US4486487A
Expired / Lapsed
US
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Combination film, in particular for thin film electroluminescent structures
Assignee: PLANAR INTERNATIONAL A CORP OF FINLAND Oy
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Filing: 1983-04-25
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Granted: 1984-12-04
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Expires: 2003-04-25
Abstract
Abstract Described herein is a combination film based on aluminium oxide (Al2O3) and titanium oxide (TiO2), to be used in particular in the thin film electroluminescent structures. Aluminum oxide is an amorphous insulator having a low refraction index, whereas titanium oxide is a chrystalline conductor having a high refraction index. The combination film according to the invention comprises a plurality of alternating aluminium oxide and titanium oxide layers having a thickness of 3 to 1000 ANGSTROM . preferably 5 to 250 ANGSTROM . Such a combination film has favorable dielectric strength and refraction index properties and is particularly adapted for use in electroluminescence structures.
Inventors
- 👤 Jarmo I. Skarp
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 19:34
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/662; H05; H05B; H05B33/00; H05B33/12; H05B33/22; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6339; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69394; H10P14/69391; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24967; Y10T428/24975
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
49 words
An insulative film for a thin film structure, comprising alternating layers of aluminum oxide (Al 2 O 3 ) and titanium oxide (TiO 2 ), said film having between 10 and 200 of said layers, wherein each layer has a thickness in the range of 3 to 1000 Å.
Claim 2
Dependent Claim
49 words
An insulative film for a thin film structure, comprising alternating layers of aluminum oxide (Al 2 O 3 ) and titanium oxide (TiO 2 ), said film having between 10 and 200 of said layers, wherein each layer has a thickness in the range of 3 to 1000 Å.
Claim 3
Dependent Claim
23 words
An insulative film as set forth in claim 1, wherein the thickness of each said layer is in the range of 20-100 Å.
Claim 4
Dependent Claim
23 words
An insulative film as set forth in claim 1, wherein the thickness of each said layer is in the range of 40-70 Å.
Claim 5
Dependent Claim
18 words
An insulative film as set forth in claim 1, wherein said layers of the film comprise ALE layers.
Claim 6
Dependent Claim
27 words
An insulative film as set forth in claim 4, wherein the cycle ratio Al 2 O 3 /TiO 2 is within the range of 5/500 to 30/5.
Claim 7
Dependent Claim
25 words
An insulative film as set forth in claim 1, wherein the weight ratio Ti/(Al+Ti) of the film is in the range of 0.45 to 0.55.
Claim 8
Dependent Claim
26 words
An insulative film as set forth in claim 1, wherein the thickness of the Al 2 O 3 layers is in the range of 50-70 Å.
Claim 9
Dependent Claim
17 words
An insulative film as set forth in claim 1, wherein said layers are of substantially equal thickness.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-04 | 1988-06-04 | 1988-12-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-04 | 1992-06-04 | 1992-12-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-04 | 1996-06-04 | 1996-12-04 | $7700.00 | Window Closed / Lapsed |