US5466634A — Electronic modules with interconnected surface me…

Claim 1

Independent Claim 136 words

A method for forming an electronic module comprising the steps of: (a) providing a stack comprising a plurality of stacked integrated circuit ("IC") chips, each IC chip having an edge surface, said edge surfaces at least partially defining a first surface of said stack; (b) forming a first thin-film metallization layer on said first surface of said stack; (c) forming a first insulating layer on said first thin-film metallization layer; and (d) forming a second thin-film metallization layer above a second surface of said stack, said second surface being perpendicular to said first surface of said stack, wherein said first thin-film metallization layer extends to said second surface of said stack and said second thin-film metallization layer extends beyond said first surface of said stack so as to electrically connect to said first thin-film metallization layer.

Claim 2

Independent Claim 136 words

A method for forming an electronic module comprising the steps of: (a) providing a stack comprising a plurality of stacked integrated circuit ("IC") chips, each IC chip having an edge surface, said edge surfaces at least partially defining a first surface of said stack; (b) forming a first thin-film metallization layer on said first surface of said stack; (c) forming a first insulating layer on said first thin-film metallization layer; and (d) forming a second thin-film metallization layer above a second surface of said stack, said second surface being perpendicular to said first surface of said stack, wherein said first thin-film metallization layer extends to said second surface of said stack and said second thin-film metallization layer extends beyond said first surface of said stack so as to electrically connect to said first thin-film metallization layer.

Claim 3

Dependent Claim 39 words

The method of claim 1, wherein said first insulating layer forming step (c) comprises forming said first insulating layer by applying a plurality of insulating layers to said first surface of said stack above said first thin-film metallization layer.

Claim 4

Dependent Claim 39 words

The method of claim 2, wherein said step of applying said plurality of thin insulating layers comprises sequentially transferring a first plurality of thin-film insulating layers to said first surface of said stack above said first thin-film metallization layer.

Claim 5

Dependent Claim 46 words

The method of claim 2, wherein prior to said first thin-film metallization layer forming step (b), said method further includes depositing a second insulating layer on said second surface of said stack such that said second thin-film metallization layer is formed on said second insulating layer.

Claim 6

Dependent Claim 35 words

The method of claim 4, wherein said second insulating layer forming step comprises forming said second insulating layer by sequentially transferring a second plurality of thin-film insulating layers to said second surface of said stack.

Claim 7

Dependent Claim 53 words

The method of claim 4, wherein prior to said second thin-film metallization layer forming step (d), said method further includes thinning said second insulating layer to produce a thinned insulating layer, and wherein said second thin-film metallization layer forming step (d) comprises forming said second thin-film metallization layer on said thinned insulating layer.

Claim 8

Dependent Claim 61 words

The method of claim 6, wherein after said second thin-film metallization layer forming step (d), said method further includes thinning said first insulating layer to produce a thinned first insulating layer such that a portion of said second thin-film metallization layer extending beyond said first surface of said stack is exposed on an outer surface of said thinned first insulating layer.

Claim 9

Dependent Claim 67 words

The method of claim 7, wherein after said first insulating layer thinning step, said method further includes forming a third thin-film metallization layer on said thinned first insulating layer such that said third thin-film metallization layer electrically connects to said exposed second thin-film metallization layer on said thinned surface of said first insulating layer, said third thin-film metallization layer facilitating external electrical connection of said electronic module.

Claim 10

Dependent Claim 54 words

The method of claim 7, wherein after said first insulating layer thinning step, said method further includes forming a plurality of electrical contacts on said thinned first insulating layer such that said plurality of electrical contacts is electrically connected to said first thin-film metallization layer for facilitating external electrical connection of said electronic module.

Claim 11

Dependent Claim 50 words

The method of claim 1, wherein said stack providing step (a) comprises providing said stack within a second plurality of stacked IC chips, and wherein prior to said second thin-film metallization layer forming step (d) said method further comprises separating said stack from said second plurality of stacked IC chips.

Claim 12

Independent Claim 180 words

A method for forming an electronic module comprising the steps of: (a) providing a stack comprising a plurality of stacked integrated circuit ("IC") chips, at least two IC chips, including an end IC chip, of said stack having a main surface, a transfer metallization layer disposed above said main surface and an end surface metallization layer disposed above said main surface, each IC chips of said stack having an edge surface, said edge surfaces at least partially defining a side surface of said stack; and (b) forming a first metallization layer on said side surface of said stack such that said first metallization layer electrically interconnects at least some of the stacked IC chips of said stack and such that said first metallization layer electrically connects to the end surface metallization layer of said end IC chip of said stack for facilitating external electrical connection to said at least some of the stacked IC chips through said end surface metallization layer of said end IC chip of said stack, said stack and said first metallization layer comprising the electronic module.

Claim 13

Independent Claim 180 words

A method for forming an electronic module comprising the steps of: (a) providing a stack comprising a plurality of stacked integrated circuit ("IC") chips, at least two IC chips, including an end IC chip, of said stack having a main surface, a transfer metallization layer disposed above said main surface and an end surface metallization layer disposed above said main surface, each IC chips of said stack having an edge surface, said edge surfaces at least partially defining a side surface of said stack; and (b) forming a first metallization layer on said side surface of said stack such that said first metallization layer electrically interconnects at least some of the stacked IC chips of said stack and such that said first metallization layer electrically connects to the end surface metallization layer of said end IC chip of said stack for facilitating external electrical connection to said at least some of the stacked IC chips through said end surface metallization layer of said end IC chip of said stack, said stack and said first metallization layer comprising the electronic module.

Claim 14

Dependent Claim 77 words

The method of claim 11, wherein said end surface metallization layer of each IC chip of said at least two IC chips of said stack extends towards the edge surface of each IC chip, and wherein said first metallization layer forming step (b) further comprises exposing the end surface metallization layer of the end IC chip of the stack on the side surface of the stack for facilitating electrical contact of the first surface metallization layer thereto.

Claim 15

Dependent Claim 80 words

The method of claim 12, wherein said providing step (a) further comprises providing the end IC chip of the stack with an insulating layer disposed above its end surface metallization layer and above its transfer metallization layer, and wherein said method further includes forming a plurality of electrically conductive vias through said insulating layer such that said plurality of electrically conductive vias facilitate external electrical contact to said end surface metallization layer of said end IC chip of the stack.

Claim 16

Dependent Claim 79 words

The method of claim 13, wherein said providing step (a) further comprises providing the end IC chip of the stack with an insulating layer disposed above its end surface metallization layer and above its transfer metallization layer, and wherein said method further includes forming a plurality of electrically conductive vias through said insulating layer such that said plurality of electrically conductive vias facilitate external electrical contact to said transfer metallization layer of said end IC chip of the stack.

Claim 17

Dependent Claim 58 words

The method of claim 11, wherein said providing step (a) comprises providing each IC chip of said at least two IC chips with its end surface metallization layer disposed above its transfer metallization layer for facilitating separate electrical connection to said end surface metallization layer and to said transfer metallization layer from the side surface of the stack.

Claim 18

Dependent Claim 35 words

The method of claim 11, wherein said providing step (a) comprises providing each IC chip of said at least two IC chips with its end surface metallization layer disposed co-planar with its transfer metallization layer.

Claim 19

Dependent Claim 30 words

The method of claim 11, wherein said providing step (a) comprises providing said stack within a second plurality of stacked IC chips to facilitate formation of said first metallization layer.

Claim 20

Dependent Claim 31 words

The method of claim 17, wherein subsequent to said first metallization layer forming step (b), said method further includes separating said electronic module from said second plurality of stacked IC chips.

Claim 21

Dependent Claim 52 words

The method of claim 11, wherein said method further includes forming openings in the main surface of each IC chip of the at least two IC chips of the stack during wafer processing, said openings facilitating electrical connection to the end surface metallization layer of the end IC chip of the stack.

Claim 22

Dependent Claim 42 words

The method of claim 11, wherein said providing step (a) includes providing said stack having each IC chip include a main surface, a transfer metallization layer disposed above said main surface and an end surface metallization layer disposed above said main surface.

Claim 23

Independent Claim 130 words

A method for forming an electronic module comprising the steps of: (a) providing a long stack comprising a first plurality of stacked integrated circuit ("IC") chips, each IC chip of a second plurality of IC chips of said long stack being separable from an adjacent IC chip of said long stack; (b) after said providing step (a), determining at least one segmentation point within said long stack, said segmentation point being locatable between any IC chip of said second plurality of IC chips and an adjacent IC chip of said long stack; and (c) separating said long stack into at least two small stacks, said separating being performed at said at least one segmentation point, said electronic module comprising a first small stack of said at least two small stacks.

Claim 24

Independent Claim 130 words

A method for forming an electronic module comprising the steps of: (a) providing a long stack comprising a first plurality of stacked integrated circuit ("IC") chips, each IC chip of a second plurality of IC chips of said long stack being separable from an adjacent IC chip of said long stack; (b) after said providing step (a), determining at least one segmentation point within said long stack, said segmentation point being locatable between any IC chip of said second plurality of IC chips and an adjacent IC chip of said long stack; and (c) separating said long stack into at least two small stacks, said separating being performed at said at least one segmentation point, said electronic module comprising a first small stack of said at least two small stacks.

Claim 25

Dependent Claim 37 words

The method of claim 21, wherein after said providing step (a), said method includes testing each IC chip of said long stack, and wherein said determining step (b) comprises determining a segmentation point based upon said testing.

Claim 26

Dependent Claim 88 words

The method of claim 22, wherein said providing step (a) comprises providing each IC chip of said long stack with an edge surface, said edge surfaces at least partially defining a side surface of the long stack, and wherein prior to said testing step said method further comprises forming a plurality of electrical contacts on said side surface of said long stack, said plurality of electrical contacts being electrically connected to said plurality of IC chips for facilitating the testing of each IC chip of said long stack.

Claim 27

Dependent Claim 73 words

The method of claim 23, wherein subsequent to said testing step, said method further includes forming a first metallization layer on said side surface of said long stack such that said first metallization layer electrically contacts at least some of said plurality of electrical contacts, said first metallization layer having a pattern based upon results of said testing step such that said electronic module comprises an interconnected plurality of stacked functional IC chips.

Claim 28

Dependent Claim 71 words

The method of claim 24, wherein said determining step (b) further includes determining a plurality of segmentation points based upon said testing step, and wherein said first metallization layer forming step comprises patterning said first metallization layer so as to form a plurality of electrically independent electronic modules from said long stack, and wherein said separating step (c) comprises separating said long stack into said plurality of electrically independent electronic modules.

Claim 29

Dependent Claim 78 words

The method of claim 21, wherein said providing step (a) further comprises providing said long stack with an adhesive layer joining each IC chip of said second plurality of IC chips of the long stack to an adjacent IC chip in the long stack, and wherein said separating step (c) includes reducing the adhesivity of an adhesive layer associated with said at least one segmentation point for facilitating the separating of said electronic module from said long stack.

Claim 30

Dependent Claim 32 words

The method of claim 26, wherein said separating step (c) further includes reducing the adhesivity of the adhesive layer associated with the at least one segmentation point by heating the adhesive layer.

Claim 31

Dependent Claim 41 words

The method of claim 29, wherein said separating step (c) further comprises etching a channel in the side surface of said long stack at said at least one segmentation point for facilitating separation of the electronic module from the long stack.

Claim 32

Dependent Claim 17 words

The method of claim 28, wherein said etching a channel comprises etching a channel using laser ablation.

Claim 33

Dependent Claim 76 words

The method of claim 28, wherein at least one electrical contact is disposed on the side surface of the long stack, said at least one electrical contact being disposed perpendicular to said adhesive layer associated with said at least one segmentation point and intersecting a plane defined thereby, and wherein said separating step (c) includes etching said channel through said at least one electrical contact for facilitating separation of the electronic module from the long stack.

Claim 34

Dependent Claim 36 words

The method of claim 30, wherein said step of etching said channel comprises etching said channel at said at least one segmentation point such that said adhesive layer is exposed by said etching of said channel.

Claim 35

Dependent Claim 64 words

The method of claim 21, wherein said providing step (a) further comprises providing each IC chip of said long stack being separable from an adjacent IC chip of said long stack, and wherein said determining step (b) further includes determining at least one segmentation point within said long stack, said segmentation point being locatable between any two adjacent IC chips of said long stack.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1998-11-13	1999-05-15	1999-11-14	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2002-11-13	2003-05-15	2003-11-14	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2006-11-13	2007-05-15	2007-11-14	$7700.00	Window Closed / Lapsed

Electronic modules with interconnected surface metallization layers and fabrication methods therefore

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