US5716495A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cleaning method
Assignee: Tel Manufacturing and Engineering of America Inc
•
Filing: 1996-03-25
•
Granted: 1998-02-10
•
Expires: 2016-03-25
Abstract
Abstract A method for removing native oxides and other contaminants from a wafer surface while minimizing the loss of a desired film on the wafer surface. The method is carried out in a hermetically sealed reactor. A fluorine-containing gas or gas mixture is passed over the wafer during simultaneous exposure to ultraviolet radiation in the absence of added water, hydrogen, hydrogen fluoride or hydrogen containing organics, thereby avoiding the production of water as a reaction product. The addition of ultraviolet radiation and the elimination of water, hydrogen, hydrogen fluoride and hydrogen containing organics provides for the nearly equivalent (non-selective) removal of various forms of oxide and also provides for improved process control.
Inventors
- 👤 Jeffery W. Butterbaugh
- 👤 David C. Gray
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:11
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/23; H10P70/10; H10P70/12; B; B08; B08B; B08B7/00; B08B7/0035; B08B7/0057; C; C03; C03C; C03C15/00; C03C23/00; C03C23/0005; C03C23/002; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/0236; H10P14/00; H10P14/60; H10P14/61; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P70/234; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
205 words
A method for cleaning a surface of a substrate, the substrate being formed of a silicon, silicon dioxide or gallium arsenide material and the substrate surface having thereon an undesired material to be removed from the surface of the substrate, the undesired material comprising a first silicon oxide material, the substrate surface also having thereon a second silicon oxide material which is different from the first silicon oxide material and which is desired to be retained on said substrate after performance of said method, the second silicon oxide material being selected from the group consisting of doped silicon oxide, deposited silicon oxide, and thermally grown silicon oxide, the method comprising the steps of: placing the substrate in a gaseous environment comprising at least one fluorine containing gas selected from the group consisting of fluorine and fluorine containing gases, other than F 2 O, which are free of hydrogen and which can be photodissociated with light of a wavelength in the range of 180-600 nm, the gaseous environment being substantially free of plasma products, water, hydrogen, hydrogen fluoride and hydrogen containing organic compounds, and exposing the substrate to UV irradiation in the presence of the gaseous environment until the first silicon oxide material has been removed.
Claim 2
Independent Claim
205 words
A method for cleaning a surface of a substrate, the substrate being formed of a silicon, silicon dioxide or gallium arsenide material and the substrate surface having thereon an undesired material to be removed from the surface of the substrate, the undesired material comprising a first silicon oxide material, the substrate surface also having thereon a second silicon oxide material which is different from the first silicon oxide material and which is desired to be retained on said substrate after performance of said method, the second silicon oxide material being selected from the group consisting of doped silicon oxide, deposited silicon oxide, and thermally grown silicon oxide, the method comprising the steps of: placing the substrate in a gaseous environment comprising at least one fluorine containing gas selected from the group consisting of fluorine and fluorine containing gases, other than F 2 O, which are free of hydrogen and which can be photodissociated with light of a wavelength in the range of 180-600 nm, the gaseous environment being substantially free of plasma products, water, hydrogen, hydrogen fluoride and hydrogen containing organic compounds, and exposing the substrate to UV irradiation in the presence of the gaseous environment until the first silicon oxide material has been removed.
Claim 3
Dependent Claim
20 words
A method as in claim 1 wherein said exposing step is performed at a temperature of less than 300° C.
Claim 4
Dependent Claim
44 words
A method as in claim 1, wherein the second silicon oxide material is a doped silicon oxide selected from the group consisting of boron and phosphorus doped silica glass (BPSG), phosphorus doped silica glass (PSG), boron doped silica glass (BSG), and spin-on glass (SOG).
Claim 5
Dependent Claim
28 words
A method as in claim 1, wherein the second silicon oxide material comprises a composite film structure including alternating layers of undoped silicon oxide and doped silicon oxide.
Claim 6
Dependent Claim
55 words
A method as in claim 1, wherein the first silicon oxide material comprises one or more members selected from the group consisting of silicon oxides formed as a result of ambient exposure of the wafer surfaces, silicon oxides formed as an incidental result of wet or gaseous chemical processing steps, and other trace silicon oxides.
Claim 7
Dependent Claim
29 words
A method as in claim 1 wherein the undesired material to be removed from the substrate further comprises one or more organic compounds, metals, metal silicides or metal nitrides.
Claim 8
Dependent Claim
47 words
A method as in claim 6, wherein the gaseous environment comprises a fluorine containing gas selected from the group consisting of F 2 , ClF 3 , BrF 3 , and SF 6 and a facilitating gas selected from the group consisting of chlorine, bromine and oxygen.
Claim 9
Dependent Claim
30 words
A method as in claim 1 wherein the fluorine containing gas in the gaseous environment is selected from the group consisting fluorine, fluorine interhalogens, fluorides of sulfur and xenon difluoride.
Claim 10
Dependent Claim
37 words
A method as in claim 8 wherein the fluorine containing gas in the gaseous environment is selected from the group consisting of chlorine trifluoride, bromine trifluoride, bromine pentafluoride, iodine pentafluoride, xenon difluoride, sulfur hexafluoride and mixtures thereof.
Claim 11
Dependent Claim
15 words
A method as in claim 1, wherein the gaseous environment further comprises an inert gas.
Claim 12
Dependent Claim
26 words
A method as in claim 10, wherein the inert gas is selected from the group consisting of helium (He), argon (Ar), and nitrogen (N 2 ).
Claim 13
Dependent Claim
52 words
A method as in claim 1, wherein the gaseous environment further comprises at least one facilitating gas selected from the group consisting of chlorine (Cl 2 ), bromine (Br 2 ), oxygen (O 2 ) and other non-hydrogen containing gases which provide a source of atomic chlorine, bromine or oxygen by photodissociation.
Claim 14
Dependent Claim
40 words
A method as in claim 1, wherein the undesired material to be removed from the substrate further comprises one or more compounds containing silicon, oxygen, carbon, halogen, or metal atoms and different from said first and second silicon oxide materials.
Claim 15
Dependent Claim
31 words
A method as in claim 1, wherein the substrate surface has topographical features including bottom structures and the first silicon oxide material exists on the bottom structures of the topographic features.
Claim 16
Dependent Claim
29 words
A method as in claim 1, wherein the substrate has a surface having topographical features including sidewalls and the undesired material exists on the sidewalls of the topographic features.
Claim 17
Dependent Claim
27 words
A method as in claim 1, wherein the partial pressure of the fluorine containing gas in the gaseous environment is less than or equal to 1 atmosphere.
Claim 18
Dependent Claim
15 words
A method as in claim 1, wherein the gaseous environment is a flowing gaseous environment.
Claim 19
Independent Claim
245 words
A method for cleaning a surface of a substrate, the substrate being formed of a silicon, silicon dioxide or gallium arsenide material and the substrate surface having thereon an undesired material to be removed from the surface of the substrate, the undesired material comprising a first silicon oxide material, the first silicon oxide material formed as a result of ambient exposure of the wafer surfaces or formed as an incidental result of wet or gaseous chemical processing steps, the substrate surface also having thereon a second silicon oxide material which is different from the first silicon oxide material and which is desired to be retained on said substrate after performance of said method, the second silicon oxide material being a doped silicon oxide, the method comprising the steps of: (a) evacuating a hermetically-sealed processing chamber to a low base pressure, (b) introducing a silicon wafer substrate into the processing chamber, (c) introducing into said chamber and exposing the silicon wafer in said chamber to a gaseous environment comprising at least one fluorine containing gas selected from the group consisting of fluorine and fluorine containing gases, other than F 2 O, which are free of hydrogen and which can be photodissociated, the gaseous environment being substantially free of plasma products, water, hydrogen, hydrogen fluoride and hydrogen containing organic compounds, (d) exposing the gaseous environment and substrate in said chamber to ultraviolet light, (e) evacuating the processing chamber, and (f) removing the substrate from the processing chamber.
Claim 20
Independent Claim
245 words
A method for cleaning a surface of a substrate, the substrate being formed of a silicon, silicon dioxide or gallium arsenide material and the substrate surface having thereon an undesired material to be removed from the surface of the substrate, the undesired material comprising a first silicon oxide material, the first silicon oxide material formed as a result of ambient exposure of the wafer surfaces or formed as an incidental result of wet or gaseous chemical processing steps, the substrate surface also having thereon a second silicon oxide material which is different from the first silicon oxide material and which is desired to be retained on said substrate after performance of said method, the second silicon oxide material being a doped silicon oxide, the method comprising the steps of: (a) evacuating a hermetically-sealed processing chamber to a low base pressure, (b) introducing a silicon wafer substrate into the processing chamber, (c) introducing into said chamber and exposing the silicon wafer in said chamber to a gaseous environment comprising at least one fluorine containing gas selected from the group consisting of fluorine and fluorine containing gases, other than F 2 O, which are free of hydrogen and which can be photodissociated, the gaseous environment being substantially free of plasma products, water, hydrogen, hydrogen fluoride and hydrogen containing organic compounds, (d) exposing the gaseous environment and substrate in said chamber to ultraviolet light, (e) evacuating the processing chamber, and (f) removing the substrate from the processing chamber.
Claim 21
Dependent Claim
30 words
A method as in claim 18 wherein the fluorine containing gas in the gaseous environment is selected from the group consisting fluorine, fluorine interhalogens, fluorides of sulfur and xenon difluoride.
Claim 22
Dependent Claim
37 words
A method as in claim 18 wherein the fluorine containing gas in the gaseous environment is selected from the group consisting of chlorine trifluoride, bromine trifluoride, bromine pentafluoride, iodine pentafluoride, xenon difluoride, sulfur hexafluoride and mixtures thereof.
Claim 23
Dependent Claim
30 words
A method as in claim 18, wherein the gaseous environment further comprises an inert gas selected from the group consisting of helium (He), argon (Ar), and nitrogen (N 2 ).
Claim 24
Dependent Claim
52 words
A method as in claim 18, wherein the gaseous environment further comprises at least one facilitating gas selected from the group consisting of chlorine (Cl 2 ), bromine (Br 2 ), oxygen (O 2 ) and other non-hydrogen containing gases which provide a source of atomic chlorine, bromine or oxygen by photodissociation.
Claim 25
Dependent Claim
39 words
A method as in claim 18, wherein the doped silicon oxide is selected from the group consisting of boron and phosphorus doped silica glass (BPSG), phosphorus doped silica glass (PSG), boron doped silica glass (BSG), and spin-on glass (SOG).
Claim 26
Dependent Claim
25 words
A method as in claim 18, wherein the substrate has a composite film structure including alternating layers of undoped silicon oxide and doped silicon oxide.
Claim 27
Dependent Claim
29 words
A method as in claim 18, wherein the undesired material to be removed during the method further comprises one or more organic compounds, metals, metal silicides or metal nitrides.
Claim 28
Dependent Claim
47 words
A method as in claim 25, wherein the gaseous environment comprises a fluorine containing gas selected from the group consisting of F 2 , ClF 3 , BrF 3 , and SF 6 and a facilitating gas selected from the group consisting of chlorine, bromine and oxygen.
Claim 29
Dependent Claim
35 words
A method as in claim 18, wherein the substrate has a surface having topographical features with bottom and sidewall structures and the undesired material exists on the bottom or sidewall structures of said topographic features.
Claim 30
Dependent Claim
37 words
A method as in claim 18, wherein the substrate temperature is maintained below 400 degrees centigrade and the partial pressure of the fluorine containing gas in the gaseous environment is less than or equal to 1 atmosphere.
Claim 31
Dependent Claim
28 words
A method as in claim 18 wherein said fluorine containing gas is one which can be photodissociated by light having a wavelength in the range of 180-600 nm.
Claim 32
Independent Claim
198 words
A method of removing an undesired material comprising a first silicon oxide material from a surface of a silicon, silicon oxide or gallium arsenide substrate, the substrate comprising on at least a portion of the surface thereof a second silicon oxide material which is different from the first silicon oxide material and is desired to be retained on the substrate, the second silicon oxide material being selected from the group consisting of doped silicon oxide, deposited silicon oxide, and thermally grown silicon oxide, and the first silicon oxide material comprising one or more members selected from the group consisting of silicon oxides formed as a result of ambient exposure of the substrate surfaces, silicon oxides formed as an incidental result of wet or gaseous chemical processing steps, and other trace silicon oxides, the method comprising placing the substrate in a gaseous environment comprising at least one fluorine containing gas which is free of hydrogen and which can be photodissociated, the gaseous environment being substantially free of plasma products, water, hydrogen, hydrogen fluoride and hydrogen containing organic compounds, and exposing the substrate to UV irradiation in the presence of the gaseous environment until the undesired material has been removed.
Claim 33
Independent Claim
198 words
A method of removing an undesired material comprising a first silicon oxide material from a surface of a silicon, silicon oxide or gallium arsenide substrate, the substrate comprising on at least a portion of the surface thereof a second silicon oxide material which is different from the first silicon oxide material and is desired to be retained on the substrate, the second silicon oxide material being selected from the group consisting of doped silicon oxide, deposited silicon oxide, and thermally grown silicon oxide, and the first silicon oxide material comprising one or more members selected from the group consisting of silicon oxides formed as a result of ambient exposure of the substrate surfaces, silicon oxides formed as an incidental result of wet or gaseous chemical processing steps, and other trace silicon oxides, the method comprising placing the substrate in a gaseous environment comprising at least one fluorine containing gas which is free of hydrogen and which can be photodissociated, the gaseous environment being substantially free of plasma products, water, hydrogen, hydrogen fluoride and hydrogen containing organic compounds, and exposing the substrate to UV irradiation in the presence of the gaseous environment until the undesired material has been removed.
Claim 34
Dependent Claim
44 words
A method as in claim 30, wherein the second silicon oxide material is a doped silicon oxide selected from the group consisting of boron and phosphorus doped silica glass (BPSG), phosphorus doped silica glass (PSG), boron doped silica glass (BSG), and spin-on glass (SOG).
Claim 35
Dependent Claim
36 words
A method as in claim 30, wherein the substrate has a surface having topographical features with bottom and sidewall structures and the first silicon oxide material exists on the bottom or sidewalls of said topographic features.
Claim 36
Dependent Claim
30 words
A method as in claim 30, wherein the gaseous environment further comprises an inert gas selected from the group consisting of helium (He), argon (Ar), and nitrogen (N 2 ).
Claim 37
Dependent Claim
52 words
A method as in claim 30, wherein the gaseous environment further comprises at least one facilitating gas selected from the group consisting of chlorine (Cl 2 ), bromine (Br 2 ), oxygen (O 2 ) and other non-hydrogen containing gases which provide a source of atomic chlorine, bromine or oxygen by photodissociation.
Claim 38
Dependent Claim
34 words
A method as in claim 30, wherein the substrate temperature is maintained below 400 degrees centigrade and the pressure of the gas in the processing chamber is less than or equal to 1 atmosphere.
Claim 39
Dependent Claim
36 words
A method as in claim 30, wherein substrate further has additional undesired material thereon to be removed during the method, the additional undesired material comprising one or more organic compounds, metals, metal silicides or metal nitrides.
Claim 40
Dependent Claim
15 words
A method as in claim 30, wherein the gaseous environment is a flowing gaseous environment.
Claim 41
Dependent Claim
28 words
A method as in claim 30 wherein said fluorine containing gas is one which can be photodissociated by light having a wavelength in the range of 180-600 nm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-02-09 | 2001-08-11 | 2002-02-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-02-09 | 2005-08-11 | 2006-02-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-02-09 | 2009-08-11 | 2010-02-10 | $7700.00 | Window Closed / Lapsed |