US4737470A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making three dimensional structures of active and passive semiconductor components
Assignee: Texas Instruments Inc
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Filing: 1986-09-12
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Granted: 1988-04-12
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Expires: 2006-09-12
Abstract
Abstract The disclosure relates to a three dimensional semiconductor structure formed in a semiconductor substrate wherein electrical components, both active and passive, are formed on the substrate surface as well as in grooves formed in the substrate at an angle and extending to the surface. The substrate surface is designed to lie in a predetermined crystallographic plane of the substrate material and the grooves extend in a predetermined crystallographic direction from said plane, this being accomplished by orientation dependent etching.
Inventors
- 👤 Kenneth E. Bean
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 08:28
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/01; H10D84/02; H10D84/03; H10D84/038; H10D88/00; H10D88/01; Y; Y10; Y10S; Y10S148/00; Y10S148/164; Y10S438/00; Y10S438/973; Y10S438/98
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
83 words
A method of forming a three dimensional semiconductor structure comprising the steps of: (a) providing a semiconductor substrate having a surface defining a predetermined crystallographic plane of said substrate; (b) etching grooves extending to said surface and defined by walls in said substrate in a predetermined crystallographic direction of said substrate; (c) forming a first semiconductor component on said surface; (d) forming a second semiconductor component on a said wall; and (e) electrically interconnecting said first semiconductor component and said second semiconductor component.
Claim 2
Independent Claim
83 words
A method of forming a three dimensional semiconductor structure comprising the steps of: (a) providing a semiconductor substrate having a surface defining a predetermined crystallographic plane of said substrate; (b) etching grooves extending to said surface and defined by walls in said substrate in a predetermined crystallographic direction of said substrate; (c) forming a first semiconductor component on said surface; (d) forming a second semiconductor component on a said wall; and (e) electrically interconnecting said first semiconductor component and said second semiconductor component.
Claim 3
Dependent Claim
18 words
A method as set forth in claim 1 wherein said said second semiconductor component extends into said wall.
Claim 4
Dependent Claim
24 words
A method as set forth in claim 1 wherein said connecting means is disposed on at least one of said walls and said surface.
Claim 5
Dependent Claim
24 words
A method as set forth in claim 2 wherein said connecting means is disposed on at least one of said walls and said surface.
Claim 6
Dependent Claim
14 words
A method as set forth in claim 1 wherein said crystallographic plane is (110).
Claim 7
Dependent Claim
14 words
A method as set forth in claim 2 wherein said crystallographic plane is (110).
Claim 8
Dependent Claim
14 words
A method as set forth in claim 3 wherein said crystallographic plane is (110).
Claim 9
Dependent Claim
14 words
A method as set forth in claim 4 wherein said crystallographic plane is (110).
Claim 10
Dependent Claim
14 words
A method as set forth in claim 5 wherein said crystallographic direction is <110>.
Claim 11
Dependent Claim
14 words
A method as set forth in claim 6 wherein said crystallographic direction is <110>.
Claim 12
Dependent Claim
14 words
A method as set forth in claim 7 wherein said crystallographic direction is <110>.
Claim 13
Dependent Claim
14 words
A method as set forth in claim 8 wherein said crystallographic direction is <110>.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-12 | 1991-10-12 | 1992-04-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-12 | 1995-10-12 | 1996-04-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-12 | 1999-10-12 | 2000-04-12 | $7700.00 | Window Closed / Lapsed |