US5157091A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ultraviolet-absorbing polymer material and photoetching process
Assignee: Individual
•
Filing: 1988-10-07
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Granted: 1992-10-20
•
Expires: 2008-10-07
Abstract
Abstract An ultraviolet-absorbing polymer material comprising a copolymer of a (meth)acrylic ester monomer with a monomer possessing at least one substituting fluorine atom. A photoetching process, characterized by forming a resist film of the ultraviolet-absorbing polymer material on a substrate, exposing this resist film through a light mask to a light beam of a first wavelength, optionally subjecting the resist film in an atmosphere of a photodessociating gas to a light beam of a second wavelength, and effecting an etching treatment by virtue of a reactive radical formed by dissociation.
Inventors
- 👤 Murahara Masataka
- 👤 Shimomura Takeshi
- 👤 Takahashi Toru
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:37
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2041; G03F7/2043; C; C08; C08F; C08F220/00; C08F220/02; C08F220/10; C08F220/12; G03F7/004; G03F7/0041; G03F7/039; G03F7/26; G03F7/36
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
41 words
An ultraviolet-absorbing polymer material which comprises a copolymer of a (meth)acrylic ester monomer with a monomer possessing at least one substituting fluorine atom and a vinyl monomer possessing an aromatic ring or a heterocyclic aromatic ring in the molecular backbone thereof.
Claim 2
Dependent Claim
41 words
An ultraviolet-absorbing polymer material which comprises a copolymer of a (meth)acrylic ester monomer with a monomer possessing at least one substituting fluorine atom and a vinyl monomer possessing an aromatic ring or a heterocyclic aromatic ring in the molecular backbone thereof.
Claim 3
Dependent Claim
112 words
An ultraviolet-absorbing polymer material according to claim 1, wherein the main chain thereof is composed substantially of the following repeating units: ##STR5## wherein R 1 , R 3 , and R 5 are independently hydrogen atom or methyl group, R 2 is an alkyl group of 1 to 5 carbon atoms, R 4 is an alkyl fluoride group of 1 to 8 carbon atoms having at least one hydrogen atom substituted with a fluorine atom, R 6 is a group possessing an aromatic ring or a heterocyclic aromatic ring, and l/m is in the range of 0.3 to 5 and the ratio of (l+m)/n is in the range of 30 to 200.
Claim 4
Dependent Claim
27 words
An ultraviolet-absorbing polymer material according to claim 1 or claim 2, wherein the average molecular weight is in the range of 5×10 5 to 5×10 7 .
Claim 5
Dependent Claim
27 words
An ultraviolet-absorbing polymer material according to claim 1 or claim 2, wherein the average molecular weight is in the range of 5×10 6 to 5×10 7 .
References Cited (Backward Citations)
JPS54145127A
Cited
JPS5518638A
Cited
US4259407A
Cited
JPS55138834A
Cited
JPS5751705A
Cited
US4382985A
Cited
JPS5789753A
Cited
US4421843A
Cited
US4421842A
Cited
US4347162A
Cited
JPS585734A
Cited
JPS585735A
Cited
JPS5833246A
Cited
JPS5990930A
Cited
JPS58100684A
Cited
JPS59127037A
Cited
EP0128516A1
Cited
JPS6129129A
Cited
JPS6153732A
Cited
JPS61152773A
Cited
US4705612A
Cited
JPS61226746A
Cited
JPS629347A
Cited
JPS6259950A
Cited
US4737556A
Cited
EP0294976A2
Cited
JPH0241378A
Cited
JPH02202904A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-20 | 1996-04-20 | 1996-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-20 | 2000-04-20 | 2000-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-20 | 2004-04-20 | 2004-10-20 | $7700.00 | Window Closed / Lapsed |