extend at least as deep into the semiconductive body respectively as the first and second main drain portions.

Claim 37

A structure as in claim 28 wherein: the first gate electrode comprises non-monocrystalline semiconductive material of the second conductivity type; and the second gate electrode comprises non-monocrystalline semiconductive material of the first conductivity type.