US4183780A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photon enhanced reactive ion etching
Assignee: International Business Machines Corp
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Filing: 1978-08-21
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Granted: 1980-01-15
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Expires: 1998-08-21
Abstract
Abstract A method and apparatus for modifying a surface, by either plasma etching the surface or plasma depositing a material thereon, by using vacuum ultraviolet radiation to control the modification of the surface.
Inventors
- 👤 Charles M. McKenna
- 👤 H. Keith Willcox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:26
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/517; H10P50/24; H10P50/242; Y; Y10; Y10S; Y10S422/00; Y10S422/906
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
68 words
A method for modifying a surface by either etching the surface or depositing a layer thereon which comprises the steps of, in either order, creating a plasma of reactive gas, and exposing a gas to vacuum ultraviolet of an energy such that the gas will be disassociated and of an intensity sufficient to disassociate the gas in sufficient quantity to permit control of the modification of the surface.
Claim 2
Independent Claim
68 words
A method for modifying a surface by either etching the surface or depositing a layer thereon which comprises the steps of, in either order, creating a plasma of reactive gas, and exposing a gas to vacuum ultraviolet of an energy such that the gas will be disassociated and of an intensity sufficient to disassociate the gas in sufficient quantity to permit control of the modification of the surface.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein the gas comprises a fluorinated hydrocarbon and oxygen.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein the gas comprises a fluorine atom precursor.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein the gas is a plasma and is exposed adjacent the surface to be modified.
Claim 6
Dependent Claim
33 words
The method of claim 4 wherein only the plasma adjacent selected portions of the surface are exposed, thereby modifying the surface in the exposed portion different from the unexposed portions of the surface.
Claim 7
Dependent Claim
15 words
The method of claim 1 wherein the gas is exposed prior to becoming a plasma.
Claim 8
Dependent Claim
39 words
The method of claim 1 wherein the gas contains different molecules and/or radicals, and wherein the energy of the vacuum ultraviolet is tuned to the disassociation energy of at least one but not all of the molecules and/or radicals.
Claim 9
Dependent Claim
17 words
The method of claim 7 wherein the gas is a plasma adjacent the surface to be modified.
Claim 10
Dependent Claim
13 words
The method of claim 7 wherein the plasma has yet to be created.
Claim 11
Dependent Claim
13 words
The method of claim 7 wherein the modification of surface is by etching.
Claim 12
Independent Claim
103 words
An apparatus for modifying a surface by either etching the surface or depositing a layer thereon, comprising: source means for generating vacuum ultraviolet radiation; monochromator means for tuning the radiation to a predetermined energy; plasma reactor means adapted to modify the surface of articles with a plasma and having a supply chamber of gas for the plasma; and means for directing the tuned radiation to expose at least a portion of the gas, said radiation having an energy overlapping the disassociation energy of the gas, whereby the gas disassociates into reactive species thereby permitting real time control of the modification of the surface.
Claim 13
Independent Claim
103 words
An apparatus for modifying a surface by either etching the surface or depositing a layer thereon, comprising: source means for generating vacuum ultraviolet radiation; monochromator means for tuning the radiation to a predetermined energy; plasma reactor means adapted to modify the surface of articles with a plasma and having a supply chamber of gas for the plasma; and means for directing the tuned radiation to expose at least a portion of the gas, said radiation having an energy overlapping the disassociation energy of the gas, whereby the gas disassociates into reactive species thereby permitting real time control of the modification of the surface.
Claim 14
Dependent Claim
22 words
The apparatus of claim 11 wherein the gas is exposed as a plasma adjacent the surface of the article to be modified.
Claim 15
Dependent Claim
19 words
The apparatus of claim 1 wherein the gas is exposed while in said chamber prior to becoming a plasma.
Claim 16
Dependent Claim
16 words
The apparatus of claim 1 wherein the means for generating vacuum ultraviolet radiation is a duoplasmatron.
Claim 17
Dependent Claim
22 words
The apparatus of claim 1 wherein the gas is CF 4 and O 2 and wherein the surface is modified by etching.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-01-14 | 1983-07-16 | 1984-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-01-14 | 1987-07-16 | 1988-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-01-14 | 1991-07-16 | 1992-01-15 | $7700.00 | Window Closed / Lapsed |