US4282648A
Expired / Lapsed
US
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CMOS process
Assignee: Intel Corp
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Filing: 1980-03-24
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Granted: 1981-08-11
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Expires: 2000-03-24
Abstract
Abstract A CMOS Process for fabricating channel stops which are substantially formed as a by-product of growing a field oxide is described. A p-type region is formed at an edge (or edges) of an n-type well through an opening in a silicon nitride layer. An oxide is grown at the opening. As the oxide grows, n-type dopant from the n-type well accumulates at the edge of the oxide, forming a more highly doped n-type region. Simultaneously, an adjacent p-type region is formed under the oxide from the p-type dopant. The process also permits easy fabrication of a buried contact to the p-channel device thus eliminating the need for a metal contact when forming a bistable circuit.
Inventors
- 👤 Kenneth K. Yu
- 👤 Mark T. Bohr
- 👤 Mark B. Seidenfeld
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 06:42
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/102; H10D62/112; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/0188; H10D84/02; H10D84/03; H10D84/038; H10P; H10P32/00; H10P32/10; H10P32/14; H10P32/1404; H10P32/1406; H10P32/17; H10P32/171; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/0125; H10W10/0126; H10W10/0127; H10W10/10; H10W10/13; H10W20/00; H10W20/01; H10W20/021; Y; Y10; Y10S; Y10S148/00; Y10S148/053; Y10S148/07; Y10S148/117
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
114 words
In the fabrication of CMOS integrated circuits, a process for forming a channel stop in a substrate, which includes an n-type region and a silicon nitride layer, comprising the steps of: defining an opening through said silicon nitride layer, said opening being formed at a peripheral area of said n-type region; doping said substrate with a p-type dopant through said opening; and forming an oxide on said substrate at said opening, such that a first region is formed from accumulated n-type dopant from said n-type region and a second region is formed adjacent to said first region from p-type dopant from said doping step; whereby said first and second regions form a channel stop.
Claim 2
Dependent Claim
114 words
In the fabrication of CMOS integrated circuits, a process for forming a channel stop in a substrate, which includes an n-type region and a silicon nitride layer, comprising the steps of: defining an opening through said silicon nitride layer, said opening being formed at a peripheral area of said n-type region; doping said substrate with a p-type dopant through said opening; and forming an oxide on said substrate at said opening, such that a first region is formed from accumulated n-type dopant from said n-type region and a second region is formed adjacent to said first region from p-type dopant from said doping step; whereby said first and second regions form a channel stop.
Claim 3
Dependent Claim
15 words
The process defined by claim 1 wherein said doping step comprises ion implanation with boron.
Claim 4
Dependent Claim
125 words
In the fabrication of CMOS integrated circuits, a process for forming an isolation region in a substrate comprising the steps of: forming an n-type well in said substrate; forming a layer of silicon nitride on said substrate; defining an opening in said silicon nitride, said opening overlying a portion of said well and a portion of said substrate adjacent to said well; doping said substrate through said opening with a p-type dopant; and forming an oxide on said substrate at said opening such that said formation of said oxide causes an accumulation of n-type dopant from said well under said oxide adjacent to a p-type region formed under said oxide, whereby said n-type region and adjacent p-type region under said oxide form an isolation region.
Claim 5
Dependent Claim
125 words
In the fabrication of CMOS integrated circuits, a process for forming an isolation region in a substrate comprising the steps of: forming an n-type well in said substrate; forming a layer of silicon nitride on said substrate; defining an opening in said silicon nitride, said opening overlying a portion of said well and a portion of said substrate adjacent to said well; doping said substrate through said opening with a p-type dopant; and forming an oxide on said substrate at said opening such that said formation of said oxide causes an accumulation of n-type dopant from said well under said oxide adjacent to a p-type region formed under said oxide, whereby said n-type region and adjacent p-type region under said oxide form an isolation region.
Claim 6
Dependent Claim
35 words
The process defined by claim 3 wherein said n-type well is formed by the steps of: forming an oxide layer on said substrate; etching said oxide layer to define a substrate region for said well.
Claim 7
Dependent Claim
49 words
The process defined by claim 4 including the additional steps of: regrowing an oxide layer over said well after said formation of said n-type well such that a misible edge is produced in said oxide which delineates said well, thereby permitting easier identification of said well during subsequent processing.
Claim 8
Dependent Claim
15 words
The process defined by claim 3 wherein said well is formed with a phosphorus dopant.
Claim 9
Dependent Claim
12 words
The process defined by claim 6 wherein said p-type dopant is boron.
Claim 10
Dependent Claim
183 words
A CMOS process for forming a p-channel transistor with an integral buried contact and channel stop, comprising the steps of: forming an n-type well in a substrate; doping a first region with a p-type dopant at the periphery of said n-type well; growing an oxide at said first region so as to form a channel stop comprising adjacent n-type and p-type regions; forming spaced-apart, p-type source and drain regions in said substrate within said n-type well for said p-channel transistor, one of said source and drain regions being adjacent to said n-type region of said channel stop; forming a polysilicon layer doped with an n-type dopant on said substrate, said polysilicon layer contacting one of said source and drain regions so as to form an n-type region within the said one of said source and drain regions; and pattering said polysilicon layer to form a gate member between said spaced-apart source and drain regions and a line in contact with the said one of said source and drain regions; whereby a p-channel transistor with an integral buried contact and channel stop is fabricated.
Claim 11
Dependent Claim
183 words
A CMOS process for forming a p-channel transistor with an integral buried contact and channel stop, comprising the steps of: forming an n-type well in a substrate; doping a first region with a p-type dopant at the periphery of said n-type well; growing an oxide at said first region so as to form a channel stop comprising adjacent n-type and p-type regions; forming spaced-apart, p-type source and drain regions in said substrate within said n-type well for said p-channel transistor, one of said source and drain regions being adjacent to said n-type region of said channel stop; forming a polysilicon layer doped with an n-type dopant on said substrate, said polysilicon layer contacting one of said source and drain regions so as to form an n-type region within the said one of said source and drain regions; and pattering said polysilicon layer to form a gate member between said spaced-apart source and drain regions and a line in contact with the said one of said source and drain regions; whereby a p-channel transistor with an integral buried contact and channel stop is fabricated.
Claim 12
Dependent Claim
57 words
The process defined by claim 8 wherein said gate member is fabricated spaced-apart from said source and drain regions and where an additional doping step is employed to form two additional p-type regions more lightly doped than said source and drain regions which interconnect said source and drain regions to beneath opposite edges of said gate member.
Claim 13
Dependent Claim
16 words
The process defined by claim 9 wherein said first region is formed with a boron dopant.
Claim 14
Dependent Claim
16 words
The process defined by claim 10 wherein said n-type well is formed with a phosphorus dopant.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-08-10 | 1985-02-09 | 1985-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-08-10 | 1989-02-09 | 1989-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-08-10 | 1993-02-09 | 1993-08-11 | $7700.00 | Window Closed / Lapsed |