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US5072267A Expired / Lapsed US ⏱️ 0.0 years remaining

Complementary field effect transistor

Assignee: NEC Corp
•
Filing: 1990-06-26
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Granted: 1991-12-10
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Expires: 2010-06-26
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Abstract

Abstract Complementary field effect transistors are provided wherein double-diffusion MOS FETs including an N-channel and a P-channel are formed on one and the same semiconductor substrate. These two channels are respectively formed in well base regions having the same conductivity type, the well base regions being spaced from each other. A double diffusion P-channel MOS FET has drain regions of the conductivity type which is opposite to the conductivity of a well base region, adjoining a base region of the same conductivity type as the well base region. The P-channel is formed to have a thickness which is less than the thickness of the base region, to thereby realize a diffusion P-channel MOS FET having a short channel.

Inventors

  • 👤 Masayuki Hattori

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 10:39
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D84/85; H10D84/857; H10D30/00; H10D30/60; H10D30/64; H10D30/65; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10D62/156; H10D62/157

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 250 words
A complementary field effect transistor comprising an N-channel double-diffusion field effect transistor and a P-channel double-diffusion field effect transistor each of which is formed in a corresponding one of two well base regions of a first conductivity type formed with a given interval on a main surface of a semiconductor substrate of a second conductivity type which is opposite to the first conductivity type, said N-channel double-diffusion field effect transistor comprising a first base region of said second conductivity type, a first source region of said first conductivity type formed in said first base region, a first drain region of said first conductivity type formed in said well base region, a first high concentration drain region, and a first gate electrode formed on the semiconductor substrate between said first high concentration drain region and said first source region through a first gate insulating film, and said P-channel double-diffusion field effect transistor comprising a second drain region of said second conductivity type formed in said well base region, a second base region of said first conductivity type having a thickness which is greater than a thickness of said second drain region, a second source region of said second conductivity type formed in said second base region, a second high concentration drain region of said second conductivity type formed in said second drain region, and a second gate electrode formed on the semiconductor substrate between said second high concentration drain region and said second source region through a second gate insulating film.
Claim 2
Dependent Claim 250 words
A complementary field effect transistor comprising an N-channel double-diffusion field effect transistor and a P-channel double-diffusion field effect transistor each of which is formed in a corresponding one of two well base regions of a first conductivity type formed with a given interval on a main surface of a semiconductor substrate of a second conductivity type which is opposite to the first conductivity type, said N-channel double-diffusion field effect transistor comprising a first base region of said second conductivity type, a first source region of said first conductivity type formed in said first base region, a first drain region of said first conductivity type formed in said well base region, a first high concentration drain region, and a first gate electrode formed on the semiconductor substrate between said first high concentration drain region and said first source region through a first gate insulating film, and said P-channel double-diffusion field effect transistor comprising a second drain region of said second conductivity type formed in said well base region, a second base region of said first conductivity type having a thickness which is greater than a thickness of said second drain region, a second source region of said second conductivity type formed in said second base region, a second high concentration drain region of said second conductivity type formed in said second drain region, and a second gate electrode formed on the semiconductor substrate between said second high concentration drain region and said second source region through a second gate insulating film.
Claim 3
Dependent Claim 20 words
A complementary field effect transistor as claimed in claim 1 wherein the two well base regions are both diffusion layers.
Claim 4
Dependent Claim 53 words
A complementary field effect transistor as claimed in claim 1 wherein the two well base regions comprise epitaxial regions a first conductivity type formed on the semiconductor substrate of the second conductivity type, said epitaxial regions being separated from each other by a high concentration diffusion isolation region of said second conductivity type.
Claim 5
Dependent Claim 101 words
A complementary field effect transistor as claimed in claim 1 wherein the first gate insulating film on the first drain region of said first conductivity type and the first high concentration drain region of said first conductivity type, and the second gate insulating film on the second drain region of said second conductivity type and the second high concentration drain region of said second conductivity type are thicker as compared with other parts thereof to such an extent that degradation of breakdown voltage caused by concentration of fields around ends of the first and the second gate electrodes is substantially prevented.
Claim 6
Dependent Claim 34 words
A complementary field effect transistor as claimed in claim 1 wherein the second base region has a thickness of about 2.0 μm, and the second drain region has a thickness of about 1.5 μm.
Claim 7
Dependent Claim 30 words
A complementary field effect transistor as claimed in claim 1, wherein said first base region, said second drain region, and said second high concentration drain region are of P-conductivity type.
Claim 8
Dependent Claim 31 words
A complementary field effect transistor as claimed in claim 1, wherein said first base region includes a first high concentration base region of same conductivity type as said first base region.
Claim 9
Dependent Claim 31 words
A complementary field effect transistor as claimed in claim 1, wherein said second base region includes a second high concentration base region of same conductivity type as said second base region.

References Cited (Backward Citations)

US4698655A Cited
US4680604A Cited
US4928155A Cited
US4884113A Cited
US4694313A Cited
JPS6258683A Cited
US4823173A Cited
US4929991A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-12-09 1995-06-10 1995-12-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-12-09 1999-06-10 1999-12-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-12-09 2003-06-10 2003-12-10 $7700.00 Window Closed / Lapsed

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