US6916398B2
Expired / Lapsed
US
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Gas delivery apparatus and method for atomic layer deposition
Assignee: Applied Materials Inc
•
Filing: 2001-12-21
•
Granted: 2005-07-12
•
Expires: 2021-12-21
Abstract
Abstract One embodiment of the gas delivery assembly comprises a covering member having an expanding channel at a central portion of the covering member and having a bottom surface extending from the expanding channel to a peripheral portion of the covering member. One or more gas conduits are coupled to the expanding channel in which the one or more gas conduits are positioned at an angle from a center of the expanding channel. One embodiment of a chamber comprises a substrate support having a substrate receiving surface. The chamber further includes a chamber lid having a passageway at a central portion of the chamber lid and a tapered bottom surface extending from the passageway to a peripheral portion of the chamber lid. The bottom surface of the chamber lid is shaped and sized to substantially cover the substrate receiving surface. One or more valves are coupled to the passageway, and one or more gas sources are coupled to each valve. In one aspect, the bottom surface of the chamber lid may be tapered. In another aspect, a reaction zone defined between the chamber lid and the substrate receiving surface may comprise a small volume. In still another aspect, the passageway may comprise a tapered expanding channel extending from the central portion of the chamber lid. Another embodiment of the chamber comprises a substrate support having a substrate receiving surface. The chamber further comprises a chamber lid having an expanding channel extending from a central portion of the chamber lid and having a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid. One or more gas conduits are disposed around an upper portion of the expanding channel in which the one or more gas conduits are disposed at an angle from a center of the expanding channel. A choke is disposed on the chamber lid adjacent a perimeter of the tapered bottom surface.
Inventors
- 👤 Ling Chen
- 👤 Vincent Ku
- 👤 Dien-Yeh Wu
- 👤 Hua Chung
- 👤 Alan Ouye
- 👤 Norman Nakashima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:43
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10P14/432; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/44; C23C16/4411; C23C16/4412; C23C16/455; C23C16/45502; C23C16/45504; C23C16/45508; C23C16/45512; C23C16/45523; C23C16/45525; C23C16/45544; C23C16/45563; C23C16/45582; H10W20/031; H10W20/032; H10W20/033; H10W20/035; H10W20/042
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
159 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising; an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface, and wherein a plurality of flow sections are defined between the tapered bottom surface of the chamber lid and the substrate receiving surface, wherein a ratio of a maximum area of the flow sections to a minimum area of the flow sections is less than about 2.0; one or more gas conduits coupled to the expanding channel, wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel and wherein the one or more gas conduits comprise one or more valves; and one or more gas sources coupled to each valve.
Claim 2
Dependent Claim
159 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising; an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface, and wherein a plurality of flow sections are defined between the tapered bottom surface of the chamber lid and the substrate receiving surface, wherein a ratio of a maximum area of the flow sections to a minimum area of the flow sections is less than about 2.0; one or more gas conduits coupled to the expanding channel, wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel and wherein the one or more gas conduits comprise one or more valves; and one or more gas sources coupled to each valve.
Claim 3
Dependent Claim
30 words
The chamber of claim 1 , wherein the ratio of the maximum area of the flow sections to the minimum area of the flow sections is less than about 1.5.
Claim 4
Dependent Claim
30 words
The chamber of claim 1 , wherein the ratio of the maximum area of the flow sections to the minimum area of the flow sections is less then about 1.3.
Claim 5
Dependent Claim
28 words
The chamber of claim 1 , wherein the ratio of the maximum area of the flow sections to the minimum area of the flow sections is about 1.0.
Claim 6
Dependent Claim
148 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface, and wherein a reaction zone defined between the chamber lid and the substrate receiving surface comprises about 1.000 cm 3 or less and the substrate receiving surface is adapted to receive a 200 mm diameter substrate; one or more gas conduits coupled to the expanding channel, wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel and wherein the one or more gas conduits comprise one or more valves; and one or more gas sources coupled to each valve.
Claim 7
Dependent Claim
148 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface, and wherein a reaction zone defined between the chamber lid and the substrate receiving surface comprises about 1.000 cm 3 or less and the substrate receiving surface is adapted to receive a 200 mm diameter substrate; one or more gas conduits coupled to the expanding channel, wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel and wherein the one or more gas conduits comprise one or more valves; and one or more gas sources coupled to each valve.
Claim 8
Dependent Claim
17 words
The chamber of claim 5 , wherein the reaction zone comprises about 500 cm 3 or less.
Claim 9
Dependent Claim
17 words
The chamber of claim 5 , wherein the reaction zone comprises about 200 cm 3 or less.
Claim 10
Dependent Claim
96 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom is surface shaped and sized to substantially cover the substrate receiving surface, and wherein a reaction zone defined between the chamber lid and the substrate receiving surface comprises about 3,000 cm 3 or less and the substrate receiving surface is adapted to receive a 300 mm diameter substrate.
Claim 11
Dependent Claim
96 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom is surface shaped and sized to substantially cover the substrate receiving surface, and wherein a reaction zone defined between the chamber lid and the substrate receiving surface comprises about 3,000 cm 3 or less and the substrate receiving surface is adapted to receive a 300 mm diameter substrate.
Claim 12
Dependent Claim
17 words
The chamber of claim 8 , wherein the reaction zone comprises about 1,500 cm 3 or less.
Claim 13
Dependent Claim
17 words
The chamber of claim 8 , wherein the reaction zone comprises about 600 cm 3 or less.
Claim 14
Dependent Claim
145 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface; one or more gas conduits coupled to the expanding channel, wherein at least one of the one or more gas conduits has an inner diameter which increases toward the expanding channel and wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel and wherein the one or more gas conduits comprises one or more valves and couple the one or more valves to the expanding channel; and one or more gas sources coupled to each valve.
Claim 15
Dependent Claim
145 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface; one or more gas conduits coupled to the expanding channel, wherein at least one of the one or more gas conduits has an inner diameter which increases toward the expanding channel and wherein the one or more gas conduits are positioned at an angle from a center of the expanding channel and wherein the one or more gas conduits comprises one or more valves and couple the one or more valves to the expanding channel; and one or more gas sources coupled to each valve.
Claim 16
Dependent Claim
28 words
The chamber of claim 11 , wherein at least one of the one or more gas conduits has a tapered inner diameter which increases toward the expanding channel.
Claim 17
Dependent Claim
32 words
The chamber of claim 11 , wherein at least one of the one or more gas conduits comprises a plurality of sections having a progressively larger inner diameter toward the expanding channel.
Claim 18
Dependent Claim
119 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface; one or more gas conduits coupled to the expanding channel, wherein a longitudinal axis of at least one of the one or more gas conduits is not parallel to a longitudinal axis of the expanding channel, and wherein the one or more gas conduits comprise one or more valves; and one or more gas sources coupled to each valve.
Claim 19
Dependent Claim
119 words
A chamber, comprising: a substrate support having a substrate receiving surface; a chamber lid comprising: an expanding channel at a central portion of the chamber lid; and a tapered bottom surface extending from the expanding channel to a peripheral portion of the chamber lid, wherein the tapered bottom surface is shaped and sized to substantially cover the substrate receiving surface; one or more gas conduits coupled to the expanding channel, wherein a longitudinal axis of at least one of the one or more gas conduits is not parallel to a longitudinal axis of the expanding channel, and wherein the one or more gas conduits comprise one or more valves; and one or more gas sources coupled to each valve.
Claim 20
Dependent Claim
36 words
The chamber of claim 14 , wherein the longitudinal axis of at least one of the one or more gas conduits is disposed at a 90 degree angle to the longitudinal axis of the expanding channel.
Claim 21
Dependent Claim
42 words
The chamber of claim 14 , wherein the longitudinal axis of at least one of the one or more gas conduits is angled downwardly with respect to a plane which could be drawn perpendicular to the longitudinal axis of the expanding channel.
Claim 22
Dependent Claim
42 words
The chamber of claim 14 , wherein the longitudinal axis of at least one of the one or more gas conduits is angled upwardly with respect to a plane which could be drawn perpendicular to the longitudinal axis of the expanding channel.
Claim 23
Dependent Claim
32 words
The chamber of claim 11 , wherein a longitudinal axis of at least one of the one or more gas conduits is not parallel to a longitudinal axis of the expanding channel.
Claim 24
Dependent Claim
36 words
The chamber of claim 11 , wherein a longitudinal axis of a least one of the one or more gas conduits is disposed at a 90 degree angle to the longitudinal axis of the expanding channel.
Claim 25
Dependent Claim
42 words
The chamber of claim 11 , wherein a longitudinal axis of a least one of the one or more gas conduits is angled downwardly with respect to a plane which could be drawn perpendicular to the longitudinal axis of the expanding channel.
Claim 26
Dependent Claim
42 words
The chamber of claim 11 , wherein a longitudinal axis of at least one of the one or more gas conduits is angled upwardly with respect to a plane which could be drawn perpendicular to the longitudinal axis of the expanding channel.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-07-11 | 2009-01-10 | 2009-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-07-11 | 2013-01-10 | 2013-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-07-11 | 2017-01-10 | 2017-07-12 | $7700.00 | Window Closed / Lapsed |