US5701027A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Programmable interconnect structures and programmable integrated circuits
Assignee: QuickLogic Corp
•
Filing: 1996-05-21
•
Granted: 1997-12-23
•
Expires: 2016-05-21
Abstract
Abstract Antifuses and gate arrays with antifuses are disclosed that have high thermal stability, reduced size, reduced leakage current, reduced capacitance in the unprogrammed state, improved manufacturing yield, and more controllable electrical characteristics. Some antifuses include spacers in the antifuse via. In some antifuses, the programmable material is planar, and the top or the bottom electrode is formed in the antifuse via. In some gate arrays, the antifuses are formed above the dielectric separating two levels of routing channels rather than below that dielectric.
Inventors
- 👤 Kathryn E. Gordon
- 👤 Richard J. Wong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:55
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; Y; Y10; Y10S; Y10S148/00; Y10S148/055
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
119 words
An integrated structure comprising an antifuse comprising: a first conductor; an insulating layer overlaying said first conductor and having a first opening therethrough; a conductive plug filling the first opening and contacting the first conductor, a top surface of the insulating layer having a portion adjacent to the plug, the portion being substantially coplanar with a top surface of the plug; a layer of programmable material having a substantially planar bottom surface overlaying and contacting the plug, wherein the programmable material is non-conductive over the plug when the antifuse is unprogrammed, and wherein the programmable material provides therethrough a conductive path contacting the plug when the antifuse is programmed; and a second conductor overlaying and contacting the programmable material.
Claim 2
Dependent Claim
119 words
An integrated structure comprising an antifuse comprising: a first conductor; an insulating layer overlaying said first conductor and having a first opening therethrough; a conductive plug filling the first opening and contacting the first conductor, a top surface of the insulating layer having a portion adjacent to the plug, the portion being substantially coplanar with a top surface of the plug; a layer of programmable material having a substantially planar bottom surface overlaying and contacting the plug, wherein the programmable material is non-conductive over the plug when the antifuse is unprogrammed, and wherein the programmable material provides therethrough a conductive path contacting the plug when the antifuse is programmed; and a second conductor overlaying and contacting the programmable material.
Claim 3
Dependent Claim
12 words
The structure of claim 1 wherein the programmable material comprises amorphous silicon.
Claim 4
Dependent Claim
10 words
The structure of claim 1 wherein the plug comprises tungsten.
Claim 5
Dependent Claim
23 words
The structure of claim 1 wherein the insulating layer is at least about 9000 angstroms thick at a location of the first opening.
Claim 6
Dependent Claim
165 words
The structure of claim 1 further comprising: a plurality of first conductive routing channels under the insulating layer, the first conductor being one of the first routing channels; a plurality of logic cells connected to selected first routing channels; a plurality of openings in the insulating layer, the first opening being one of the plurality of openings; a plurality of conductive plugs in the openings, each conductive plug filling a respective one of the openings, wherein for each opening a top surface of the insulating layer has a portion adjacent to the respective plug and substantially coplanar with a top surface of the respective plug; wherein the layer of programmable material has over each plug a substantially planar bottom surface contacting the plug; and wherein the structure further comprises a plurality of second routing channels substantially orthogonal to the first routing channels, the second routing channels overlaying and contacting the programmable material over the plugs, the second conductor being one of the second routing channels.
Claim 7
Dependent Claim
23 words
The structure of claim 1 wherein the second conductor comprises: titanium tungsten; and aluminum separated from the programmable material by the titanium tungsten.
Claim 8
Dependent Claim
14 words
The integrated structure of claim 1 wherein the first conductor is made of metal.
Claim 9
Dependent Claim
31 words
The integrated structure of claim 1 wherein the substantially planar bottom surface of the programmable material overlays and contacts at least said portion of the top surface of the insulating layer.
Claim 10
Dependent Claim
20 words
The integrated structure of claim 1 wherein said portion of the top surface of the insulating layer surrounds the plug.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-22 | 2001-06-23 | 2001-12-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-22 | 2005-06-23 | 2005-12-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-22 | 2009-06-23 | 2009-12-23 | $7700.00 | Window Closed / Lapsed |