US5106773A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Programmable gate array and methods for its fabrication
Assignee: Texas Instruments Inc
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Filing: 1990-10-09
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Granted: 1992-04-21
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Expires: 2010-10-09
Abstract
Abstract Circuitry 12 is formed at the face of a layer semiconductor 34. The circuitry includes a plurality of contact points 22 and 24. At least one anti-fuse 14 is formed in a layer vertically displaced from circuitry 12. Anti-fuse 14 is operable to selectively connect together certain ones of said contact points 22 and 24.
Inventors
- 👤 Cheing-Long Chen
- 👤 David K. Liu
- 👤 Howard L. Tigelaar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:49
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/90; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
80 words
A method for forming an improved programmable logic array, comprising the steps of: forming a plurality of functional devices at a face of a layer of semiconductor, each of said logic devices having at least one input/output terminal; forming an array of anti-fuses vertically displaced at a level totally above said devices and said terminals; and forming a plurality of interlevel conductors extending above and below said array, coupling selected ones of said input/outputs with selected ones of said anti-fuses.
Claim 2
Independent Claim
80 words
A method for forming an improved programmable logic array, comprising the steps of: forming a plurality of functional devices at a face of a layer of semiconductor, each of said logic devices having at least one input/output terminal; forming an array of anti-fuses vertically displaced at a level totally above said devices and said terminals; and forming a plurality of interlevel conductors extending above and below said array, coupling selected ones of said input/outputs with selected ones of said anti-fuses.
Claim 3
Dependent Claim
153 words
The method of claim 1, wherein said step of forming a plurality of anti-fuses further comprising the steps of: forming a first layer of conductor; selectively etching the first layer of conductor to form a plurality of rows of elongated conductors; depositing and patterning a layer of insulator to form windows selectively exposing portions of said conductor; forming a layer of anti-fuse material across the layer of insulator, the layer of anti-fuse material extending through the windows to contact the exposed portions of the first level of elongated conductors; forming a second layer of conductor across the layer of anti-fuse material; and selectively etching the second layer of conductor and the layer of anti-fuse material to form a plurality of columns formed of elongated conductors having an adjacent layer of anti-fuse material, at an angle to the rows, such that an anti-fuse is disposed at the intersection of a row and a column.
Claim 4
Dependent Claim
126 words
The method of claim 1, wherein said step of forming a plurality of anti-fuses comprises the substeps of: forming a first layer of conductor vertically spaced from the face of the layer of semiconductor; selectively etching the first layer of conductor to define a plurality of rows of elongated conductors; forming a layer of anti-fuse material adjacent the rows of elongated conductors; forming a second layer of conductor adjacent the layer of anti-fuse material; and selectively etching the second layer of conductor and the layer of anti-fuse material to define a plurality of elongated conductors having an adjacent layer of anti-fuse material, the columns formed at an angle to the rows, such that an anti-fuse is disposed at the intersection of a row and a column.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-21 | 1995-10-21 | 1996-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-21 | 1999-10-21 | 2000-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-21 | 2003-10-21 | 2004-04-21 | $7700.00 | Window Closed / Lapsed |