US6184060B1
Expired / Lapsed
US
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Integrated circuits and methods for their fabrication
Assignee: Adeia Semiconductor Technologies LLC
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Filing: 1998-05-22
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Granted: 2001-02-06
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Expires: 2018-05-22
Abstract
Abstract To fabricate back side contact pads that are suitable for use in a vertical integrated circuit, vias are made in the face side of a wafer, and dielectric and contact pad metal are deposited into the vias. Then the wafer back side is etched until the metal is exposed. When the etch exposes the insulator at the via bottoms, the insulator is etched slower than the wafer material (e.g. silicon). Therefore, when the dielectric is etched off and the metal is exposed, the dielectric protrudes down from the wafer back side around the exposed metal contact pads, by about 8 μm in some embodiments. The protruding dielectric portions improve insulation between the wafer and the contact pads when the contact pads are soldered to an underlying circuit. In some embodiments, before the contact pads are soldered, additional dielectric is grown on the wafer back side without covering the contact pads. In some embodiments, the wafer etch and the fabrication of the additional dielectric are performed one after another by a plasma process while the wafer is held in a non-contact wafer holder. In some embodiments, the wafer is diced and the dice are tested before the etch. The etch and the deposition of the additional dielectric are performed on good dice only. In some embodiments, the dice are not used for vertical integration.
Inventors
- 👤 Oleg Siniaguine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:31
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D62/00; H10D62/10; H10D62/117; H10W; H10W20/00; H10W20/01; H10W20/021; H10W20/023; H10W20/0245; H10W20/0249; H10W20/20; H10W20/40; H10W72/00; H10W72/071; H10W74/00; H10W74/01; H10W90/00; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P52/00; H10W46/00; H10W72/20; H10W72/241; H10W72/244; H10W72/29; H10W72/90; H10W72/941; H10W72/9415; H10W72/942; H10W90/20; H10W90/297; H10W90/701; H10W90/721; H10W90/722
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
181 words
A method for fabricating an intergrated circuit, the method comprising. (a) providing a body having one of more openings in a first side; (b) fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; (c) removing material of the body from a second side of the body to expose the first dielectric on the second side, wherein when the first dielectric becomes exposed on the second side, the first dielectric covers the conductor on the second side so that the conductor is not exposed on the second side; (d) after the first dielectric has been exposed on the second side, removing the material of the body and the first dielectric from the second side to expose the conductor in each of the openings, wherein the removing of the material of the body and the first dielectric comprises a process in which the removal rate of the first dielectric is lower than the removal rate of material of the body.
Claim 2
Independent Claim
181 words
A method for fabricating an intergrated circuit, the method comprising. (a) providing a body having one of more openings in a first side; (b) fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; (c) removing material of the body from a second side of the body to expose the first dielectric on the second side, wherein when the first dielectric becomes exposed on the second side, the first dielectric covers the conductor on the second side so that the conductor is not exposed on the second side; (d) after the first dielectric has been exposed on the second side, removing the material of the body and the first dielectric from the second side to expose the conductor in each of the openings, wherein the removing of the material of the body and the first dielectric comprises a process in which the removal rate of the first dielectric is lower than the removal rate of material of the body.
Claim 3
Dependent Claim
31 words
The method of claim 1 wherein in said process the removal rate of the first dielectric is about 10 times lower than the removal rate of the material of the body.
Claim 4
Dependent Claim
36 words
The method of claim 1 wherein removing material from the second side comprises plasma etching of the second side of the body at about an atmospheric pressure as the body is held in a non-contact holder.
Claim 5
Dependent Claim
11 words
The method of claim 1 wherein the body comprises semiconductor material.
Claim 6
Dependent Claim
55 words
The method of claim 1 further comprising, after the removal of the material from the second side, connecting at least one integrated circuit of the body to one or more other integrated circuits to form a vertical integrated circuit, with at least one of the exposed conductors contacting a contact pad of another integrated circuit.
Claim 7
Dependent Claim
27 words
The method of claim 1 wherein said process removes at least a substantial portion of the total amount of the first dielectric removed in the operation (d).
Claim 8
Dependent Claim
37 words
The method of claim 1 wherein all of the first dielectric removed in the operation (d) is removed simultaneously with removal of material of the body but at a lower rate than the material of the body.
Claim 9
Dependent Claim
40 words
The method of claim 1 wherein all of the first dielectric removed in the operation (d) is removed simultaneously with removal of semiconductor material of the body but at a lower removal rate than the semiconductor material of the body.
Claim 10
Dependent Claim
11 words
The method of claim 8 wherein the semiconductor material is silicon.
Claim 11
Dependent Claim
71 words
The method of claim 1 wherein the first dielectric in each of said openings, when viewed from the second side, is laterally surrounded by semiconductor material of the body, and when the first dielectric is being removed in each of said openings to expose the conductor from the second side, the laterally surrounding semiconductor material of the body is being removed simultaneously and at a faster rate than the first dielectric.
Claim 12
Dependent Claim
34 words
The method of claim 1 wherein removing the first dielectric at a lower rate than the material of the body improves electrical insulation between the conductor in each of said openings and the body.
Claim 13
Dependent Claim
45 words
The method of claim 1 further comprising attaching at least one conductor exposed on the second side to another conductor with solder, wherein the first dielectric protrudes from the second side around the exposed conductor and improves electrical insulation between the solder and the body.
Claim 14
Dependent Claim
35 words
The method of claim 1 wherein the operation (d) is an unmasked etch removing all of the material exposed on the second side at least until the conductor is exposed in each of the openings.
Claim 15
Dependent Claim
46 words
The method of claim 1 wherein after the conductor in each of the openings is exposed, said process continues to remove the material of the body and, at the same time, to remove the first dielectric at a lower rate than the material of the body.
Claim 16
Dependent Claim
25 words
The method of claim 1 wherein at the conclusion of the operation (d) the conductor protrudes from the second side at each of the openings.
Claim 17
Independent Claim
100 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings so that the conductor in each of the openings is separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each opening; and forming a dielectric layer on the second side of the body by a process that does not form a dielectric layer on the one or more exposed conductors.
Claim 18
Independent Claim
100 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings so that the conductor in each of the openings is separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each opening; and forming a dielectric layer on the second side of the body by a process that does not form a dielectric layer on the one or more exposed conductors.
Claim 19
Dependent Claim
55 words
The method of claim 16 wherein forming the dielectric layer on the second side of the body comprises exposing the second side to a plasma containing a species that reacts with the material of the body to form the dielectric layer but which does not form a dielectric on the one or more exposed conductors.
Claim 20
Dependent Claim
25 words
The method of claim 16 wherein when the second dielectric has been formed, the conductor protrudes from the second side at each of the openings.
Claim 21
Independent Claim
121 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each of the openings, wherein the removing of the material comprises a process in which the removal rate of the first dielectric is lower than the removal rate of material of the body; wherein in said process the removal rate of the first dielectric is higher than the removal rate of the conductor.
Claim 22
Independent Claim
121 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each of the openings, wherein the removing of the material comprises a process in which the removal rate of the first dielectric is lower than the removal rate of material of the body; wherein in said process the removal rate of the first dielectric is higher than the removal rate of the conductor.
Claim 23
Dependent Claim
29 words
The method of claim 19 wherein the removing of the material from the second side results in the conductor protruding from the second side at each of the openings.
Claim 24
Independent Claim
138 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each of the openings, wherein the removing of the material comprises a process in which the removal rate of the first dielectric is lower than the removal rate of material of the body; wherein the removal of the material from the second side of the body is followed by forming a second dielectric on the second side of the body but not on the conductor exposed on the second side.
Claim 25
Independent Claim
138 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each of the openings, wherein the removing of the material comprises a process in which the removal rate of the first dielectric is lower than the removal rate of material of the body; wherein the removal of the material from the second side of the body is followed by forming a second dielectric on the second side of the body but not on the conductor exposed on the second side.
Claim 26
Dependent Claim
25 words
The method of claim 21 wherein when the second dielectric has been formed, the conductor protrudes from the second side at each of the openings.
Claim 27
Independent Claim
91 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each of the openings and to cause the conductor in each of the openings to protrude from the second side of the body.
Claim 28
Independent Claim
91 words
A method for fabricating an integrated circuit, the method comprising: providing a body having one or more openings in a first side; fabricating a first dielectric and a conductor in each of the one or more openings with the conductor in each of the openings being separated from the body by the first dielectric; removing material from a second side of the body to expose the conductor in each of the openings and to cause the conductor in each of the openings to protrude from the second side of the body.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-02-06 | 2004-08-07 | 2005-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-02-06 | 2008-08-07 | 2009-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-02-06 | 2012-08-07 | 2013-02-06 | $7700.00 | Window Closed / Lapsed |